本論文主要在設計研發出微型質子交換膜燃料電池(Micro PEMFC)，設計出將來可運用在3C電子產品上之能源，其MEA面積尺寸為5 cm2 (22.5 mm 22.5 mm)、厚度為700 μm、 催化層薄膜沉積厚度為30 nm。所研發之理念與傳統設計完全不相同，利用微機電與半導體製程技術，研發出三合一的結構層比傳統式設計之原理能更可輕、薄、短、小的設計，並嘗試降低成本及製作時間與效率提昇等方面考量，製造出高功率高效率的微型質子交換膜燃料電池。在流道板設計方面則包含三種不同的流道板型式(指叉型、網格狀及 蛇型狀)之設計，實驗參數包含操作溫度控制，陽極氫氣進氣量及出口壓力降與角度擺置和強制對流的參數控制，利用測試平台量測V-I極化曲線與P-I功率曲線在不同操作參數下之量測結果，且在外部環境溫度25℃和氫氣進口壓力為152 kPa上所測的結果為較佳，目標希望能夠找出最佳化的參數設計並能增強微型質子交換膜燃料電池的功率。

The objective of the present study was to design and develop microfabrication process for a micro PEM (Proton Exchange Membrane) fuel cell structure, Both anode and cathode flow field plates with a cross section of 5 cm2 (22.5 mm 22.5 mm) and thickness (for a single cell) of about 700 μm. A thickness of 30 nm Pt sputter loading deposited onto a Nafion 117 for MEA was made with both SEM and AFM characterization. The effect of different operating parameters on micro PEMFCs performances was experimentally studied for three different flow field configurations (interdigitated, mesh, and serpentine). The experiments with different cell operating temperatures, backpressures on the H2 /air flow channels as well as various combinations of these parameters have been conducted for three different flow geometries. The results are presented in the form of the polarization VI curves and PI curves under different operating conditions. A significant enhancement with three different type flow patterns for H2/air operation at 25℃ and 152 kPa on both electrodes was found. The possible transport mechanisms associated with the parametric effects were discussed. In addition, it was found that, among the three flow patterns considered, significant improvements can be reached with a specified flow geometry.

中文摘要…………………………………………………………… i
英文摘要…………………………………………………………… ii
目錄………………………………………………………………… iii
表目錄……………………………………………………………… vi
圖目錄……………………………………………………………… viii
第一章續論……………………………………………………… 1
1.1前言………………………………………………………… 1
1.2燃料電池的發電原理……………………………………… 2
1.3燃料電池的分類…………………………………………… 3
1.4質子交換膜燃料電池的架構……………………………… 6
1.4.1質子換膜燃料電池的特性原理與特點……………… 6
1.5文獻回顧…………………………………………………… 8
第二章傳統式質子交換膜燃料電池的設計與製作方式…12
2.1質子交換膜………………………………………………… 12
2.2陽極電極(氫氣側)………………………………………… 14
2.3陰極電極(氧氣側)………………………………………… 15
2.4催化劑……………………………………………………… 15
2.5雙極板……………………………………………………… 17
2.6密封用膠板………………………………………………… 19
2.7 MEA製作方式……………………………………………… 19
2.7.1交換膜處理…………………………………………… 19
2.7.2電極製作與觸媒塗佈………………………………… 20
2.7.3 MEA的製作…………………………………………… 21
第三章微型質子交換膜燃料電池的設計與製作方式… 23
3.1 MEA設計與製造…………………………………………… 23
3.1.1濺鍍的原理…………………………………………… 23
3.1.2 MEA交換膜之處理…………………………………… 24
3.1.3催化層之設計與製作………………………………… 25
3.2氣體擴散層設計與製作…………………………………… 26
3.2.1流道板之設計與製作………………………………… 27
3.3電流收集層之設計與製作………………………………… 30
3.3.1 MEA與流道板封裝…………………………………… 31
第四章實驗設備 …………………… …………………………33
4.1實驗目標…………………………………………………… 33
4.2實驗材料與規格…………………………………………… 33
4.3實驗設備與系統組件……………………………………… 34
4.4系統效能與穩定性極……………………………………… 37
第五章實驗結果與分析 ……………………………………… 39
5.1沉積白金薄膜催化層之探討……………………………… 39
5.2微型燃料電池放置位置之影響…………………………… 40
5.3氫氣供給對燃料電池效率之影響………………………… 41
5.4空氣供給和強制流動對燃料電池效率之影響…………… 42
5.5不同流道板在進口壓力及溫度環境下之比較 …… …… 43
5.6電化學阻抗頻譜(EIS)量測 ……………………………… 44
第六章結論……………………………………………………… 47
6.1結論………………………………………………………… 47
6.2未來展望…………………………………………………… 48
文獻參考 …………………………………………………………50






