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博碩士論文 etd-0709102-210128 詳細資訊
Title page for etd-0709102-210128
論文名稱
Title
微波化學氣相沉積及磁控濺鍍成長類鑽石 之研究
Combined magnetron sputtering and ECR-CVD deposition of diamond-like carbon films
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
131
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2002-06-21
繳交日期
Date of Submission
2002-07-09
關鍵字
Keywords
類鑽碳膜、微波化學氣相沉積、磁控濺鍍
Diamond-like Carbon, Sputtering, ECR-CVD
統計
Statistics
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中文摘要
類鑽碳膜 DLC 因為它的高硬度、低摩擦係數、高化學穩定性……等,在工業上有著重要的應用。而在DLC中掺雜金屬以提高其附著力、化學穩定性及抗張力等,使得DLC更具不同特色之應用性。本文透過使用高離子密度之電子迴旋共振ECR (electron Cyclotron Resonance) 與磁控濺射合併,使 DLC摻雜金屬成為一個新穎的薄膜成長技術。
DLC鍍膜以拉曼光譜及Vicker硬度分析,得以獲得最佳的條件。由 Raman 光譜進行量測,藉以分析改變偏壓和乙炔的流量對沉積在高速鋼上面的a-C:H薄膜之影響, 並且由 Rockwell 方法檢查了硬度。由此次結果,我們建議較佳的成長機制。
在 Raman 光譜中,通入不同的乙炔流量時, 這個 G line peak的變化和強度比例 (ID/IG )與薄膜硬度相關聯。在 Raman 光譜中,增加偏壓時G line peak會往更高頻率位移而D line peak會往更低的頻率位移。
此外由磨擦係數、壓痕分析可知經ECR結合濺鍍之方法,可以獲得高硬度和低摩擦係數DLC薄膜。

Abstract
DLC exhibits an extreme hardness, chemical stability and optical transparency properties, which are, to a certain extent, similar to those of diamond and thus of technological importance. In the case of amorphous hydrogenated carbon (a-C:H) films they can be interpreted as intermediate between diamond, graphite, and polymer-like carbon sites. The most important intrinsic hardness is protection of tools or machine parts against wear. Most modifications have been used on DLC to enhanced mechanical properties, such as reducing its internal compressive stress (N, Si, and metal incorporation), or to reduce its surface energy for further lowering of its already low friction coefficient with 0.1. Among various deposition techniques, microwave generated discharges, especially electron cyclotron resonance (ECR) plasmas, develop excellent a high degree of ionization, high ions densities.

In this work, a novel hybrid technique for diamond-like carbon (DLC) film deposition has been developed, which combines the microwave ECR plasma discharging C2H2 and metallic magnetron sputtering. The effects of negative bias voltage and hydrocarbon flow rate for the deposition of a-C:H films on high speed steel were examined by Raman spectra, and their hardness was investigated by the Rockwell method. The Raman spectra show that at different hydrocarbon flow rate, the variation of the G line peak and width, and the integrated intensity ratio ID/IG of DLC and graphic, correlate well with the film hardness. Consequently, we suggest a deposition mechanism of DLC for this combined method.

目次 Table of Contents
第一章 緒論
1-1 緒論 1
1-2鑽石及石墨的特性 3
1-3系統回顧 4
1-4 鑽石及類鑽石的成長方法 8
1-5 類鑽石的結構及成長機制
1-5-1 類鑽石的結構 9
1-5-2 a-C之成長機制 9
1-5-3 a-C:H之成長機制 10
1-6濺鍍理論 11
1-7 磁控濺鍍 13
1-8微波電子迴旋共振化學氣相沉積法
1-8-1微波電子迴旋共振化學氣相沉積法簡介
14
1-8-2 低溫電漿 15
1-8-3 PACVD 的化學反應 16
第二章 材料分析之理論基礎
2-1拉曼光譜儀
2-1-1 拉曼光譜學簡介 18
2-1-2 散射光種類 18
2-1-3 拉曼散射的量子模型與實驗裝置 19
2-1-4拉曼散射的古典波動模型 20
2-1-5 拉曼光譜在研究類鑽碳膜之應用 22
2-2 鍍膜性質之檢測
2-2-1附著性測試 25
2-2-2硬度試驗 27
2-2-3磨耗試驗 27
2-2-4磨厚分析 28
第三章 實驗設備與步驟
3-1實驗設備 29
3-2 實驗流程 30
3-3 樣品的準備
3-3-1 表面清洗 31
3-3-2 成長條件 31
第四章 結果與討論
4-1機械性質 32
4-2 成長機制 32
4-3實驗結果討論 36
4-3-1固定偏壓改變乙炔流量 37
4-3-2 固定乙炔(C2H2)流量改變偏壓 38
4-3-3 固定乙炔(C2H2)流量及固定微波能量
改變偏壓 40
第五章 DLC膜的應用
5-1 DLC膜在機械方面的應 42
5-2 DLC膜在相變化材料方面的應用 42
第六章 結論 49
參考文獻 51
附圖目錄 62
附表目錄 118


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