Responsive image
博碩士論文 etd-0709102-141646 詳細資訊
Title page for etd-0709102-141646
論文名稱
Title
CuInSe2薄膜表面被覆及硫化處理製程之研究
Research on surface passivation and surfurization of CuInSe2 thin films
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
98
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2002-06-28
繳交日期
Date of Submission
2002-07-09
關鍵字
Keywords
表面被覆、硫化處理
Surface Passivation, Surfurization
統計
Statistics
本論文已被瀏覽 5712 次,被下載 5779
The thesis/dissertation has been browsed 5712 times, has been downloaded 5779 times.
中文摘要
為有效提升太陽電池轉換效率,降低CuInSe2吸收層表面再結合速率或提高吸收層能隙皆為可行之道。
本實驗分別使用不同濃度硫化胺溶液,分別針對Cu-rich、In-rich CuInSe2薄膜及CuInSe2:Sb薄膜進行表面被覆及硫化製程前後,在能隙提升、光性及電性上的變化所造成之影響進行探討。實驗結果發現,Cu-rich及In-rich CuInSe2薄膜經硫化胺溶液處理後,能隙值並無提升。而CuInSe2:Sb薄膜使用(NH4)2Sx溶液浸泡後,其PL光譜觀察到在高於CuInSe2能隙的位置有兩個發光峰形成,推斷是CuInSxSe2-x四元化合物形成所致。
此外,也分別製備Mo/P-type CuInSe2/Al及Mo/N-type CuInSe2/Au接面,並量測其電流-電壓特性,確定其為Schottky Contact。
Abstract
For improving the energy conversion efficiency of solar cells, it is essential to reduce the surface recombination velocity of CuInSe2 absorber layer. The use of quaternary alloys with an increasing band gap gradient was also demonstrated to be effectively increased the open-circuit voltage of the cells.
The experiments using different concentration ammonium sulfur solutions to proceed surface passivation and sulfurization of CuInSe2 and CuInSe2:Sb films have been conducted to evaluate their influences on the band gap and other related properties.
The band gaps of Cu-rich and In-rich CuInSe2 films did not change after ammonium sulfur treatment. For CuInSe2:Sb films after immersing (NH4)2Sx solution, the PL spectra gave an evidence of the formation of the quaternary CuInSxSe2-x alloys.
The metal contacts to CuInSe2 films with the structures of Mo/P-type CuInSe2/Al and Mo/N-type CuInSe2/Au had been fabricated. Their I-V characteristics indicate that the Schottky Contacts had been successfully formed.
目次 Table of Contents
第一章 緒論
1.1 前言
1.2 CuInSe2 薄膜結構及性質
1.3 CuInSe2及CuInSe2:Sb薄膜表面處理
1.4 濺鍍法基本原理
1.5 實驗目標及進行步驟
第二章 實驗方法及流程
2.1 CuInSe2 薄膜成長
2.2 金屬薄膜濺鍍
2.3 表面被覆及硫化處理
2.4 薄膜分析儀器
第三章 實驗結果
3.1 Cu-rich之CuInSe2薄膜表面被覆處理
3.2 In-rich之CuInSe2薄膜表面被覆處理
3.3 PL光譜量測與分析
3.4 電流-電壓特性量測
第四章 結論
4.1 CuInSe2 薄膜組成對表面被覆處理之影響
4.2 CuInSe2 薄膜光性及電性量測
第五章 參考文獻
參考文獻 References
第五章 參考文獻
1.H.J. Moller, "Semiconductors for Solar Cells", Artech House, Boston(1993)
2.T. Negami, M. Nishitani, N. Kohara, Y. Hashimoto, T. Wada, Mat. Res. Soc. Symp. Proc., 426(1996)278
3.N.Kavcar, M.J. Carter and R. Hill, Solar energy Materials and Solar Cells, 27(1992)13
4.L.L. Kazmerski, M. Hallerdt, P.J. Ireland, R.A. Mickelsen and W.S. Chen, Journal of Vacuum Science Tech, AL(1983)395
5.H. Neumann and R.D. Tamlinson, Solar Cells, 28(1990)301
6.J.R. Woodyard and G.A. Landis, Solar Cells, 31(1991)297
7.A. Rockette and B.W. Birkmire, Journal of Applied Physics, 70(1991)R81
8.H.J. Hovel, "Solar Cells", Semiconductors and Semimetals, Vol. 11, Academic Press, New York(1975)
9.K.W. Mitchell, C. Eberspacher, K. Ermer, K.L. Pauls and D.N. Pier, IEEE Tran. On Electron Devices, 37(1990)410
10.A. Rockett, T.C. Lommasson, R. Campos, L.C. Yang and H. Talidh, Thin Solid Films,171(1989)109
11.D. Tembjurbar and J.P. Hirde, Thin Solid Films, 215(1992)65
