樣品製作有別於一般多層陶瓷電容器的製作，以模擬電容器製作樣品，採取的是粉末乾壓法，再以人工方式塗上鎳漿製作成一夾心狀樣品，在YAGEO公司之實驗室燒結試片。藉由X光、掃瞄式及穿透式電子顯微鏡進行分析，研究的方向在於鈦酸鋇-鎳之界面，及鈦酸鋇-氧化鎳之界面分析。

鈦酸鋇-鎳之界面經TEM-選區繞射圖分析，決定出兩者沒有晶向關係，及利用two-beam images觀察界面，界面並無差排存在。

鈦酸鋇-氧化鎳之界面經XRD及TEM分析決定氧化鎳確實存在，是由於Ni/NiO熱力學的勢能控制造成的。且經two-beam images觀察兩者界面存在一差排列，其Burgers vector為1/2[ 10]，更進一步的利用高解析原子影像及傅利葉轉換決定出另兩組Burgers vectors為1/2[00 ]、[ 1 ]。這些差排的產生是由於晶格的不銜接所造成。

The BaTiO3 sample was made by dry pressure, it was artificial spread nickel paste on BaTiO3, and it was simulated multilayer ceramic capacitors (MLCC’s) to make a sandwich structure with BaTiO3-Ni-BaTiO3 by sintered in YAGEO’s laboratories. The samples have been thoroughly analysis for the interface between BaTiO3 dielectric and Ni electrode or NiO oxide, by X-ray diffractometry, scanning electron microscopy, and transmission electron microscopy.

The interface between BaTiO3 and Ni has not orientation relationship as determined by selected area diffraction and it’s not had dislocations in interface by two- beam image.

The NiO oxide as determined by XRD and TEM, because of the thermodynamic potential of the Ni/NiO equilibrium was produced. The array of dislocations of Burgers vector is 1/2[ 10] in the interface, and Burgers vectors are 1/2[00 ], [ 1 ] as determined by high resolution images and Fast Fourier Transform simulation. Misfit dislocations along the interface occur to accommodate the lattice mismatch.

第一章 簡介............................1
1.1 緒論 ..............................1
第二章 文獻回顧........................3
2.1 鈦酸鋇結構.........................3
2.2 相圖...............................7
2.3 氧化鎳結構........................10
2.4 積層陶瓷電容器介紹................12
2.5 低氧氛壓對積層陶瓷電容器之影響....................................14
2.6 金屬薄膜的特性....................18
2.7 晶界(grain boundary)..............20
第3章 實驗步驟........................24
3.1 試片製作..........................24
3.2 實驗藥品..........................25
3.3 密度測量..........................27
3.4 X–ray繞射分析....................29
3.5 掃瞄式電子顯微鏡(SEM).............30
3.6 穿透式電子顯微鏡(TEM).............31
第四章 實驗結果.......................32
4.1 鈦酸鋇粉體及鎳粉繞射分析..........32
4.2 燒結體X-ray繞射分析...............34
4.3 晶格常數量測......................36
4.4 密度量測..........................40
4.5 表面型態觀察......................42
4.6 SEM之定性分析.....................44
4.7 SEM之線分析(Linear scan)..........48
4.8 SEM之面分析(Mapping)..............50
4.9 鈦酸鋇與鎳之晶向關係..............51
4.10鈦酸鋇與氧化鎳之晶向關係..........57
4.11鈦酸鋇與氧化鎳之界面形式與差排之關係....................................62
4.12高解析原子影像及FFT simulation分析界面....................................69
第五章 討論...........................76
5.1 試片製作..........................76
5.2 X-ray繞射分析.....................77
5.3 SEM表面形態觀察...................78
5.4 TEM-鈦酸鋇與鎳之界面觀察..........79
5.5在TEM下決定第二相氧化鎳............80
5.6 TEM-鈦酸鋇與氧化鎳之界面差排觀察....................................83
第六章 結論...........................85
第七章 參考文獻.......................87
第八章 附錄...........................93
8.1　JCPDS 卡號號碼...................93
8.2 立方相之立體投影圖................96
8.3 鈦酸鋇之模擬與實際繞射圖..........97
8.4. JEOL 3010AEM校正.................100

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