Title page for etd-0703111-154006


[Back to Results | New Search]

URN etd-0703111-154006
Author Sheng-wei Lu
Author's Email Address No Public.
Statistics This thesis had been viewed 5587 times. Download 777 times.
Department Electro-Optical Engineering
Year 2010
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Study of Surface Property of Rubbed Polyimide Thin Films using Reflection Anisotropy Spectroscopy
Date of Defense 2011-06-13
Page Count 74
Keyword
  • Reflectance Anisotropy Spectroscopy (RAS)
  • Surface Free Energy
  • Pretilt Angle
  • Rubbing Strength
  • Alignment Film
  • Abstract Reflectance anisotropy spectroscopy is a non-contact technique for surface detection. which means through the optical reflection from surface of the substrate measured. Because of its high sensitivity, RAS is used for in real-time control of semiconductor epitaxy. On our study, RAS is used to study the surface characteristics of liquid crystal alignment layer.
       We used rubbing for polyimide film to achieve alignment purposes. The rubbing strength is determined by adjusting the pile impress and the number of rubbed. We found that the anisotropy spectroscopy will appear after rubbing. And the strength of RA signals changes with photon energy of the probe beam. The pretile angle of the liquid crystal sandwiched in between rubbed PI show certain degree correlation with RA strength. In addition, using surface free energy measurement to explore the relationship with pretilt angle and try to connect three of them.
       We also tried to measure the reflection signal from the sample back. We found the signal of sample back would decay in UV region and it may be a result of UV absorption in the substrate.
    Advisory Committee
  • Tsung-Hsien Lin - chair
  • Mei-Ying Chang - co-chair
  • Wei Lee - co-chair
  • Wenjun Zheng - advisor
  • Files
  • etd-0703111-154006.pdf
  • indicate access worldwide
    Date of Submission 2011-07-03

    [Back to Results | New Search]


    Browse | Search All Available ETDs

    If you have more questions or technical problems, please contact eThesys