本論文提出一套相位調變方法，延長顯微鏡之景深。並且應用到以顯微鏡為主體的條紋投影輪廓儀。條紋投影輪廓儀原理是將黑白相間條紋投影至待測物體上，可由條紋造成的扭曲程度轉換成物體的深度變化，進而可還原物體的3D形貌。但以顯微鏡為主體的條紋投影輪廓儀有景深甚短的缺點，因此在投影系統部分使用白光點光源，利用其理論上有景深無限長的特性，增加投影部份的景深；而在影像擷取系統部分搭配相位光罩，並使用影像處理技術延長顯微鏡的景深。

A method using a phase mask to extend the depth of field for an incoherent lens system is presented. This phase mask is designed to generate a point spread function in which the intensity distribution is invariant to misfocus. Thus, image could be retrieved by de-convoluting the misfocused one.

Its application to 3D profile sensing using point white light illumination is presented as well. A fringe pattern is projected onto the inspected surface using the point white light source. Fringe distribution is then observed by a CCD camera through the presented phase mask at a different viewpoint. Phase can be extracted by the Fourier transform method or the phase-shifting technique. With triangulation methods or proper calibration approaches, depth information can be identified from the phase of the fringes. The phase mask enlarges the depth of field of the image acquisition system, while the point white light illumination increases the depth of focus of the fringe projection system. Thus, a highly accurate, non-scanning projected fringe profilometer with large depth measuring range can be realized.

第一章　緒論 1
1-1 前言 1
1-2 文獻回顧 4
1-3 研究動機 6
1-4 論文架構 7
第二章 基本理論 8
2-1 景深（Depth of Field） 8
2-2 光學傳遞函數理論 10
2-2-1點擴散函數（point spread function） 10
2-2-2 光學傳遞函數(optical transfer function ) 12
2-3 影像還原 13
2-4條紋投影輪廓儀 14
2-4-1光學三角量測法 15
2-4-2 相位轉換技術 18
2-4-3相位展開演算法 20
第三章 相位光罩的設計與程式模擬 23
3-1 相位光罩的設計 23
3-2 程式模擬 26
第四章 液晶空間光調制器 32
4-1空間光調制器( Spatial Light Modulator , SLM) 32
4-2 扭轉向列型液晶SLM的相位及振幅特性 34
4-3 相位調制特性之量測 41
4-4 光強度調制特性之量測 45
4-5 相位函數與液晶空間光調制器之搭配 47
第五章 實驗與結果 49
5-1利用相位光罩增加一般成像系統之景深 50
5-2顯微量測系統景深之研究 55
5-3微小尺寸之三維形貌量測 60
5-3-1 失焦影像之形貌量測 61
5-3-2 深度量測範圍小於待測物尺寸之形貌量測 75
5-4 量測系統精確度 86
第六章 結論 89
参考文獻 91

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