在常見的製造產業領域中，均可查覺到許多場合需要
作業動作之彼此協同配合或甚至同步，如空間軌跡加工，
多機械手臂的同時作業、真空幫浦等，而其中的真空幫浦
則是最值得注意的一個典型範例。真空幫浦為現今半導體
製程中不可或缺的裝置設備，其幫浦功能乃藉由兩幫浦轉
子的同步運轉而達成。為了使得幫浦轉子能同步運轉，一
般都採用惰輪驅動的方式，然而此種設計己逐漸無法滿足
隨著製程技術演進對真空系統的嚴格要求。

為徹底對同步運動控制提供適當對策，並突破傳統真
空幫浦的設計架構，為無油密封潤滑新一代的幫浦設計較
佳的控制方法，本論文將努力著重於雙馬達同步運動控制
之應用研究。而在此也將以雙分離馬達之同步控制為首要
目標，而考量實際系統中不可避免之不確定性及未知干
擾，接著將試著對雙馬達系統之同步運動控制進行探討，
並著眼於兩轉子間意外相互接觸碰撞的解決方法。期望發
展出有效雙馬達同步運動之控制策略，而能維持長時間的
同步運轉，並達到較佳之同步效果。

Coordinated or synchronized tasks can always
be found in various manufacturing processes,
e.g., machining along spatial trajectories,
coordinated operations of multi-manipulators, and
vacuum pumps, etc. The vacuum pump is a typical
device with synchronized motion among those
examples. The vacuum pump has played an important
role in current semiconductor manufacturing
processes. Its pumping feature is achieved by
synchronized motion of two mating pump rotors. A
common approach to accomplish the synchronized
motion is by idle gears. Nevertheless, this
design cannot meet serious requirements of vacuum
systems demanded by growing manufacturing
techniques.

In order to provide a complete and proper
control strategy for synchronized motion, and to
overthrow traditional architecture of vacuum
pumps by raising a better control scheme for new
generation oil-less products, the paper focuses
on synchronized motion control for dual motors.
The first objective of here is to develop a
control method for synchronized motion of two
separated motors. Both system uncertainties and
unknown disturbances occurring in actual
implementation need to be carefully considered.
An experimental setup will also be established
for examinations and verifications. And then
synchronized motion control of dual motors
including two mating screw rotors then will be
investigated. During this period, the emphasis
will be on solution finding for unexpected
contact collision between two rotors. An
effective and efficient control strategy will be
developed for synchronized motion control of dual
motors. Longer operation time and better
synchronization performance for two motors can
therefore be anticipated.

目 錄

目 錄…………………………………………………………………Ⅰ
圖索引…………………………………………………………………Ⅲ
表索引…………………………………………………………………Ⅵ
摘 要……..…………………………………………………………Ⅶ

第一章 緒論………………………………………………………1
1-1 動機與目的……………………………………………………1
1-2 文獻回顧………………………………………………………6
1-3 論文架構………………………………………………………13

第二章 系統動態模式建立………………………………………14
2-1 系統建立………………………………………………………14
2-2 系統之數學模式………………………………………………16

第三章 控制器之設計……………………………………………26
3-1 個別迴路之增益值設計………………………………………26
3-2 零相位誤差追循之前饋控制器………………………………29
3-3 交互耦合控制器………………………………………………36

第四章 模擬結果與分析…………………………………………48
4-1 軌跡設計………………………………………………………48
4-2 控制器參數選用………………………………………………51
4-3 模擬結果………………………………………………………59

第五章 實驗結果…………………………………………………62
5-1 實驗系統架構…………………………………………………62
5-2 實驗結果………………………………………………………64

第六章 結論………………………………………………………75

參考文獻…………………………………………………………….77
附錄A Chirp Signal之頻率範圍…………………………………81
附錄B 黑箱模式鑑別之結果於高轉速下之可靠性………………82
附錄C 轉子間隙與轉動碰撞相位角之關係………………………84

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