鈦合金擁有優秀的機械性質、熱性質及生物相容性，被廣泛應用於航太與生醫材料領域中。鈦金合金具有高硬度特性，而鈦鈀合金則有良好的耐蝕性。因此，本實驗希望透過研究Ti-Au-Pd三元系統，充實此三元系統資料，以供未來相關研究之參考。
有別於傳統製作大量合金試片的方式繪製相圖，先利用擴散偶研究三元相圖，可節省熱處理的時間並降低成本，再搭配合金試片輔助，以得到更完整的相圖資訊並驗證擴散偶實驗結果，提高實驗數據的可信度。本實驗利用真空熔煉方法製作擴散偶及合金試片，將擴散偶及合金試片封進真空石英管以800oC均質化熱處理一天及二十一天，試片經由金相處理後，再使用電子微探儀(EPMA)進行成分分析，進而完成Ti-Au-Pd三元合金的800℃平衡相圖。
目前發現在Ti-Au-Pd 800oC平衡相圖中存在八個三相平衡區，分別為(1)αTi-βTi-Ti3(Au,Pd)、(2)Ti3(Au,Pd)-Ti2Pd-Ti(Au,Pd)、(3)Ti(Au,Pd)-Ti2Pd3-Ti(Au,Pd)2、(4)Ti2Pd3-Ti(Au,Pd)2-Ti3Pd5、(5)Ti(Au,Pd)2-TiAu4-T、(6)Ti(Au,Pd)2-T-TiPd3、(7)TiAu4-T-(Au,Pd)及(8)T-(Au,Pd)-TiPd3，二十個兩相平衡區及十一個單相區，並確認出Ti3Au-Ti3Pd、TiAu-TiPd和TiAu2-TiPd2為固溶相，其中發現三元介金屬相Ti25Au25Pd50的成分範圍：Ti：22.3at%~26.1at%、Au：23.3at%~32.4at及Pd：43.1at%~58.0at%，並也同時訂出Au在Ti2Pd 的固溶度為17.6 at%、Au在Ti2Pd3的固溶度為8.76 at%、Au在TiPd3的固溶度為10.0 at%及Pd在TiAu4的固溶度為36.1 at%。

Titanium alloy has excellent mechanical properties, thermal properties and biocompatibility, it has been applied as aerospace materials and biomaterials. According to the literature, Ti-Au alloy and Ti-Pd alloy can improve the mechanical and corrosion properties. The study of Ti-Au-Pd ternary phase diagram could provide the information of titanium alloy design.
In this study, the diffusion couple technique applied to determine the diffusion path that will provide the information of two-phase equilibrium and three-phase equilibrium. Then, the traditional alloy equilibrium technique applied to verify the three-phase equilibrium and those regions that the diffusion paths did not through it. This could the cost of gold and palladium. The diffusion couples and alloy specimens are sealed in a vacuum quartz tube and annealed at 800℃ for one day and 21 days, respectively. The diffusion couple and alloy samples were examined by electronic-probe- micro-analyzer (EPMA) to determine the equilibrium phase composition.
There are eight three-phase equilibrium as, (1)αTi-βTi-Ti3(Au,Pd)、(2)Ti3(Au,Pd)-Ti2Pd-Ti(Au,Pd)、(3)Ti(Au,Pd)-Ti2Pd3-Ti(Au,Pd)2、(4)Ti2Pd3-Ti(Au,Pd)2-Ti3Pd5、(5)Ti(Au,Pd)2-TiAu4-T、(6)Ti(Au,Pd)2-T-TiPd3、(7)TiAu4-T-(Au,Pd)、(8)T-(Au,Pd)-TiPd3 and twenty two-phase equilibrium determined in this study. There are three complete solid solution phases: Ti3Au-Ti3Pd, TiAu-TiPd and TiAu2-TiPd2. One ternary phase (Ti25Au25Pd50) was discovered with the composition range：22.3 at%~26.1 at% Ti、23.3 at%~32.4 at% Au、43.1 at%~58.0 at% Pd. The other determined solubility range are, 17.6 at% Au in Ti2Pd, 8.76 at% Au in Ti2Pd3, 10.0 at%Au in TiPd3 and 36.1 at% Pd in TiAu4.

壹、前言 1
1-1 研究背景 1
1-2 研究目的 1
貳、文獻回顧 4
2-1 Ti-Au二元系統相平衡圖 4
2-2 Ti-Pd二元系統相平衡圖 5
2-3 Au-Pd二元系統相平衡圖 7
2-4 擴散偶應用於相圖研究 8
2-4-1 擴散偶種類及製作方法 8
2-4-2 擴散路徑 9
2-4-3 影響擴散路徑之因素 10
參、實驗方法 12
3-1 試片製備 12
3-1-1 合金配製及熔煉 12
3-1-2 擴散偶製備及均質化熱處理 13
3-1-3 單點合金配置進行熱處理 14
3-1-4 試片處理 14
3-2 電子微探儀(Electron Probe Microanalysis, EPMA)分析 15
肆、實驗結果 16
4-1 Ti-Au-Pd 800℃擴散偶相平衡研究 16
4-1-1 Ti/Au50Pd50 800℃擴散偶相平衡研究 16
4-1-2 Ti/Au15Pd85 800℃擴散偶相平衡研究 17
4-1-3 Ti/Au85Pd15 800℃擴散偶相平衡研究 17
4-1-4 Ti/Au30Pd70 800℃擴散偶相平衡研究 17
4-1-5 Ti/Au70Pd30 800℃擴散偶相平衡研究 18
4-1-6 Ti/Au40Pd60 800℃擴散偶相平衡研究 18
4-1-7 Ti/Au60Pd40 800℃擴散偶相平衡研究 18
4-2 Ti-Au-Pd 800℃合金試片相平衡研究 19
4-2-1 αTi-Ti3(Au,Pd)兩相區 19
4-2-2 Ti3(Au,Pd)-Ti(Au,Pd)兩相區 19
4-2-3 Ti3(Au,Pd)-Ti2Pd兩相區 20
4-2-4 Ti(Au,Pd)單相區 20
4-2-5 Ti(Au,Pd)-Ti(Au,Pd)2兩相區 20
4-2-6 Ti(Au,Pd)-Ti2Pd3-Ti(Au,Pd)2三相區 21
4-2-7 Ti(Au,Pd)2-TiAu4兩相區 21
4-2-8 Ti(Au,Pd)2-TiAu4-T三相區 21
4-2-9 Ti(Au,Pd)2-T兩相區 21
4-2-10 TiAu4-T兩相區 22
4-2-11 T-TiPd3兩相區 22
4-2-12 Ti(Au,Pd)2-T-TiPd3三相區 22
4-2-13 Ti(Au,Pd)2-TiPd3兩相區 22
4-2-14 TiAu4-(Au,Pd)兩相區 23
4-2-15 (Au,Pd)單相區 23
伍、討論 24
5-1 介金屬相之固溶度 24
5-1-1 Ti3(Au,Pd)相之固溶度 24
5-1-2 Ti2Pd相之固溶度 25
5-1-3 Ti(Au,Pd)相之固溶度 25
5-1-4 Ti2Pd3相之固溶度 26
5-1-5 Ti (Au,Pd)2相之固溶度 26
5-1-6 TiPd3相之固溶度 27
5-1-7 TiAu4相之固溶度 27
5-1-8 (Au,Pd)相之固溶度 27
5-1-9三元介金屬相之固溶度 28
陸、結論 29
柒、參考文獻 31

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