摘 要

在常見的製造產業領域中，均可查覺到許多場合需要作業動作之彼此協同配合或甚至同步，如空間軌跡加工，多機械手臂的同時作業、真空幫浦等，而其中的真空幫浦則是最值得注意的一個典型範例。真空幫浦為現今半導體製程中不可或缺的裝置設備，其幫浦功能乃藉由兩幫浦轉子的同步運轉而達成。為了使得幫浦轉子能同步運轉，一般都採用惰輪驅動的方式，然而此種設計己逐漸無法滿足隨著製程技術演進對真空系統的嚴格要求。

為徹底對同步運動控制提供適當對策，並突破傳統真空幫浦的設計架構，為無油密封潤滑新一代的幫浦設計較佳的控制方法，本論文將努力著重於雙馬達同步運動控制之應用研究。而在此也將以雙分離馬達之同步控制為第一目標，而考量實際系統中不可避免之不確定性及未知干擾，接著將試著對雙馬達系統之同步運動控制進行探討，並著眼於兩轉子間意外相互接觸碰撞的解決方法。期望發展出有效雙馬達同步運動之控制策略，而能維持長時間的同步運轉，並達到較佳之同步效果。

Abstract
Coordinated or synchronized tasks can always be found in various manufacturing processes, e.g., machining along spatial trajectories, coordinated operations of multi-manipulators, and vacuum pumps, etc. The vacuum pump is a typical device with synchronized motion among those examples. The vacuum pump has played an important role in current semiconductor manufacturing processes. Its pumping feature is achieved by synchronized motion of two mating pump rotors. A common approach to accomplish the synchronized motion is by idle gears. Nevertheless, this design cannot meet serious requirements of vacuum systems demanded by growing manufacturing techniques.

In order to provide a complete and proper control strategy for synchronized motion, and to overthrow traditional architecture of vacuum pumps by raising a better control scheme for new generation oil-less products, the paper focuses on synchronized motion control for dual motors. The first objective of here is to develop a control method for synchronized motion of two separated motors. Both system uncertainties and unknown disturbances occurring in actual implementation need to be carefully considered. An experimental setup will also be established for examinations and verifications. And then synchronized motion control of dual motors including two mating screw rotors then will be investigated. During this period, the emphasis will be on solution finding for unexpected contact collision between two rotors. An effective and efficient control strategy will be developed for synchronized motion control of dual motors. Longer operation time and better synchronization performance for two motors can therefore be anticipated.

目 錄

目 錄…………………………………………………………………..Ⅰ
圖索引…………………………………………………………………..Ⅲ
表索引…………………………………………………………………..Ⅷ
摘 要…………………………………………………………………..Ⅸ
英文摘要………………………………………………………………..Ⅹ


第一章 緒論……………………………………………………………1
1-1 動機與目的…………………………………………………...1
1-2 文獻回顧……………………………………………………...5
n 同步運動控制器……………………………………….5
n 負載轉矩觀測器……………………………………….9
1-3 論文架構…………………………………………………….14

第二章 系統動態模式建立…………………………………………..15
2-1 系統建立…………………………………………………….15
2-2 系統數學模式建立………………………………………….16

第三章 控制器設計…………………………………………………..20
3-1 個別迴路控制器設計……………………………………….21
3-2 交互耦合控制器設計……………………………………….25
3-3 負載轉矩觀測器設計……………………………………….36
3-4 負載轉矩補償器設計……………………………………….40

第四章 雙馬達碰撞模式建立………………………………………..42
4-1 碰撞模式建立……………………………………………….42
4-2 命令輸入軌跡設計………………………………………….50

第五章 控制器參數設定……………………………………………..53
5-1 同步運動控制器參數選定………………………………….53
5-2 負載轉矩控制器參數選定………………………………….61

第六章 系統模擬結果與分析………………………………………..65
6-1 同步運動控制模擬………………………………………….65
6-2 負載轉矩控制模擬………………………………………….73
6-3 雙馬達碰撞模式模擬……………………………………….85

第七章 結論…………………………………………………………..97

參考文獻………………………………………………………………100

附錄A 轉子間隙與轉動碰撞相位角之關係……..…..…………….105
附錄B 加上硬體條件模擬控制結果……………………………….107

參考文獻

[1] R.D. Lorenz, and P.B. Schmidt, “Synchronized motion control for process automation,” Proceedings of the 1989 IEEE Industry Applications Annual Meeting, pp. 1693-1698, 1989.

