在此研究中，充分利用超快雷射高峰值功率及極寬頻寬的特性，應用在高頻光致電流及二倍頻的顯微影像技術上。由於超快雷射具有對樣品自動取樣的特性，並且產生的激發頻寬可大於1.8THZ，所以可用來檢測超高速光偵測半導體元件。此外，由於牙齒中的象牙質部分，存在能在紫外波段產生強烈二倍頻訊號的膠原蛋白纖維，所以利用超快雷射具高峰值功率的特性及穿透式二倍頻顯微影像系統，在象牙質部分取得品質良好的二倍頻影像。並探討雷射光波長及雷射光偏振方向對於二倍頻強度的影響。

In this study，we apply the broad bandwidth and high energy pulse of ultrafast laser to experiment on RF OBIC and second harmonic generation. In this paper a novel method is presented for characterizing high frequency response and behavior of ultra high-speed photosensitive semiconductor devices and the set-up is capable of generating excitation at RF bandwidths of greater than 1.8 THz. In addition，the collagen of dentine is able to generate the second harmonic in the ultraviolet region, so we develop a high performance transmission mode laser scanning microscope for obtaining SHG images of a tooth slice. We also study wavelength dependence and polarization dependence.

目 錄
頁次
第一章 簡介 1
第二章 超快雷射在高頻光致電流的應用 6
2.1 前言 6
2.2 光致電流與高頻光致電流測量原理 8
2.2.1 光致電流原理 8
2.2.2 RF測量原理 10
2.3 樣品介紹：PIN二極體 12
2.4 第一部分：直接測量高頻光致電流之方法 14
2.4.1 實驗架設 14
2.4.2 實驗結果與討論 18
2.4.2.1 載子的產生 18
2.4.2.2 DC OBIC 19
2.4.2.3 RF OBIC 20
2.4.2.4 InGaAs樣品的實驗結果 24
2.5 第二部分：無線測量高頻光致電流之方法 27
2.5.1 實驗架設 27
2.5.2 實驗結果與討論 28
2.6結論 31
第三章 超快雷射在二倍頻的應用 34
3.1 前言 34
3.2 二倍頻產生原理 36
3.3 實驗架設 38
3.4 樣品介紹：牙齒 40
3.5 實驗結果與討論 42
3.5.1 雷射光波長與二倍頻強度的關係 42
3.5.2 雷射光偏振方向與二倍頻訊號的關係 44
3.6 結論 47
第四章 結論與未來展望 51

