近幾年來，表面聲波濾波器(SAW filter)因為具有體積小，可靠度高，不易整合進IC製程中，所以成為時下最熱門的通訊被動元件之一。但隨著操作頻率越來越高，表面聲波濾波器對封裝所產生的電磁干擾效應也越來越敏感，最終導致封裝後的特性與未考慮封裝效應的設計值有很大的出入。

本論文中，我們研究時域有限差分(FDTD, Finite Difference Time Domain)演算法與HFSS (High Frequency Structure Simulator)結合ADS軟體的操作流程，以全波方式模擬SAW Filter在封裝盒中的電磁干擾情形，藉此建立電磁波結合聲波的模擬步驟，並與量測結果做比較。初步結果顯示我們所提供的方法，能有效地預測封裝後的頻率響應。藉由初期的預測，可以達到節省SAW Filter的設計時間與成本。

Because SAW filters are small, high reliability, and it cannot be easily integrated with silicon substrate, they have become one of the most popular communication passive components recently. As the working frequency becomes higher, SAW filters are more sensitive to electromagnetic interference introduced by the package. Discrepancy in performance between design and measurement can be large if the packing effects are not considered.

In this thesis, we make use of Finite Difference Time Domain method (FDTD) and develop a procedure combining High Frequency Structure Simulator (HFSS) with ADS software to simulate electromagnetic effect of a packaged SAW Filter. This is a full-wave method that integrates electromagnetic wave and acoustic wave. Measurement is also carried out to verify the simulated results. Preliminary results show that this method that we provide can predict frequency response in package effectively. Our Prediction can save factory design time and production cost.

誌 謝 i
中文摘要 iii
英文摘要 iv
目 錄 v
圖表目錄 vii
第一章 緒論 1
1.1 研究背景 1
1.2 研究的困難與限制 2
第二章 SAW的工作原理與簡介 3
2.1 簡介 3
2.2 SAW Filter的工作原理 5
2.3 SAW 元件的製作過程 8
第三章 全波模擬方法的簡介 11
3.1 Finite Difference Time Domain (FDTD)基本原理 11
3.1.1 YEE的FDTD演算法 12
3.1.2穩定準則 16
3.1.3吸收邊界條件 17
3.1.3.1 Mur吸收邊界 18
3.1.3.2 PML 19
3.1.4 FDTD模擬集總電路元件 31
3.1.5 FDTD激發源的處理 33
3.1.5.1取代源 34
3.1.5.2附加源 35
3.1.5.3阻抗性電壓源 36
3.1.6等效電流源的處理 37
3.1.7 FDTD演算流程 42
3.2 HFSS簡介與使用流程介紹 43
3.2.1 HFSS使用流程介紹 44
第四章 串音（Crosstalk）與屏蔽理論介紹 46
4.1 串音（Crosstalk）的介紹 46
4.2 電感耦合 49
4.3 電容耦合 51
4.4 互感與互容的合成效應 52
第五章 模擬結果與討論 57
5.1 前言 57
5.2 串音(Crosstalk)的探討 58
5.3 寄生效應與全體響應的探討 78
5.3.1 quasi-static的介紹與模擬結果 79
5.3.2混合法的介紹與模擬結果 83
5.3.3 FDTD結合集種電路模型的方法研究 95
5.3.4 FDTD結合等效電流源法的方法研究 97
5.3.5 使用HFSS中集種元件模型的方法研究 99
第六章 結論與未來研究方向 101
參考文獻 102

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