[2] R.D. Lorenz, 、J.J. Zik, and D.J. Sykora,“A direct-drive robot parts & tooling gripper with high performance force feedback control,” Industry Applications Society Annual Meeting, Vol. 2 pp. 1678-1684, 1989.

[3] G.W. Younkin, W.D. McGlasson and R.D. Lorenz, “Considerations for low-inertia AC drives in machine tool axis servo applications,”Industry Applications, IEEE Transaction on. Vol. 27, Issue: 2 ,pp. 262-267, March-April, 1991.

[4] Y. Koren, “Cross-coupled biaxial computer control for manufacturing systems, ” Journal of Dynamic Systems, Measurement, and Control, Vol. 102, pp.265-272, 1980.

[5] K. Srinivasan, and P.K. Kulkarni, “Cross-coupled control of biaxial feed drive servomechanisms, ” ASME Journal of Dynamic Systems, Measurement, and Control, Vol. 112, pp. 225-232, 1990.

[6] M. Tomizuka,、J.S. Hu,、T.C. Chiu, and T. Kamano, “Synchronization of two motion control axes under adaptive feedforward control,” ASME Journal of Dynamic Systems, Measurement, and Control, Vol. 114, No. 2, pp. 196-203, 1992.

[7] S.M. Shahruz, and A.K. Pradeep, “A high precision synchronizing control system for biaxial positioning tables,” ASME Journal of Dynamic Systems, Measurement, and Control, Vol. 116 No. 1, pp. 158-163, 1994.

[8] L.F. Yang, and W.H. Chang, “Synchronization of two twin-gyro precession under cross-coupled adaptive feedforward control,” Journal of Guidance, Control, and Dynamics, Vol. 19, No. 3, 1996.

[9] H.J.C. Huijberts,、H. Nijmeijer, and R.M.A. Willems, “Regulation and controlled synchronization, ”Proceedings of the 37th IEEE Conference on Decision and Control, pp. 3093-3098, 1998.

[10] M. Naumovic, “Cross-coupled motion controller for two cooperating robot arms,”Industrial Electronics, 1999, ISIE’99, Proceedings of the IEEE International Symposium on, Vol. 2,pp. 909-913, 1999.

[11] L. Feng,、Y. Koren, and J. Borenstein, “Cross-coupled motion controller for mobile robots,”IEEE Control System Magazine, Vol. 13, Issue：6, pp. 35-43, December. 1993.

[12] P.K. Kulkarni, and K. Srinivasan, “Optimal contouring control of multi-axial feed drive servomechanisms,”Transactions of the ASME, Vol. 111, pp. 140-180, May. 1989.

[13] H.Y. Chuang, and C.H. Liu,“A model-referenced adaptive control strategy for improving contour accuracy of multi-axis machine tools,”IEEE Transactions on Industry Applications, Vol. 28, No. 1, pp. 221-227, January/February. 1992.

[14] S.S. Yen, and P.L. Hsu,“Theory and applications of the robust cross-coupled control design,”Transactions of the ASME, Vol. 121,pp. 524-530, September. 1999.

[15] S.S Yeh, and P.L. Hsu,“Analysis and design of the integrated controller for precise motion systems,”IEEE Transactions on Control Systems Technology, Vol. 7, No. 6, pp. 706-717, November. 1999.

[16] S.S Yeh, and P.L Hsu,“A new approach to biaxial cross-coupled control,”Proceedings of the 2000 IEEE International Conference on Control Applications, Anchorage, Alaska, USA, pp. 168-173, September. 2000.

[17] S.S Yeh, and P.L Hsu,“Design of precise multi-axis motion control systems,”Advanced Motion Control, 2000. Proceedings. 6th International Workshop on, pp. 234-239, 2000.

[18] C.C. Cheng, and C.Y. Chen, “A PID approach to suppressing stick-slip in the positioning of transmission mechanism,” Control Engineering Practice, Vol. 6, No.4 , pp. 471-479, 1998.


[19] S. Endo, M. Tomizuka, and Y. Hori, “Robust Digital Tracking
Controller Design for High-Speed Positioning System,” Proceedings of the American Control Conference , San Francisco,California,
pp.2494-2498,June 1993.

[20] M. Iwasaki, and N. Matsui, “Observer-Based Nonlinear Friction Compensation in Servo Drive System,” AMC’96-MIE: 1996 International Workshop on Advanced Motion Control: Proceedings,pp.344-348,March 18-21,1996.

[21] H.S. Lee, and M. Tomizuka, “Robust Motion Controller Design for High-Accuracy Positioning Systems,” IEEE Transactions on Industry Electronics,Vol.43,No.1,pp.48-55,February 1996.

