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博碩士論文 etd-0708104-155303 詳細資訊
Title page for etd-0708104-155303
論文名稱
Title
電制吸收光調變器磊晶成長及DLTS系統
InP-Based Electro-Absorption Modulator Structures Grown and DLTS System
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
106
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2004-06-18
繳交日期
Date of Submission
2004-07-08
關鍵字
Keywords
電制吸收光調變器、深層缺陷暫態頻譜系統
Electro-Absorption Modulator (EAM), Deep-Level Transient Spectroscopy (DLTS)
統計
Statistics
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中文摘要
本論文主要分為兩大部份。論文第一部份在設計與量測電制吸收光調變器磊晶結構。我們所設計的磊晶結構分別為:1.5
Abstract
The thesis includes two aspects. The first part includes designs and optical study of electro-absorption modulator structures. Three structures are designed near 1.5
目次 Table of Contents
第一章 EAM簡介 1
第二章 EAM原理 3
2-1 二維量子井 3
2-2 量子侷限史塔克效應 4
2-3 極化不敏感 5
2-4 材料系統 7
第三章 EAM結構設計與模擬 9
3-1 TE 極化多重量子井 9
3-1-1 TE極化對稱式量子井結構 9
3-1-2 TE極化非對稱式量子井結構 12
3-1-3 TE極化量子井結構設計比較 12
3-2 極化不敏感多重量子井 15
3-2-1 應變平衡的極化不敏感多重量子井設計 15
3-2-2 補償量子井的設計 18
第四章 EAM結果與討論 22
4-1 TE極化對稱式量子井結構 23
4-1-1 X-Ray Diffraction 23
4-1-2 光激螢光光譜 24
4-1-3 光電流光譜圖 25
4-2 TE極化非對稱式量子井結構 26
4-2-1 X-Ray Diffraction 26
4-2-2 光激螢光光譜 27
4-2-3 光電流光譜圖 28
第五章 DLTS簡介 29
第六章 DLTS量測原理 31
6-1 缺陷動態動作機制(Trap Dynamics) 32
6-2 電容暫態響應 35
6-3 缺陷參數決定 41
6-4 缺陷的捕捉特性 44
6-5 The Poole-Frenkel effect 46
6-6 量子井似缺陷的載子動態行為 47
第七章 樣品備製與DLTS系統簡述 48
7-1 樣品製作流程 49
7-1-1 TR581 樣品製作流程 49
7-1-2 TR578 樣品製作流程 50
7-2 DLTS量測系統簡述 51
7-2-1 DLTS UNIT 52
7-3 實驗流程 53
第八章 DLTS量測結果與討論 54
8-1 TR578量測結果分析與討論 55
8-1-1 電流-電壓、電容-電壓曲線 55
8-1-2 TR578捕捉暫態 59
8-1-3 TR578 多數載子放射暫態 62
8-1-4 TR578 少數載子放射暫態 73
8-1-5 使用量子井參數分析 76
8-2 TR581量測結果分析與討論 79
8-2-1 電流-電壓、電容-電壓曲線 79
8-2-2 TR581捕捉暫態 82
8-2-3 TR581多數載子放射暫態 87
8-2-4 TR581 少數載子放射暫態 95
8-2-5 使用量子井參數分析 97
8-3 TR578與TR581綜合比較 98
第九章 結論 101
9-1 EAM結論 101
9-2 DLTS結論 102
參考文獻 104
參考文獻 References
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deep-level transient spectroscopy peaks in highly doped p-type InP” J. Appl. Phys, Vol.88, pp.794-799, July 2000.
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