12.F. Abou-Elfotouh, D. J. Dunlavy and T. J. Coutts, Solar Cells, 27 (1989) 237
13.J.A. Thornton, T.C. Lommasson, H. Talidh and B.H. Tseng, Solar Cells, 24(1988)
14.張宗文, Sb摻入對薄膜成長與特性之影響, 國立中山大學材料科學研究所碩士論文(1994)
15.L. L. Kazmerski, O. Jamjoum, P. J. Ireland, and S. K. Deb, J. Vac. Sci. Technol., 19(1981)467
16.O. Jamjoum, L. L. Kazmerski, D. L. Lichtman, and K. J. Bachmann, Surf. Interf. Anal., 4(1982)227
17.D. Cahen and R. Noufi, Appl. Phys. Lett., 54(1989)558
18.D. Cahen and R. Noufi, Solar Cells, 30(1991)53
19.T. Walter, A. Content, K.O. Velthaus and H.W. Schock, Solar Energy Materials and Solar Cells, 26(1992)357
20.Y. Ogawa, A. Jäger-Waldau, T.H. Hau, Y. Hashimoto and K. Ito, Applied Surface Science, 92(1996)232-236
21.鄭郁菡, 混合銻之硒化銦銅複晶薄膜硫化處理之研究, 國立清華大學電機工程系
22.J.J. Loferski, Cryst. Res. Technol.,(1996)
23.X.Y. Hou, W.Z. Cai, Z.Q. He, P.H. Hao, Z.S. Li, X.M. Ding, X. Wang, Apply Phys. Lett., 60(1992)2252
24.J.L. Lee, D. Kim, S.J. Maeng, H.H. Park, J.Y. Kang,and Y.T. Lee, J. Apply Phys., 73(1993)3539
25.K.C. Hwang, S.Li. Sheng, C. Park, T.J. Anderson, J. Apply Phys., (1990)6571
26.K.C. Hwang, S.Li. Sheng, J. Apply Phys.,67(1990)2162
27.Z.S. Li, W.Z. Cai, R.Z. Su, G.S. Dong, D.M. Huang, X.M. Ding,X.Y. Hou, X. Wang, Apply Phys. Lett., 64(25)(1994)3425
28.W.D. Chen, X.Q. Li, L.H. Duan, X.L. Xie, Y.D. Chi, Apply Surface Science, 100-101(1996)592
29.J.H. Hsieh, H.L. Hwang, Apply Surface Science, 92(1996)65
30.S.H. Sa, M.G. Kang, H.H. Park, K.S. Suh, Surface and Coating Tech., 100-101(1998)234
31.Y.H. Cheng, B.H.Tseng, H.L. Hwang, Apply Surface Science, 123-124(1998)603
32.Pallab Bhattacharya, "Semiconductor Optoelectronic Device", Prentice Hall (1994)
33.C.L. Chan and I. Shih, J. of Appl. Phys., 68(1)(1990)156
34.A.J. Nelson, D.W. Nieles, L.L. Kazmersli, D. Rioux, R. Patel and H. Hochst, J. of Appl. Phys., 72(3)(1992)976
35.B.G. Streetman, "Solid State Electronic Devices", 3rd Edition, Prentice Hall (1990)
36.F. Abou-Elfotouh, L.L. Kazmerski, A.M. Bakry, and A. Al-Douri, IEEE Conf., (1990)541-545
37.M.Nishitani, T.Negami, M.Terauchi and T. Hirao, Japan Journal of Applied Physics, 31(1992)192
38.S.P. Frindle, A.H. Clark, S. Rezaie-Serej, J. Mcneily and L.L. Mcneily, Journal of Applied Physics, 51(10)(1980) 5464
39.F.R. White, A.H. Clark, M.C. Graf and S.P. Grindle, Journal of Vacuum Science and Technology, 16(2)(1979)287
40.J.A. Thornton, T.C. Lommasson, H. Talidh and B. H. Tseng, Solar Cell, 24, 1(1988)
41.T. Ohashi, K. Inakoshi, Y. Hashimoto, K. Ito, Solar Energy and Solar Cells, 50(1998)37-42
42.C. Cuillen and J. Herrero, Journal Physics, 71(11)(1992)5479
43.K. Subbaramaiah and V. Sundaraja, Thin Solid Films, 207(1992)247
44.Eliam Zacks and A. Halperin, Phys. Rev., B6 (1972) 3072
45.R. Klenk, T. Walter, H.W. Schock and D. Cahen, Proc, POLYSE 93, Saint Malo(1993)
46.楊登峻, 組成變化與成長條件對CuInSe2磊晶薄膜光電特性的影響, 國立中山大學材料科學研究所 (1997)
電子全文 Fulltext
本電子全文僅授權使用者為學術研究之目的,進行個人非營利性質之檢索、閱讀、列印。請遵守中華民國著作權法之相關規定,切勿任意重製、散佈、改作、轉貼、播送,以免觸法。
論文使用權限 Thesis access permission:校內校外完全公開 unrestricted
開放時間 Available:
校內 Campus: 已公開 available
校外 Off-campus: 已公開 available


紙本論文 Printed copies
紙本論文的公開資訊在102學年度以後相對較為完整。如果需要查詢101學年度以前的紙本論文公開資訊,請聯繫圖資處紙本論文服務櫃台。如有不便之處敬請見諒。
開放時間 available 已公開 available

QR Code