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博碩士論文 etd-0710107-111706 詳細資訊
Title page for etd-0710107-111706
論文名稱
Title
製作雙曲率無縫微透鏡之技術
Fabrication of Gapless Dual-Curvature Micro-lens Technique
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
93
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2007-06-27
繳交日期
Date of Submission
2007-07-10
關鍵字
Keywords
UV膠、熱壓、微透鏡
UV cure, Hot Embossing, Micro Lens
統計
Statistics
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中文摘要
發光二極體(Light Emitting Diode,LED)在液晶顯示器(Liquid Crystal Display,LCD)背光模組最具前景及發展性,但是傳統砲彈型LED光源屬於點光源發光較不適用於大尺寸的面板,因此本研究改變原本LED的封裝並設計製作出雙曲率無縫微透鏡(Gapless Dual-Curvature Micro Lens,GDML),而光線經過填充率愈高的微透鏡後均勻度會改善,此外探討配置光罩圖形對輝度的影響,所以使用TracePro軟體模擬比較六角、三角和雙曲率圖形的無縫微透鏡輝度值。
利用微機電技術製作雙曲無縫微透鏡,首先將大小交錯的光罩圖形轉移至所需的基板上,以鎳鈷電鑄後的模具熱壓於金屬材料上作為模仁,再將模仁填充UV膠材料而形成微透鏡,成品不僅擁有不同曲率的特性而且填充率也可以達到100%,此製程的優點只需使用一次電鑄的程序且能大量快速地複製成品,而且二次翻印後的收縮率皆小於0.5%,微透鏡搭配封裝於LED晶粒,在正向光源上的輝度誤差值在1.2%和在均勻度上也有所效果。
Abstract
Light emitting diode (LED) will have development in liquid crystal display (LCD) backlight. Nevertheless, the point source of LED is not suitable for large size panel. Therefore, this research will change the package which is bullet type and design gapless dual-curvature micro lens (GDML). Using the optics software TracePro is simulation luminance to compare of hexagon, triangular and dual-curvature micro lens, and fabrication of the better size. We can get metal model using micro-electro-mechanical systems (MEMS) technology after electroforming and hot embossing. The micro lens is formed by UV cure in metal model. It has different curvature and fill factor 100%. The advantage of electroforming is can manufacture a lot of product fast with high performance. The shrinkage rate is less than 0.5%. The collocation package of micro lens and LED chip can improve intensity and uniformity.
目次 Table of Contents
目錄 I
圖目錄 III
表目錄 VII
摘要 VIII
英文摘要 IX
第一章 緒論 1
1.1前言 1
1.2 研究目的與動機 4
1.3 文獻回顧 6
1.4 本文架構 16
第二章 發光二極體 17
2.1 認識LED 17
2.2 LED發展 18
2.3 全球高亮度LED發展動向 20
第三章 基本理論介紹 22
3.1 輻射度學與光度學 22
3.2 光學軟體簡介 27
3.3 幾何光學 28
3.4 光學元件-透鏡 31
3.5 微機電技術 32
第四章 微透鏡陣列製作與設計 34
4.1 LIGA技術 34
4.1.1 LIGA製程 35
4.1.2 LIGA之特性及功能 36
4.4 模擬條件設定 44
第五章 軟體模擬與實驗量測分析 49
5.1 軟體模擬結果 49
5.2 微透鏡製作技術 57
5.2.1無縫微透鏡製作 57
5.2.2雙曲率無縫微透鏡製作 59
5.3 量測分析 65
第六章 結論與未來展望 74
6.1 結論 74
6.2 未來展望 74
參考文獻 75
參考文獻 References
1.大億科技股份有限公司,http://www.kenmos.com.tw/
2.Borrelli, N. F., D. L. Morse, and R. H. Bellman. "Photolytic Technique for Producing Microlenses in Photosensitive Glass." Applied Optics 24, no. 16 (1985): 2520-2525.
3.Hutley, M. C. "Optical Techniques for the Generation of Microlens Arrays." Journal of Modern Optics 37, no. 2 (1990): 253-265.
4.Däschner, W., P. Long, R. Stein, C. Wu, and S. H. Lee. "General Aspheric Refractive Micro-Optics Fabricated by Optical Lithography using a High Energy Beam Sensitive Glass Gray-Level Mask." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 14, (1996): 3730.
5.Cox, W. R., T. Chen, D. W. Ussery, D. J. Hayes, R. F. Hoenigman, D. L. MacFarlane, and E. Rabinovich. "Microjet Printing of Anamorphic Microlens Arrays." SPIE Proceedings 2687, (1996): 89-98.
