本研究目的為利用電漿輔助化學氣相沉積法(Plasma Enhanced Chemical Vapor Deposition ,PECVD)於聚酸碳酯(Polycarbonate ,PC)基板上沉積類鑽碳膜(Diamond Like Carbon ,DLC)，以期應用為光學保護膜。在PC基板上成長類鑽碳膜最適合之方法即為PECVD法，因為製程可在低溫下進行，防止製程溫度過高而使類鑽碳膜與PC基板剝落。
為了增加鍍層之附著力，將先在PC基板上沉積一層SiO2當作中間層，且選擇了有機矽烷化物(HMDSO)當進料物，主要是HMDSO含有Si、O成分，可能在成膜過程中生成類玻璃(Glass-like)結構，使薄膜具有透明性以及拉近與塑膠基板之間熱膨脹係數的差異。本實驗將針對在不同的反應氣體(CH4)濃度、不同基板偏壓以及不同矽摻雜濃度、電極距離等條件下對鍍層作拉曼光譜分析，進而探討G Band、D Band積分強度(ID/IG)比與鍍層表面粗糙度、硬度等機械性質之關係，且探討不同基板偏壓和中間層厚度對鍍層附著性之影響。
最後，我們將探討類鑽碳膜鍍在相變化光碟上的特性，針對類鑽碳膜的機械、光學和結構上的性質如何影響本實驗光碟片的表面、拉曼光譜、電氣訊號，利用原子力顯微鏡、UV-Vis光譜儀、商用燒錄機、碟片測試機來探討此微結構。實驗結果顯示非常適合在相變化光碟的表面鍍上類鑽碳膜以保護資料儲存。

The purpose of this research was to deposit the protective diamond-like carbon (DLC) films on polycarbonate substrates for optical applications. In this study, by using the PECVD method is the better way to deposit DLC film on polycarbonate substrates since the whole process were performed at low temperature to avoiding any degradation of the adhesion of DLC film on polycarbonate substrates occurred at high temperature.

In order to further increase the adhesion between the polycarbonate substrates and the DLC film, we deposited the SiO2 layer as an interlayer, and select HMDSO as precursor because it contain Si and O atoms. It is because that SiOx films that can be deposited from HMDSO/oxyzen feeds are relatively hard and against mechanical damages due to forming the glass-link structure. In addition, SiOx films are fully transparent in the UV range and decrease the difference of TCE ( thermal expansion coefficient) of PC and coating films. In experiments, it is preceded being focus on the analysis of Raman spectrum for the films grown at various CH4 gas fluxes, substrates bias voltages, Si-doping concentrations and the distance of electrode separation. The dependence of the intensity ratio of D-band and G-band ( ID/IG ) on the surface roughness, hardness and mechanical properties were investigated, and the adhesion of coating layer depends on the thickness of intermediate layer were studied under various substrate bias voltage.

At least, the properties of diamond-like carbon (DLC) film coatings on phase-change recording media were characterized by Raman spectroscopy, atomic force microscope (AFM), UV-visible spectrometer and disc testers. The dependence of mechanical, optical and structural properties of DLC films included the characteristics of surface roughness, hardness, transmittance and electrical signals of discs on serveral DLC film thicknesses were investigated. Our experimental results indicate that DLC films provide a suitable coating to protect PC substrate and make it no difference for data stored on phase-change optical discs.

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