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論文名稱 Title |
δ-doped InxGa1-xAs/InAlAs 量子井的電子特性研究 Electronic properties of δ-doped InxGa1-xAs/InAlAs Quantum wells |
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系所名稱 Department |
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畢業學年期 Year, semester |
語文別 Language |
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學位類別 Degree |
頁數 Number of pages |
63 |
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研究生 Author |
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指導教授 Advisor |
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召集委員 Convenor |
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口試委員 Advisory Committee |
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口試日期 Date of Exam |
2005-06-20 |
繳交日期 Date of Submission |
2005-07-06 |
關鍵字 Keywords |
霍爾、砷化銦鎵、砷化銦鋁、量子井、二維電子氣 2DEG, quantum wells, SdH, InGaAs/InAlAs, Hall. |
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統計 Statistics |
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中文摘要 |
我們使用Shubnickove-de Hass (SdH)量測來研究 InxGa1-xAs/ In0.52Al0.48As的電子特性。銦的含量變數(x)隨著不同的量子井結構改變從0.5到0,56,我們的樣品的量子井結構;Sample A的結構為最簡單方形量子井“In0.53Ga0.47As”;Sample B是漸變式分段限制異質結構“In0.56Ga0.44As/In0.53Ga0.47As/In0.5Ga0.47As”; Sample C的結構是參數x線性的慢慢減少,由In0.56Ga0.44As線性的慢慢減少至In0.5Ga0.5As;Sample D的結構為參數x是線性的慢慢增加,由In0.5Ga0.5As線性的慢慢增加到In0.56Ga0.44As。在這些樣品中因為電子存在於最低的兩個subband所以我們可以觀察到兩個SdH橫向電阻的震盪。為了觀察這兩個subband的電子特性,我們也使用Ven der Pauw Hall量測方法。從SdH與Hall這兩種量測方法,我們可以得到在這些樣品的兩個subband中的電子遷移率跟載子濃度。 |
Abstract |
We have studied the electronic properties of InxGa1-xAs/ In0.52Al0.48As quantum wells by using Shubnickove-de Hass (SdH) measurement. The indium composition (x) of well layers was varied from 0.5 to 0.56 whit different structures, such as sample A is simply “In0.53Ga0.47As”, sample B is a step-well like“In0.56Ga0.44As/In0.53Ga0.47As/In0.5Ga0.47As”,sample C is linearly graded well is a opposite way“In0.56Ga0.44As down to In0.5Ga0.5As, and sample D is linearly graded well “In0.5Ga0.5As up to In0.56Ga0.44As.” It was found that the two SdH oscillations beat each other due to the population of the lowest two subbands in these samples. In order to investigate the electronic properties of the two subbands, we have done the Ven der Pauw Hall measurement . From SdH and Hall measurement, we are able to determine the individual mobility and carrier concentrations for two-subband-populated samples. |
目次 Table of Contents |
第一章簡介...............................................1 1-1 前言.................................................1 1-2 InGaAs/InAlAs/InP 材料的介紹.........................3 第二章理論部分...........................................6 2-1 量子井二維電子氣的電子特性...........................8 2-2 正持續光導效應(PPC)及負持續光導效應(NPPC) ..........11 第三章實驗部分..........................................15 3-1 樣品結構............................................15 3-2 SdH 量測實驗........................................22 3-3 T-depdendent Hall 量測實驗..........................25 第四章實驗結果與討論....................................28 4-1 Shubnikov-de Haas 量測的討論........................28 4-2 T-dependent Hall 量測的討論.........................32 第五章結論..............................................37 References..............................................56 |
參考文獻 References |
[1] 2000 Electronic Market Data Book, Electron. Ind. Assoc., Washington, D.C. , 2000. [2] 2000 Semiconductor Industry Report, Ind. Technol. Res. Inst., Hsinchu, 2000. [3] Jalai and S.J.Pearton Eds,InP HBTs: Growth. Processing, and Application, Artech House, Norwood, MA,1995 [4] T. Suemitsu, H. Furshimi, S. Kodama, S. Tsunashima, S. Kimura, “Influence ofHole Accumulation on the Source Resistance, Kick Effect, and On stateBreakdown of InP- Based HEMTs:Light Irradiation Study,” in 13th Int. Conf. onInP and related materials, pp. 14-18, May 2001. [5] G. G. Zhou, A. F. Colbrie, J. S. Harris, “IV kink in InAlAs/InGaAs MODFET’sdue to weak impact ionization Process in the InGaAs channel,” in 6th Int. Conf. on InP and related materials, pp. 27-31, 1994. [6] R. T. Webster, S. Wu, A. F. M. Anwar, “Impact Ionization inInAlAs/InGaAs/InAlAs HEMT’s,” IEEE Electron Dev. Lett., vol. 21, no. 5, pp.193-195, May 2000.Feb. 1991. [7] C.Weisbuch and B.Vinter, in “Quantum semiconductor structures, fundamentals and application”, p.49 (Academic Press, Ins., San Diego,1991). [8] J. A. Garrido, J. L. Sanchez-Rojas, A. Jimenez, E. Munoz, F. Omnes, and P. Gibart, Appl. Phys. Lett. 75, 2407 (1999). [10] 張晏瑲“Transport studies of two-dimensional electron gas in δ-doped semiconductor quantum wells at ultra- low temperature and high magnetic field” 中山大學物理 系碩士 論文。 [10] 連昭榮“In0.22Ga0.78As/GaAs 單量子井的電子特性研究” 中山大學物理系碩士 論文。 [11] F.F.Fang, T.P.Smith Ⅲ and S.L.Wright, Surf.Sci., 196,310(1988) [12] Ikai Lo, Jih-Chen Chiang, and Shiow-Fon Tsay,PHYSICAL REVIEW B VOLUME 55, NUMBER 20 [13] C. Weisbuch and B. Vinter, Quantum Semiconductor Structures ~Academic, San Diego, 1991 pp. 19–21. [14] J. Krynicki, M. A. Zaide, M. Zazoui, J. C. Bourgoin, M. DiForte-Poisson, C. Brylinski, S. L. Delage, and M. Blank, J. Appl. Phys. 74, 260 ~1993 [15] H. L. Stormer, L. N. Pfeiffer, K. W. Baldwin, and K. W. West, Phys. Rev. B 41, 1278 (1990). [16] Ikai Lo, K. Y. Hsieh, S. L. Hwang, and Li-Wei Tu Appl. Phys. Lett., Vol. 74, No. 15, 12 April 1999 |
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