[22] K. Sugiura, and Y. Hori, “Vibration Suppression in 2- and 3-Mass System Based On the Feedback of Imperfect Derivative of the Estimated Torsional Torque,” IEEE Transactions on Industrial Electronics,Vol.43,No.1,pp.56-64,February 1996.

[23] T. Umeno, and Y. Hori, “Robust Speed Control of DC Servomotors Using Modern Two Degrees-of-Freedom Controller design,” IEEE Transactions on Industrial Electronics ,Vol.38,No.5, pp.363-368, October 1991.

[24] M. Hou, and P.C. Müller, “Design of Observers for Linear Systems with Unknown Inputs,” IEEE Trans. On Automatic Control,Vol.37,
No.6,pp.871_875,1992.

[25] G. Yuping, and S. Mehrdad, “A Novel Approach to the Design of Unknown Input Observer,” IEEE Trans. On Automatic Control, Vol.36,No.5,pp.632_635,1991.

[26] E.C. Tseng, M.-Y. Cheng, and M.-C Tsai, “Design of a PI-type torque observer for detecting abnormal load,” Proceedings of the 1998 international conference on mechatronics technology, pp.147-152,1998.

[27] E.C. Tseng, M.-Y. Cheng, and M.-C. Tsai, “Design of a torque observer for detecting abnormal load,” Control Enginnering Practice pp.259-269,2000.



[28] D.G. Luenberger, “An Introduction to Observers”IEEE Transactions on Automatic Control, Vol.AC-16,No.6,pp.596-602,December 1971.

[29] S.B. Giuseppe, “Disturbance Torque Estimation in a Sensorless DC Drive,” IEEE Trans. On Industrial Electronics, Vol.42,No.4, pp.351-357,1995.

[30] J.S. Ko, J.H. Lee, and M.J. Youn, “Robust digital position control of brustless D.C. motor with adaptive load torque observer,” IEEE Proc. Electr. Power Appl., Vol.141, No.2,pp.63_70,1994.

[31] Niu. Quanmin、Qi. Yingchuan、Lu. Feixing, Cai. Xiaoyong, “The simulation analysis in the speed sensorless dc servo system,” IEEE Proceeding of the World Congress on Intelligent Control and Automation,pp.2065-2067,July 2000.

[32] S. Dubowsky,and F. Freudenstein,“Dynamic Ananysis of Mechanical Systems With Clearances,Part1：Formation of Dynamic Model, ”ASME,Jnl. Of Engineering for Industry, Vol.93,pp.305-309
.Feb.1971.

[33] J. Christian Gerdes, and Vijay Kumar, “An Impact Model of Mechanical Backlash for Control System Analysis,” Proceeding of American Control Conference Seattle, Washington, pp.3311-3315, 1995.

[34] G.Werner, IMPACT, The Theory and Physical Behaviour of Colliding Solids, Edward Amold, LTD, London, 1960.

[35] R. Kasuba, and J. W. Evans, “An Extended Model for Determining Dynamic Load in Spur Gearing,” ASME, Jnl. Of Mechanical Design, Vol.103, pp.398-409.1981.

[36] Timoshenko, and Goodier, Theory of Elasticity, Edition, 1970.

[37] D. C. H. Yang, and Z. S. Sun, “A Rotary Model for Spur Gear Dynamics,” Transaction of the ASME, Journal of Mechanisms, Transmissions, and Automation in Design, pp.529-535, December, 1985.



[38] Yu Nakayama、Kiyoshi Fujikawa, and Hirokazu Kobayashi, “A Torque Control Method of Three-Interia Torsional System with Backlash,” Advanced Motion Control, 2000. Proceedings. 6th International Workshop on 2000, pp.193-198,2000.

[39] 薛博文, “雙馬達之同步運動控制”,碩士論文,國立中山大學機械工程研究所,民國九十年。

[40] 桂人傑, “現代交流伺服產品控制技術”, 機械工業雜誌, pp.168-179 ,民國八十七年四月。

[41] 康榮坤,“以觀測器為基礎之線性馬達定位控制,”碩士論文,國立中山大學機械工程研究所, 民國八十八年。

[42] 潘奕傑, 謝成, “永磁式有刷直流馬達之參數辨識”, 1997自動控制研討會論文集, pp.261-265, 民國八十六年。

[43] 徐志剛, “雙馬達驅動系統與齒隙補償之智慧型控制”,碩士論文, 國立台灣大學電機研究所,民國八十八年。

[44] 蘇君誠, “具有齒隙雙馬達驅動系統的智慧型控制”,國立台灣大學電機研究所,碩士論文,民國九十年。