為了穩定地驅動電子顯微樣品槽(K-kit)以及控制驅動之速度，本論文提出一個創新的軸向驅動微步進定位平台(AAMPS)，該平台是一透過毛細現象(Capillarity)填充微流體至樣品槽的自動充填系統。其主要由壓電線性致動器、毛細作用偵測器與電容位置感測器搭配驅動電路所組成。
電容位置感測器可以即時量測出感測器中兩電容極板重疊面積之電容值，隨著致動器上滑塊驅動位置改變，極板之重疊面積和電容值也將隨其產生變化。驅動電路中，微控制器(MCU)透過脈衝寬度調變技術(PWM)，改變壓電致動器載波頻率之工作週期(Duty-ratio)。壓電致動器將根據上述之電容值變化調變K-kit速度，並以此調變技術達到微步進驅動之能力。
毛細作用偵測器用於判斷樣品槽是否與目標微流體發生毛細作用，當毛細作用發生時，偵測器之電容值會產生劇烈變化。此時致動器停止驅動，樣品槽開始採集目標微流體。對於壓電致動器而言，每塊壓電塊材會因製造過程、環境與溫度等因素，造成共振頻率上些許的差異。為確保致動器中壓電塊材能有最高的機電轉換效率，本論文使用鎖相迴路(PLL)達成自動追蹤壓電線性致動器的共振頻率。
此外，為了實現AAMPS之長行程致動，本論文開發出一創新長行程壓電線性致動器，此致動器搭配一個44.2 × 8 × 1.5 mm^3的壓電塊材，以順序激發之方式實現長距離的行程移動。且實驗結果顯示，長行程壓電線性致動器最大行程可達到32.5 mm。

For driving electron microscope sampling capacity (K-kit) smoothly and modulate the driving speed, this thesis proposed a novel ‘‘axial-actuating micro-stepping positioning stage’’ (AAMPS). It is an automatic feeding system, which utilizes the Capillarity action for the microfluidic sampling process. The AAMPS composed of a piezoelectric linear actuator, a capillarity filling detector and a capacitance position sensor with a driving circuit.
The capacitive position sensor measures the in-time capacitance from the overlapping area between two capacitive plates. The overlapping area and the capacitance would vary according to the difference relative position of plates. For the driving circuit, the microcontroller (MCU) adjusts the duty-ratio of the piezoelectric linear actuator carrier frequency through pulse–width modulation technology (PWM). The velocity of the K-kit was modulated by the piezoelectric linear actuator refer to the capacitance variation and achieve the ability of micro-stepping motion.
The capillarity filling detector was used to distinguish whether the capillarity happens between K-kit and target liquid. The capacitance will increase sharply while the capillarity happen. This time the actuator will stop working and the K-kit will begin filling into the liquid. For the piezoelectric actuator, each piezo plate has individual difference due to manufacturing, surroundings and temperature etc. To ensure every piezo plate is working under best machine-electric efficiency. This thesis used the phase-locked loop (PLL) technology to achieve automatic tracking of the resonant frequency of the piezoelectric linear actuator.
Furthermore, a concept of installing a long-distance driving actuator on AAMPS was proposed. This actuator will be mounted a 44.2 × 8 × 1.5 mm^3 piezo plate and realize the long traveling distance actuating by sequent excitation. The experimental result indicates that the maximum stroke of the actuator is 32.5 mm.

摘要 i
ABSTRACT ii
CONTENTS iv
LIST OF FIGURES vii
LIST OF TABLES xiii
LIST OF SYMBOLS xiv
CHAPTER 1 INTRODUCTION 1
1.1 Motivation 1
1.2 Literature Survey 3
1.2.1 Piezoelectric ultrasonic motors 4
1.2.1.1 Piezoelectric linear motors 4
1.2.1.2 Linear piezoelectric actuator 8
1.2.2 Piezo positioning stage 16
CHAPTER 2 PIEZOELECTRIC ACTUATOR DESIGN 20
2.1 Motivations 20
2.1.1 Piezoelectric Effect 21
2.2 Piezoelectric Materials 23
2.3 Governing Equation 26
2.3.1 Strain-charge form interactive relationship equation 28
2.4 PZT-QA 29
2.4.1 Parameters of PZT-QA 29
2.4.2 Actuating principle of PZT-QA 30
2.5 COMSOL SIMULATION 33
2.5.1 Piezo plate: 21×8×1.5 mm3 with sidewall 7.5° inclined 34
2.5.2 Piezo plate: 22×8×1.5 mm3 with sidewall 7.5° inclined 43
2.5.3 Piezo plate: 44.2×8×1.5 mm3 with sidewall 7.5° inclined 49
CHAPTER 3 NOVEL AXIAL-ACTUATING MICROSTEPPING POSITIONING STAGE 56
3.1 Mechanism of AAMPS 57
3.2 Capacitive sensing system 58
3.2.1 Capillarity phenomenon (capillarity attraction) 59
3.2.2 Capacitive principle 59
3.2.3 Design of capacitive sensor 61
3.2.4 Theoretical capacitance from AD7150 64
3.3 Control circuit 66
3.3.1 Duty ratio (duty cycle) 66
3.3.2 Phase-locked loops 67
CHAPTER 4 EXPERIMENT RESULT 69
4.1 Experiment flow chart of automatic sampling process 69
4.2 Displacement and velocity of AAMPS with driving circuit 70
4.2.1 Speed modulation 71
4.2.1.1 Upward actuating 72
4.2.1.2 Downward actuating 75
4.2.1.3 Velocity-duty of the piezoelectric actuator 77
4.2.1.4 Free thrust of the piezoelectric actuator 78
4.3 Automatic sampling process of AAMPS .79
4.3.1 Initial position of K-kit 79
4.3.2 Actuating status of K-kit 80
4.3.3 Sampling status (final position) of K-kit 81
4.3.4 Full speed upward actuating status of K-kit 82
4.3.5 Capacitance of Capacitive position sensor and Capillarity filling detector 83
4.4 44.2×8×1.5 mm3 piezo plate actuating 84
CHAPTER 5 CONCLUSION AND FUTURE WORK 89
5.1 Conclusion 89
5.2 Future work 90
REFERENCE 91

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