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博碩士論文 etd-0711107-162019 詳細資訊
Title page for etd-0711107-162019
論文名稱
Title
鋯鈦與鋯銅非晶質薄膜之濺鍍製備與性質分析
Preparation and Characterization of Sputtered Zr-Ti and Zr-Cu Thin Film Metallic Glasses
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
112
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2007-06-28
繳交日期
Date of Submission
2007-07-11
關鍵字
Keywords
濺鍍、非晶質、薄膜
Thin Film, Sputtered, amorphous
統計
Statistics
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The thesis/dissertation has been browsed 5646 times, has been downloaded 1212 times.
中文摘要
本實驗中使用直流濺鍍法,利用濺鍍多層膜以及共濺鍍製程的不同,以不同之純金屬靶材濺鍍合成出不同成份之薄膜。由於鋯基非晶質合金具有耐腐蝕特性與良好之機械性質,且有較佳的熱穩定性與玻璃形成能力。加上已有人成功利用累積滾壓接合法 (ARB)合成出 Zr-Ti 和 Zr-Cu 二元非晶質合金。所以本實驗選擇以 Zr-Ti 和 Zr-Cu 作為研究材料,因此我們在這要利用濺鍍系統濺鍍出 Zr-Ti 和 Zr-Cu 非晶質薄膜,並藉由各種不同之分析探討薄膜厚度與薄膜退火時間之間的關係,以及薄膜成份與玻璃形成能力之間的關係。由於多層膜製程必須經由真空熱處理來造成擴散以達成非晶質化,因此會牽涉到混合熱大小的問題,混合熱約為零之 Zr-Ti 多層膜,由於擴散現象較不明顯,較不易形成非晶質薄膜。而混合熱為負值之 Zr-Cu 多層膜,熱處理後較易形成非晶質薄膜。共濺鍍製程則是要控制基板之溫度,基板之溫度控制於靶材電壓高低以及濺鍍速率,溫度過高會使得薄膜結晶化。而 Zr-Ti 共濺鍍薄膜其混合熱約為零,易形成固溶態,因此不易形成非晶質薄膜。但是 Zr-Cu 共濺鍍薄膜其混合熱為負值並且半徑差比例大於12%,因此易形成非晶質薄膜。而 Zr-Ti 多層膜薄膜經過退火發現 XRD 繞射分析無明顯之變化,是由於混合熱趨近於零,擴散較不明顯現象。而 Zr-Cu 具負混合熱,經過退火進行擴散,經由 XRD 繞射分析可得到寬化之曲線。然而 Zr-Ti 和 Zr-Cu 之共濺鍍薄膜在一定的條件下,皆可得到XRD 繞射之寬化曲線。其後再以 DSC、SEM 和 TEM 觀察薄膜的結構變化,以及成份之關係。
Abstract
none
目次 Table of Contents
目錄..................................................................................................................................................I
表目錄...........................................................................................................................................IV
圖目錄.............................................................................................................................................V
摘要............................................................................................................................................ VIII
第一章 前言....................................................................................................................................1
1-1 簡介............................................................................................................................1
1-2 鋯基非晶質合金........................................................................................................2
1-3 研究目的....................................................................................................................2
第二章 理論背景............................................................................................................................4
2-1 非晶質合金的發展....................................................................................................4
2-2 非晶質合金的種類....................................................................................................5
2-3 非晶質合金的製程....................................................................................................5
2-4 非晶質合金的特性....................................................................................................8
2-4-1 機械性質.........................................................................................................8
2-4-2 化學性質.........................................................................................................8
2-4-3 物理性質.........................................................................................................9
2-5 真空濺射鍍膜層積原理............................................................................................9
2-5-1 薄膜沉積..........................................................................................10
2-5-2 電漿的產生...................................................................................................10
2-5-3 輝光放電.......................................................................................................11
2-5-4 濺射方法.......................................................................................................12
2-5-5 影響附著力的因素.......................................................................................13
2-5-6 影響濺射率的因素.......................................................................................14
2-5-7 影響成分的因素...........................................................................................15
2-6 論文回顧..................................................................................................................16
第三章 實驗步驟..........................................................................................................................21
3-1 實驗設備..................................................................................................................21
3-1-1 濺鍍系統.......................................................................................................21
3-1-2 真空熱處理系統...........................................................................................22
3-2 實驗分析儀器..........................................................................................................22
3-2-1 雷射掃描共軛焦顯微鏡...............................................................................22
3-2-2 XRD 繞射分析.............................................................................................23
3-2-3 DSC 熱分析..................................................................................................23
3-2-4 SEM 掃描式電子顯微鏡與 EDS 能譜元素分析.....................................24
3-2-5 F I B 雙束型聚焦離子束顯微鏡...............................................................24
3-2-6 TEM 穿透式電子顯微鏡與 SAD 擇域繞射分析.....................................24
第四章 實驗結果..........................................................................................................................26
4-1 利用多層膜與共濺鍍製程形成 Zr-Ti 薄膜..........................................................27
4-1-1 DSC 熱分析..................................................................................................27
4-1-2 XRD 繞射分析.............................................................................................27
4-1-3 SEM 掃描式電子顯微鏡與 EDS 能譜元素分析......................................30
4-1-4 TEM 穿透式電子顯微鏡............................................................................ 31
4-2 利用多層膜與共濺鍍製程形成 Zr-Cu 薄膜........................................................32
4-2-1 DSC 熱分析..................................................................................................32
4-2-2 XRD 繞射分析.............................................................................................33
4-2-3 SEM 掃描式電子顯微鏡與 EDS 能譜元素分析......................................34
4-2-4 TEM 穿透式電子顯微鏡.............................................................................35
第五章 分析與討論......................................................................................................................37
5-1 Zr-Ti 多層膜薄膜的分析與討論.............................................................................37
5-2 Zr-Ti 共濺鍍薄膜的分析與討論.............................................................................38
5-3 Zr-Cu 多層膜薄膜的分析與討論...........................................................................39
5-4 Zr-Cu 共濺鍍薄膜的分析與討論...........................................................................40
5-5 Zr-Ti 與 Zr-Cu 之比較與討論............................................................................41
第六章 結論..................................................................................................................................43
參考文獻........................................................................................................................................45
表....................................................................................................................................................48圖....................................................................................................................................................61
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