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Abstract
Cr-containing diamond-like carbon coatings (Cr-DLC) with
gradient interlayers were studied to elucidate the effects of Cr
content and substrate bias on the mechanical properties and
microstructure of the deposited coatings. The coatings were
deposited with a closed field unbalanced magnetron sputtering
(CFUBMS) system. The Cr content and substrate bias were varied
from 5 at.% to 30 at.% and -22 V to -60 V, respectively.
Mechanical properties of the coatings were evaluated with
nano-indenter, scratch tester, ball-on-disk tribo-tester and ball
crater. Microstructures of the films were characterized by SEM,
TEM, and Raman spectroscopy.

Experimental results show that an increases in Cr content
from 5 at.% to 30 at.% for the Cr-DLC coatings deposited at
substrate bias of –40V results in the increase of the hardness,
Young’s modulus, adhesion and friction coefficient, and the
decrease of the deposition rate. A minimum abrasive wear rate
was found at about 10 ~ 15 at.% Cr content. An increase in
substrate bias from -22 V to -60 V for the Cr-DLC a of 10 at% Cr
content results in a maximum hardness, Young’s modulus and
adhesion, and a minimum friction coefficient and abrasive wear
rate at a substrate bias of -50 V, the although the deposition rate is
decreased. TEM analysis revealed layered structure of about 35 nm
period and fine CrC crystallite nanometer in size on the top layer of
the Cr-DLC coatings.

Table of Contents
1. Introduction .............................................................................1
1.1. Background..................................................................1
1.2. Motivation and purpose ...............................................4
2. Literature Review ......................................................................7
2.1. Deposition methods for Me-DLC................................7
2.1.1. Diode sputtering .....................................................8
2.1.2. DC magnetron sputtering .......................................9
2.1.3. CFUBMS..............................................................10
2.2. Mechanical properties of Me-DLC ...........................12
2.2.1 Hardness of Me-DLC............................................12
2.2.2 Friction of Me-DLC ..............................................13
2.2.3 Wear of Me-DLC...................................................14
2.3. Microstructure of Me-DLC .......................................16
3. Experimental details..............................................................18
3.1. Sample preparation ....................................................18
3.2. Coating deposition.....................................................18
3.2.1. Equipment and Process control ..........................18
3.2.2. Deposition procedure and Variables ...................20
3.3. Mechanical properties evaluation..............................20
3.4. Microstructure analysis..............................................25
4. Results.....................................................................................28
4.1. Mechanical properties................................................28
4.1.1 . Hardness and Young’s modulus........................28
4.1.2 . Adhesion ...........................................................29
4.1.3 . Friction and Wear properties.............................30
4.1.4 . Deposition Rate.................................................31
4.2. Microstructure analysis..............................................32
4.2.1. SEM ....................................................................32
4.2.2. Raman Spectroscopy ..........................................33
4.2.3. TEM....................................................................34
5. Discussion ...............................................................................36
5.1. Microstructure analysis..............................................36
5.1.1. SEM ....................................................................36
5.1.2. Raman Spectroscopy ..........................................37
5.1.3. TEM....................................................................39
5.2. Mechanical properties................................................42
5.2.1. Hardness and Young’s modulus..........................42
5.2.2. Adhesion .............................................................44
5.2.3. Friction and Wear properties...............................46
5.2.4. Deposition rate....................................................49
6. Conclusions ............................................................................51
Reference .......................................................................................53
Tables .............................................................................................62
Figures ...........................................................................................64

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