表目錄

表1各種燃料電池特性比較表 …………………………………… 56
表2幾何尺寸設計和製作參數表 ………………………………… 57
表3濺鍍在Nafion 117之白金催化層的操作條件參數表……… 58
表4操作條件和合適的參數表 …………………………………… 59













圖目錄

圖1-1質子交換膜燃料電池(PEMFC)示意圖 …………………… 60
圖1-2質子交換膜燃料電池之工作原理示意圖 ………………… 61
圖3-1流道板設計尺寸圖 ………………………………………… 62
圖3-2流道板照片 ………………………………………………… 63
圖3-3指叉型流道之SEM觀測照片 ……………………………… 64
圖3-4網格狀流道之SEM觀測照片 ……………………………… 65
圖3-5蛇型狀流道之SEM觀測照片 ……………………………… 66
圖3-6流道板之製作流程 ………………………………………… 67
圖3-7單一燃料電池之結構圖 …………………………………… 68
圖3-8微型燃料電池照片 ………………………………………… 69
圖4-1質子交換膜與催化層照片 ………………………………… 70
圖4-2濺鍍機照片 ………………………………………………… 71
圖4-3超音波震盪機照片 ………………………………………… 72
圖4-4加熱器照片 ………………………………………………… 72
圖4-5曝光機照片 ………………………………………………… 73
圖4-6光阻塗佈機照片 …………………………………………… 73
圖4-7抽氣櫃照片 ………………………………………………… 74
圖4-8工具顯微鏡照片 …………………………………………… 74
圖4-9α-step照片………………………………………………… 75
圖4-10紫外光接合機照片………………………………………… 75
圖4-11氫氣產生器照片…………………………………………… 76
圖4-12氣體環路照片……………………………………………… 76
圖4-13氣體管路實驗系統設計圖………………………………… 77
圖4-14電位量測平台照片………………………………………… 78
圖4-15 SEM設備照片……………………………………………… 78
圖5-1白金催化層與交換膜之SEM觀測照片…………………… 79
圖5-2白金催化層與交換膜之AFM觀測照片…………………… 80
圖5-3 Micro PEMFC陰極表面之擺置位置不同的性能測試圖… 81
圖5-4 Micro PEMFC氫氣供給流速不同之性能測試圖………… 82
圖5-5 Micro PEMFC 陰極表面強制對流的性能測試圖………… 83
圖5-6指叉型流道板在25℃環境下進口氫氣壓力不同之比較… 84
圖5-7網格狀流道板在25℃環境下進口氫氣壓力不同之比較… 85
圖5-8蛇形狀流道板在25℃環境下進口氫氣壓力不同之比較… 86
圖5-9 Micro PEMFC在25℃環境下出口氫氣壓力降不同之比較…87
圖5-10不同流道板在35℃環境下進口氫氣壓力不同之比較 … 88
圖5-11不同流道板在50℃環境下進口氫氣壓力不同之比較 … 89
圖5-12 Micro PEMFC在陰極表面量測AC阻抗頻譜之性能圖……90
圖5-13 Micro PEMFC在陰極表面的Bode圖………………………91

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