本論文主要是以自行架設的微波電漿系統，以電漿將稀釋之混合氣體甲烷解離，使碳元素合成奈米鑽石顆粒，載體稀釋氣體分別為氬氣或氮氣。並以Filed-Emission Scanning Electron Microscope(FE-SEM)、X-ray Diffraction(XRD)、Raman Scattering、Transmission Electron Microscopy(TEM)、Transmission Electron Diffraction(TED)分析鑽石顆粒的尺寸、結構。
系統的特色在於所架設的MPCVD內部有一根天線，可以將波導引導到天線尖端，使微波的能量更集中於一點，以致於在更高的壓力下（接近一大氣壓）點起電漿，在高壓下進行碳元素的重組，有利於鑽石結構的形成。
以SEM對奈米顆粒外型觀察的結果顯示，除了以載體稀釋氣體為氮氣且流量在0.5 L/min所合成之鑽石奈米顆粒較大(450-650奈米)以外，其它條件所合成的奈米鑽石顆粒的大小都介於25-50奈米之間，尺寸的大小隨著載體稀釋氣體流量以及壓力的增加而增加。結構主要則是由Raman、XRD來分析，結果顯示在，較高的載體稀釋氣體流量或較高壓力之下所合成的顆粒，容易形成天然鑽石的結構，且以氮氣當載體稀釋氣體的效果優於氬氣。在TEM、TED的量測之下，發現電子束的能量會破壞奈米鑽石的表面結構，由電子束繞射圖可觀察到奈米鑽石顆粒由單晶轉變為非晶的結構。

In this work a plasma torch system has been setup. Using the methane as gas source, carbon atoms were ionized and diamond nanoparticles were synthesized. Argon or nitrogen gas was applied as carrying gas for dilution methane.
By means of Field-emission scanning electron microscopy (FE-SEM), X-ray Diffraction (XRD), Raman Scattering, Transmission Electron Microscopy (TEM) and Transmission Electron Diffraction (TED) diamond nanoparticles were characterized.
The system is characteristic structured with a MP system interior with an antenna. The microwave was guided in chamber and to the antenna tip, and induced the microwave energy gather on the tip then induces plasma under higher pressure.
Expect sample N01 that used nitrogen carrying gas and gas flow rate was 0.6 L/min, the particles all have the size between 25-50nm from the analysis of the morphology of the particles by SEM. The particles size increased along with the carrying gas flow rate as well as the pressure increased. The materials structure has been analyzed by Raman, XRD. The natural diamond structure has been found synthesizing the nanoparticles under the high pressure or the higher catalyst gas flow rate. And as carrying gas effect, nitrogen is better than Argon. The electron beam energy would destroy the structure of diamond nanoparticles during TEM analysis and diamond nanoparticles changed from single crystal to amorphous has been observed by TED analysis.

中文摘要………………………………………………………………………..I
Abstract………………………………………………………….……………...II
Contents………………………………………………...……………………...III
Chapter 1. Introduction
1.1 Introduction……………………………………………………….….....1
1.2 The manufacture method of nanoparticles…………………..……….…2
1.3 Diamond application…………………………………………..……..…3
Chapter 2. Synthesize Mechanisms and literature review of carbon nanoparticles
2.1 The structure of diamond、graphite and fullerene……………….……...5
2.1.1 The bonding of carbon……………...……….……....…….…...5
2.1.2 Diamond structure…………….……….……………….………5
2.1.3 Graphite structure..…………………………………….………5
2.1.4 Fullerene (Bucky ball) structure ……………….…….………..6
2.2 The plasma ……………..………………………………….….……..…6
2.2.1 To take shape of plasma……………………………..…………6
2.2.2 The sp3 bonds formation……………………………...………..7
2.3 Literature review…………………….………………….……..………..9
Chapter 3 Experimental
3.1 System setup ..……..………………………………………….………11
3.1.1 The characteristics and properties of the system ..…….……..11
3.1.2 Microwave plasma CVD system ..……………..……….……11
3.1.3 Nanopowder Sample collection ...………….…………….…..12
3.2 Experimental parameters and experimental step ……………….…….13
3.2.1 Experimental parameters………………………..……………13
3.2.2 Experimental processes……………………….………….…...15
3.3 Analysis and preparation of sample …….……………………......…...15
3.3.1 Field emission scanning electron microscopy (FE-SEM)……16
3.3.2 Raman scattering……………………….......……………..…..17
3.3.3 Transmission Electron Microscopy (TEM) and
Transmission Electron Diffraction (TED)….…….….….…..18
3.3.4 X-ray diffraction……………………………………..….……19
Chapter 4. Results and Discussions
4.1 TEM-EDS analyze………………………………………………………20
4.2 Study on nanoparticles morphology by SEM………………………...…21
4.3 Study on nanoparticles structure by Raman spectrum………..…………22
4.3.1 Used of Ar carrying gas..………………..……………………22
4.3.2 Used of N2 carrying gas..……………….......…………….…..24
4.4 Study on nanoparticles structure by XRD…..……………………..……25
4.5 Study on nanoparticles structure by TEM and TED…………………….25
4.6 Study on plasma reaction by mass spectra………………………………27
Chapter 5.Conclucion
Reference……………………………...…………………………………30
Table captions………………………………..…………………….………......32
Fig captions……………………………………..……………………………...33

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