近年來光通訊產業需求的急速發展，使得可調雷射光源應用於光傳輸網路系統中的需求增加，而摻鉻釔鋁石榴石(Cr4+:YAG)晶體光纖於光通訊波長的寬頻特性，使其具有不可或缺的重要性。而摻鐿釔鋁石榴石-玻璃光纖(Yb3+:YAG-silica)在高功率雷射領域，亦佔有一席之地。

本論文採用由雷射加熱基座生長法生長之光纖做為雷射增益介質，藉由熔融石英包覆技術可將晶體光纖之纖心直徑縮小至11 μm之摻鉻釔鋁石榴石雙纖衣晶體光纖。此外調整生長之雷射功率，使得摻鐿釔鋁石榴石與披離擴散互熔，成功的生長出纖心直徑約125 μm之摻鐿釔鋁石榴石-玻璃光纖，形成波導結構。並直接在上述兩種光纖兩端鍍上光學薄膜形成共振腔，可大幅縮小雷射之體積，降低成本，簡化雷射架構。此外並配合銅鋁合金包覆來提高雷射之散熱效率，成功研製出室溫下世界紀錄之0.75 mW超低激發閥值(ultralow threshold)，及室溫下世界紀錄最高雷射效率(6.9%)之摻鉻釔鋁石榴石晶體光纖雷射，以及具有室溫下低激發閥值(100 mW)、高效率(67.2%)之摻鐿釔鋁石榴石-玻璃光纖雷射。

在雷射薄膜研製發展方面，已成功製鍍出匹配異質結構光纖(即單、雙纖衣結構)端面之高反射薄膜，形成對激發光源高穿透率與激發輻射光子高反射率之雷射共振腔，降低雷射損耗及提高雷射效率，達成室溫下低損耗閥值、高效率且穩定的雷射輸出；並藉由不同膜層厚度及堆疊設計，改善膜層與基板存在之介面效應，完成高品質之光學薄膜。

Recently, with the escalating demands for optical communication, the need to use broadband laser light sources in optical communication network system has increased. Henceforward, the broadband characteristes of Cr4+:YAG crystal fiber possess signifies its indispensability. Furthermore, Yb3+:YAG-silica also has its advantages in high power laser domain.

In this thesis, the crystal fiber grown by the laser heated pedestal growth method is used as the laser gain medium with fused silica packaging technique. Cr4+:YAG double-clad crystal fiber with a core diameter as small as 11 μm was achieved. Moreover, a Yb3+:YAG-silica layer was formed due to the strong inter-diffusion between silica capillary and Yb3+:YAG crystal. When the silica all diffused into the Yb3+:YAG, a Yb3+:YAG-silica fiber with 125-μm core was obtained with waveguide structure. By directly coating the optical thin films onto the end faces of the two types of fibers, the laser configuration is compact and cost effective. Besides, heat dissipation is also improved. By Cu-Al alloy packaging, a record-low Cr4+:YAG double-clad crystal fiber laser was achieved with threshold of 0.75 mW and a record-high slope efficiency of 6.9% at room temperature. And we also successfully fabricate the Yb3+:YAG-silica fiber laser with low threshold (100 mW) and high efficiency (67.2%) at room temperature.

In fiber laser development, we have successfully fabricated the coating of high-reflective thin films which match the faces of fiber heterostructure (single cladding and double cladding structures). It forms a cavity with anti-reflectivity for pumping wavelength and high-reflectivity for lasing wavelength. For these reasons, low threshold, high slope efficiency, and stable laser output have been achieved. Finally, through different thin-film designs, the strain effect between thin film and heterosubstrate is significantly reduced, which facilitates the realization of high performance fiber lasers.

中文摘要 i
英文摘要 ii
目錄 iii
圖目錄 v
表目錄 x

第一章 緒論 1
第二章 光學薄膜基本原理 3
2.1 光學薄膜的膜特徵矩陣 3
2.2 光學薄膜材料特性與光學常數分析 8
2.3 膜成長理論 18
2.4 光學薄膜電場分佈 20
第三章 雷射樣品特性及製備 22
3.1 雷射加熱基座生長法 22
3.2 光纖之光學特性 28
3.3 包覆及端面處理 30
第四章 電子槍蒸鍍系統架構及量測儀器 34
4.1 電子槍蒸鍍系統 34
4.1.1 真空系統 34
4.1.2 電子槍系統 36
4.1.3 離子輔助系統 39
4.1.4 監控系統 43
4.2 膜層檢測 47
4.3 視窗程式(薄膜記錄檔之自動化分析) 50

第五章 Cr4+:YAG晶體光纖及Yb3+:YAG-silica玻璃光纖雷射之端面鍍膜 54
5.1 薄膜於金屬包覆晶纖端面出現之問題與處理 54
5.1.1 薄膜於金屬包覆晶纖端面出現之問題 54
5.1.2 光學薄膜與異質界面之溫控處理 56
5.2 雷射共振腔與端面鍍膜 58
5.2.1 Cr4+:YAG晶體光纖雷射 60
5.2.2 Yb3+:YAG-silica玻璃光纖雷射 70
5.3 薄膜沈積微觀結構之分析 84
5.3.1 薄膜沈積之剖面結構 84
5.3.2 薄膜沈積之表面結構 85
5.4 離子輔助鍍膜 89
5.4.1 電子槍蒸鍍系統架構 89
5.4.2 薄膜材料特性分析 93
第六章 結論 105

參考文獻 107
中英對照表 111

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