6.Ottevaere, H., B. Volckaerts, J. Lamprecht, J. Schwider, A. Hermanne, I. Veretennicoff, and H. Thienpont. "Two-Dimensional Plastic Microlens Arrays by Deep Lithography with Protons: Fabrication and Characterization." Journal of Optics A: Pure and Applied Optics 4, no. 4 (2002): S22-S28.
7.Pan, L. W., X. Shen, and L. Lin. "Microplastic Lens Array Fabricated by a Hot Intrusion Process." Microelectromechanical Systems, Journal of 13, no. 6 (2004): 1063-1071.
8.Chien, C. H., C. T. Pan, C. C. Hsieh, C. M. Yang, and K. L. Sher. "A Study of the Geometry of Microball Lens Arrays using the Novel Batch-Fabrication Technique." Sensors and Actuators A: Physical no. 1 (2005): 55-63.
9.Chang, S. I., J. B. Yoon, H. Kim, J. J. Kim, B. K. Lee, and D. H. Shin. "Microlens Array Diffuser for a Light-Emitting Diode Backlight System." Optics Letters 31, no. 20 (Oct 15, 2006): 3016-3018.
10.Chang, C. Y., S. Y. Yang, and M. H. Chu. "Rapid Fabrication of Ultraviolet-Cured Polymer Microlens Arrays by Soft Roller Stamping Process." Microelectronic Engineering 84, no. 2 (2007): 355-361.
11..LED Express Inc,http://www.ledexpress.com/
12.Bergh, A. A. and P. J. Dean. "Light-Emitting Diodes." Proceedings of the IEEE 60, no. 2 (1972): 156-223.
13.Sugawara, H., K. Itaya, M. Ishikawa, and G. Hatakoshi. "High-Efficiency InGaAIP Visible Light-Emitting Diodes." Japenese journal Applied of Physics Part 1 Regul Pap Short Note. 31, no. 8 (1992): 2446-2451
14.Kuo, C. P., R. M. Fletcher, T. D. Osentowski, M. C. Lardizabal, M. G. Craford, and V. M. Robbins. "High Performance AlGaInP Visible Light-Emitting Diodes." Applied Physics Letters 57, (1990): 2937.
15.Nakamura, S., M. Senoh, N. Iwasa, S. Nagahama, T. Yamada, and T. Mukai. "Superbright Green InGaN Single-Quantum-Well-Structure Light-Emitting Diodes." Japenese Journal Applied of Physics 34, no. 10B Part 2 (1995).
16.Senturia, S. D. Microsystem DesignEbrary, 2001.
17.Feynman, R. P. "There's Plenty of Room at the Bottom." Journal of Microelectromechanical Systems 1, no. 1 (1992): 60-66.
18.Ehrfeld, W., F. Gotz, D. Munchmeyer, W. Schelb, D. Schmidt, and K. K. GmbH. "LIGA Process: Sensor Construction Techniques Via X-Ray Lithography." Solid-State Sensor and Actuator Workshop, 1988.Technical Digest., IEEE (1988): 1-4.
19.Guckel, H., T. Christenson, and K. Skrobis. "Metal Micromechanisms Via Deep X-Ray Lithography, Electroplating and Assembly." Journal Micromechanics and Microengineering. 2, (1992): 225-228.
20.Institu fur Miikrotechnik Mainz(IMM), Germany.
21.Lin, C. P., H. Yang, and C. K. Chao. "Hexagonal Microlens Array Modeling and Fabrication using a Thermal Reflow Process." Journal of Micromechanics and Microengineering 13, no. 5 (2003): 775-781.
22.Yang, H., C. K. Chao, M. K. Wei, and C. P. Lin. "High Fill-Factor Microlens Array Mold Insert Fabrication using a Thermal Reflow Process." Journal of Micromechanics and Microengineering 14, no. 8 (2004): 1197-1204.
23.Chou, M. C, C. T. Pan, S. C. Shen, M. F Chen, K. L. Lin, and S. T Wu. "A Novel Method to Fabricate Gapless Hexagonal Micro-Lens Array." Sensors and Actuators A: Physical 118, no. 2 (2005/2/28): 298-306.
24.C. T. Pan and C. H. Su. "Fabrication of Gapless Triangular Micro-Lens Array." Sensors and Actuators A: Physical 134, no. 2 (2007): 631-640.
25.Wang, M. R. and H. Su. "Laser Direct-Write Gray-Level Mask and One-Step Etching for Diffractive Microlens Fabrication." Applies Optics 37, no. 32 (1998): 7568-7576.
26.Chang, S. I. and J. B. Yoon. "Shape-Controlled, High Fill-Factor Microlens Arrays Fabricated by a 3D Diffuser Lithography and Plastic Replication Method." Optics Express 12, no. 25 (2004): 6366-6371.
