中文摘要

本研究的目的為研製具有光點轉換效果之多重量子井雷射,以提高半導體雷射和光纖之耦合效率,在半導體材料上我們採用長波長材料磷砷化鎵銦/磷化銦。結構設計上分為垂直方向和水平方向設計。垂直方向設計為採用非對稱型多重量子井，其厚度分別為50-50-100-100-150-150Å，其目的在使光主要聚集在量子井厚為150Å處，並且在其下方加入一被動波導，以擴大其光場分佈。水平方向設計為採用漸窄式波導（2.5 至1微米）和漸寬式波導（2.5至4微米），漸窄式波導目的為減少水平光場的侷限，漸寬式波導目的為增加水平向的發光區域，藉以改善水平發散角。
經由實驗結果得知，在室溫時，只有非對稱型多重量子井漸寬式波導2.5至4微米(200-250-50)脊狀雷射具有連續電流操作特性，臨限電流為34mA，其水平發散角為14°，而垂直發散角為36°，而漸窄式波導在室溫時僅具有脈衝電流操作特性，但在13°C時即具有連續電流操作特性，其水平發散角為14°，垂直發散角為36°。經由I-V，C-V量測得知，良率不佳原因可能為磊晶n型摻雜濃度分佈不正確，形成較大的串聯電阻所致。由於非對稱結構只具有單邊被動波導，故發散角較一般結構有雙邊被動波導大。但經由這樣設計，其結果還是較一般脊狀雷射的25°´45°有明顯的改善。

Abstract

The purpose of this thesis is to fabricate l = 1.55mm ridge waveguide spot size converter lasers for high laser-to-fiber coupling. The laser structure design includes the lateral and vertical directions. In the vertical aspect, we use six asymmetric InGaAsP/InP quantum wells of 50, 50, 100, 100, 150, 150Å. The asymmetric multi-quantum-well structure is designed to gather the optical field in the 150Å-wide quantum wells. Besides, we add a passive waveguide near the 150Å-wide quantum wells to expand optical field profile. In the lateral aspect, we use tapered ridge waveguides which have two different fashions: one is tapered down from 2.5mm to 1mm, and the other is tapered up from 2.5mm to 4mm.
The results show that the tapered-up ridge waveguide laser has a CW operation with Ith = 34mA and diverge angles of 14°×36° (q//×q^) at room temperature. The tapered-down ridge waveguide laser exhibits only a pulsed operation at room temperature. At lower temperature T = 13°C, the tapered-down laser has a CW operation of Ith = 36mA and diverge angles of 14°×36°(q//×q^). From I-V and C-V measurements, we attribute the heating problem to the large series resistance caused by the incorrect n-type doping profile in the epitaxy process.

目錄
第一章 簡介
1-1前言 1
1-2光點轉換雷射種類 2
第二章 半導體雷射原理
2-1前言 5
2-2半導體雷射結構 7
2-2-1前言 7
2-2-2光點轉換雷射 7
第三章 結構設計
3-1前言 11
3-2光點轉換雷射設計方向 11
3-2-1設計原理 11
3-2-2垂直方向設計 12
3-2-3水平方向設計 16
3-2-4 BPM-CAD模擬 17
3-3非對稱與對稱多重量子井結構光激放光(PL)量測 18
3-3-1光激放光量測 18
3-3-2非對稱與對稱多重量子井結構PL量測結果 20
第四章 製程步驟
4-1寬面積雷射製程 21
4-2脊狀雷射製程 24
第五章 結果與分析
5-1 BA量測結果 33
5-2光點轉換雷射之量測結果 38
5-2-1電流-電壓(I-V)曲線 38
5-2-2光電(L-I)曲線 38
5-2-3 C-V measurement 40
5-2-4雷射輸出光譜 49
5-2-5遠場發散角的量測 51
第六章 結論
參考文獻 63
附錄A 65

參考文獻
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