第一章:
[ 1] P.A. Franken, A.E. Hill, C.W. Peters, G. Weinreich, Phys. Rev. Lett. 7, P118(1961)
[ 2] J. N. Gannaway and C. J. R. Sheppard, “Second-harmonic imaging in the scanning optical microscope”, Optical and Quantum Electronics, 10, P435-439(1978)
[ 3] G. D. Reid and K. Wynne, ”Ultrast Laser Technology and Spectroscopy”, John Wiley&Sons Ltd, Chichester(2000)
[ 4] K. Wynne, Femtosecond Nonlinear Optics, http://dutch.phys.strath.ac.uk/FRC/
[ 5] G. Cox, Biological confocal microscopy , materialstoday(2002)
[ 6] Y. Guo, P.P.Ho, A. Tirksliunas, F. Liu, and R.R. Alfano, “Optical harmonic generation from animal tissues by the use of picosecond and femtosecond laser pulses”, Applied Optics, Vol.35, No.34, P6810-6813(1996)
[ 7] E. Georqiou, T. theodossiou, V. hovhannisyan, K. politopoulos, G.S. Rapti and D. Yova, “Second and third optical harmonic generation in type I collagen, by nanosecond laser irradiation, over a broad spectral region”, Optics Communication, 176, P253-260(2000)
[ 8] G. Cox and E. Kable, ”Second Harmonic Generation-a new dimension in biomedical imaging”, FOM2002(2002)
[ 9] P. Stoller, K. M. Reiser, P. M. Celliers and A. M. Rubenchik, “Polarization-Modulated Second Harmonic Generation in Collagen”, Biophys. J, Vol.82, P3330-3342 (2002)
[10] S. Roth and I. Freund, “Optical second harmonic scattering in rat-tail tendon”, Biopolymer, 20, P1271-1290(1981)
[11] I. Freund, M. Deutsch, and A. Sprecher, “Connective tissue polarity optical second harmonic microscopy, crossed-beam summation and small-angle scattering in rat-tail tendon”, Biophys. J ,50, P693-712 (1986)
[12] T. Wilson and C.J.R. Sheppard, Theory and Practice of Scanning Optical Microscopy, Academic Press, London (1984)
[13] P.D. Pester and T. Wilson, “Photoluminescence and Optical Beam Induced Current Imaging of Defects” , SPIE, vol.1028 Scanning Imaging (1988)
[14] P.D. Pester and T. Wilson, “Time-dependent theory of optical-beam-induced current imaging of defects in semiconductors”, J. Appl. Phys., 64(3),P1131-1135(1988)
[15] T. Wilson and E.M. McCabe, “Distribution of charge carriersgenerated in semiconductor by a focused convergent light beam”, J. Appl. Phys., P2638-264259(8) (1986)
[16] S. Takasu, Application of OBIC/OBIRCH/OBHIC（Semiconductor Failure Analysis）, Application & Research Center, JEOL Ltd
[17] Xu. C and W. Denk,” Two- photon optical beam induced current imaging through the backside of integrated circuits”, Apply. Phys. Lett.,Vol74, 2578(1997)
[18] F.-J. Kao, M.-K. Huang and Y.-S. Wang, “Two-photon optical beam induced vurrent imaging of indium gallium nitride blue light-emitting diodes”, OPTICS LETTERS, Vol.24, No.20, p1407-1409 (1999)
[19] G. D. Reid and K. Wynne, Ultrafast Laser Technology and Spectroscopy, Encyclopedia of Analytical Chemistry, P13644-13670 (2000)
[20] F.-J. Kao, J.-C.Chen, S.-C. Shih and A. Wei, ”Optical beam induced current microscopy at DC and Radio Frequency”, Optics Communication, Optics Communication, in press.

第二章:

參考資料：
[ 1] T. Wilson and C.J.R. Sheppard, Theory and Practice of Scanning Optical Microscopy, Academic Press, London (1984)
[ 2] P.D. Pester and T. Wilson, “Photoluminescence and Optical Beam Induced Current Imaging of Defects” , SPIE , vol.1028 Scanning Imaging(1988)
[ 3] P.D. Pester and T. Wilson, “Time-dependent theory of optical-beam-induced current imaging of defects in semiconductors”, J. Appl. Phys., 64(3),P1131-1135(1988)
[ 4] T. Wilson and E.M. McCabe, “Distribution of charge carriersgenerated in semiconductor by a focused convergent light beam”, J. Appl. Phys., P2638-264259(8) (1986)
[ 5] Shinichi Takasu, Application of OBIC/OBIRCH/OBHIC（Semiconductor Failure Analysis）, Application & Research Center, JEOL Ltd
[ 6] F.-J. Kao, M.-K. Huang and Y.-S. Wang, “Two-photon optical beam induced vurrent imaging of indium gallium nitride blue light-emitting diodes”, OPTICS LETTERS, Vol.24, No.20, p1407-p1409(1999)
[ 7] C.Xu and W. Denk, ‘Two- photon optical beam induced current imaging through the backside of integrated circuits”, Appl . Phys. Lett., Vol74, 2578(1997)
[ 8] B. Craig, ”Microscopy：New techniques expand multiphoton imaging”, Laser Focus World January(2000)
[ 9] Adel S. Sedra and Kenneth C. Smith, Microelectronic Circuits, Fourth edition
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第三章:
[ 1] M. F. Onellion and J. G. White, “Development of an Ultrafast Optical System for non-linear imaging and pump-probe studies”
[ 2] L.Moreaux, O. Sandre, M. Blanchard-Desce and J. Mertz, “Membrane imaging by simultaneous second-harmonic generation and two-photon microscopy”, Optics Letters, Vol.25, No.5, P320-322(2000)
[ 3] G. Cox, Biological confocal microscopy , materialstoday(2002)
[ 4] Y. Guo, P.P.Ho, A. Tirksliunas, F. Liu, and R.R Alfano, “Optical harmonic generation from animal tissues by the use of picosecond and femtosecond laser pulses”, Applied Optics, Vol.35, No.34, P6810-6813(1996)
[ 5] E. Georqiou, T. theodossiou, V. hovhannisyan, K. politopoulos, G.S. Rapti and D. Yova, “Second and third optical harmonic generation in type I collagen, by nanosecond laser irradiation, over a broad spectral region”, Optics Communication, 176, P253-260(2000)
[ 6] G. Cox and E. Kable, ”Second Harmonic Generation-a new dimension in biomedical imaging”, FOM2002(2002)
[ 7] P. Stoller, K. M. Reiser, P. M.Celliers and Alexander M. Rubenchik, “Polarization-Modulated Second Harmonic Generation in Collagen”, Biophys. J, Vol.82, P3330-3342 (2002)
[ 8] S. Roth and I. Freund, “Optical second harmonic scattering in rat-tail tendon”, Biopolymer, 20, P1271-1290(1981)
[ 9] I. Freund, M. Deutsch, and A. Sprecher, “Connective tissue polarity optical second harmonic microscopy, crossed-beam summation and small-angle scattering in rat-tail tendon”, Biophys. J ,50, P693-712 (1986)
[10] P.A. Franken, A.E. Hill, C.W. Peters, G. Weinreich, “Generation of optical harmonics”, Phys. Rev. Lett. ,Vol7,No4, P118-119(1961)
[11] R.Gauderon, P.B Lukins and C.J.R. Sheppard, “ Three –dimensional second-harmonic generation imaging with femtosecond laser pulses”, Optics Letters, Vol.23, No.15, P1209-1211(1998)
[12] J. Vydra and M. Eich, ”Mapping of the lateral polar orientational distribution in second-order nonlinear thin films by scanning second-harmonic microscopy”, Phys. Lett., 72(3), P275-277(1998)
[13] Y. Guo and P. P. Ho, ”Second-harmonic tomography of tissues”,
Optics Letters, Vol.22, No.17, P1323-1325(1977)
[14] Y.R. Shen, “Surface properties probed by second-harmonic and
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[15] A.Yariv, “Optical Electronics in Modern Communications”, Fifth edition
[16] J. N. Gannaway and C. J. R. Sheppard, “Second-harmonic imaging in the scanning optical microscope”, Optical and Quantum Electronics, 10, P435-439(1978)
[17] 林螢光, 光電子學-原理、元件與應用
[18] A.R Ten Cate, Oral Histology Development, Structure, and Function (1980)
[19] M. Sprave, R. Blum, and M. Eich, Appl.Phys.Lett.66(1995)
[20] T. F. Heinz, C. K. Chen, D. Ricard and Y. R. Shen, “Spectroscopy of Molecular Monolayers by Resonant Second-Harmonic Generation”, Phys. Rev. Lett. , Vol.48, P478-481(1982)
[21] B.-M. Kim, J. Eichler, and L.B.D. Silva, “Frequency doubling of ultrashort laser pulses in biological tissues”, Applied Optics, Vol.38, No.34, P7145-7150(1999)

第四章:
[ 1] Xu.C and W. Denk,”Two- photon optical beam induced current imaging through the backside of integrated circuits “ , Apply. Phys. Lett.,Vol74, 2578(1997)
[ 2] F.-J. Kao, M.-K. Huang and Y.-S. Wang, “Two-photon optical beam induced vurrent imaging of indium gallium nitride blue light-emitting diodes”, Optics Letters, Vol.24 , P1407-p1409(1999)
[ 3] 王雍舜,”國立中山大學物理研究所碩士論文”(2000)
[ 4] 陳建誠,”國立中山大學物理研究所碩士論文”(2001)