27.Peng, H., Y. L. Ho, X. J. Yu, M. Wong, and H. S. Kwok. "Coupling Efficiency Enhancement in Organic Light-Emitting Devices using Microlens Array-Theory and Experiment." Journal of Display Technology 1, no. 2 (2005): 278-282.
28.Kirkpatrick, S. J. "A Primer on Radiometry." Vol. 21. Copenhagen: Munksgaard, 2005.
29.Moreno, I. and R. I. Tzonchev. "Effects on Illumination Uniformity due to Dilution on Arrays of LEDs." Proceedings of SPIE 5529, (2004): 268.
30.Parkyn, W. A. and D. G. Pelka. "Illuminance-Mapping Linear Lenses for LEDs." Proceedings of SPIE 5942, (2005): 59420L.
31.Parkyn, W. A. and D. G. Pelka. "Illumination-Redistribution Lenses for Non-Circular Spots." Proceedings of SPIE 5942, (2005): 594208.
32.Judy, J. W. "Microelectromechanical Systems(MEMS)- Fabrication, Design and Applications." Smart Materials and Structures 10, no. 6 (2001): 1115-1134.
33.Pan, C. T., P. J. Cheng, M. F. Chen, and C. K. Yen. "Intermediate Wafer Level Bonding and Interface Behavior." Microelectronics and Reliability 45, no. 3-4 (2005): 657-663.
34.Pan, C. T., P. J. Cheng, C. K. Yen, and C. C. Hsieh. "Application of Polyimide to Bending-Mode Microactuators with Ni/Fe and Fe/Pt Magnet." Microelectronics and Reliability 46, no. 8 (2006/8): 1369-1381.
35.Yang, H., R. F. Shyu, and J. W. Huang. "New Production Method of Convex Microlens Arrays for Integrated Fluorescence Microfluidic Detection Systems." Microsystem Technologies 12, no. 10 (2006): 907-912.
36.Zhang, P., G. Londe, J. Sung, E. Johnson, M. Lee, and H. J. Cho. "Microlens Fabrication using an Etched Glass Master." Microsystem Technologies 13, no. 3 (2007): 339-342.
37.行政院國家科學委員會精密儀器發展中心 "微機電系統技術與應用",全華科技圖書公司,2003。
38.謝其昌 "微球透鏡陣列製程及其光學性能分析",國立中山大學機械與機電工程所博士論文,2004。
39.顏仲崑 "微型壓力感測器",遠東技術學院機械研究所碩士論文,2003。
40.李介廷 "磁性微型壓力感測器之設計",國立屏東科技大學車輛工程所碩士論文,2006。
41.鄧元鼎 "運用ST透鏡與LED陣列的配置設計均勻的照明系統", 國立台灣科技大學電子工程所碩士論文,2005。
42.陳冠宇 "快速模具技術應用於導光板製作研究",國立台灣科技大學機械工程所碩士論文,2004。
43.鍾明昌 "以熱整形方法形成微透鏡陣列之機制探討與應用",國立東華大學材料科學與工程碩士論文,2003。
44.黃裕盛 "MEMS技術於半導體光電元件封裝之研究",逢甲大學自動控制工程所碩士論文,2004。
45.張耀祖 "使用發光二極體為光源的背光板設計",中華大學電機工程所碩士論文,2003。
46.劉耕儒 "以類LIGA 技術製作立體微透鏡陣列模仁",國立中興大學機械工程所碩士論文,2002。
47.鄭慧成 "真空吸取應用於類LIGA技術成型微透鏡陣列之製程探討",國立中興大學精密工程所碩士論文,2003。
48.戴銘成 "發光二極體背光模組照度與色彩均勻化結構設計",國立交通大學光電工程所碩士論文,2004。
49.鄭吉成 "雙層光阻材料回溫形成微透鏡之製程",國立清華大學動力機械工程所碩士論文,2001。
50.邱治文 "熱擠壓式微透鏡陣列成形之研究",國立中興大學精密工程所碩士論文,2003。
51."以方形基底微透鏡增益面型有機發光元件的外部耦合效率",機械工業雜誌,286期,2007,119-126頁。
52.詹前疆 "微機電系統",產業調查與技術,vol.138,2001,87-102頁。
53.陳德請、吳世揚 "生物光電工程導論"。
54.中國電器股份有限公司,http://www.chinaelectric.com.tw/
55.台灣歐司朗,http://www.osram.com.tw
56.日本財團法人照明協會,http://www.ieij.or.jp/index.html
57.AB-M, Inc,http://www.maskaligner.com/
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