生物感測晶片具有免螢光標記、高靈敏度、高選擇性、高精確度、快速且即時檢測之優點。發展生物感測器晶片對於基因檢測、蛋白質檢測、生醫診斷及研發新治療藥物有相當大的助益。本研究的目標是以開發氮化物高電子遷移率電晶體(N-HEMT)生物傳感器檢測胰臟癌標記物CA19-9抗原為早期發現胰臟癌。
　　本研究成功以分子束磊晶的方式成長出AlGaN/GaN薄膜，並利用微電子半導體製程技術製作出氮化物高電子遷移率電晶體。本研究利用N-HEMT作為生物感測晶片，並透過化學表面修飾技術在晶片表面修飾胰臟癌標記物CA19-9抗體，偵測胰臟癌標記物CA19-9抗原分子。
本研究分為兩部分，首先將N-HEMT生物感測晶片藉由快速熱退火系統(RTA)，使其形成歐姆接觸。而第二部分為針對不同鋁含量之N-HEMT，探討其對生物感測晶片的特性。
由實驗結果得知，在700度的退火溫度下，由Isd-Vsd量測結果得知N-HEMT生物感測器偵測胰臟癌標記物CA19-9抗原分子偵測到150 U/mL的CA19-9抗原分子。而比較鋁含量為29%與49%之N-HEMT生物感測器，29%表現出較好的性能，而同樣的偵測到之胰臟癌標記物CA19-9抗原分子均為150 U/mL。
　　最後，成功地製備N-HEMT生物感測器，實現對胰臟癌早期的檢測，而高靈敏度的N-HEMT生物感測器對未來發展各種不同的生物傳感實驗提供了重要的信息。

Compared to classical lab instrumentation, the biosensors are being increasingly exploited as promising diagnostic devices for their advantages, such as label-free, ultrasensitive, highly selective, high accuracy, fast and real-time detection. Fabricating biosensor chip has great benefits for gene-detection, protein-detection, medical diagnosis and development new medicine. The goal of this research work is to develop nitride–based high electron mobility transistor (N-HEMT) biosensor for the detection pancreatic cancer marker carbohydrate 19-9 (CA19-9) antigen for early detection of pancreatic cancer.
　　N-HEMT biosensor was fabricated through microelectronic semiconductor process technology by growing AlGaN/GaN film using molecular beam epitaxy (MBE). The surface of N-HEMT biosensor was functionalized with modify pancreatic cancer marker CA 19-9 antibody for the detection of pancreatic cancer marker CA19-9 antigen molecule. The proposed research was focused on two important objectives. At first, N- N-HEMT biosensor was subjected to rapid thermal annealing (RTA) temperatures to optimize the device performance by enhancing metal ohmic contact. Secondly, the aluminum content N-HEMT biosensor was changed to investigate the effect on the performance of the device during biosensing.
　　It was observed that The RTA at 700℃ resulting in better performance which is evident from the Isd-Vsd measurement and during detection of CA19-9 antigen detection with a minimum concentration of 150 U/mL. When the influence aluminum content of was investigated, it was observed that N-HEMT biosensor with 29% aluminum content has shown a better performance compared with N-HEMT biosensor with 49% aluminum content during CA19-9 antigen detection with a minimum concentration 150 U/mL.
　　Finally, N-HEMT biosensor was successfully fabricated and implemented for early pancreatic cancer detection, which provided important information for the future development of high sensitivity N-HEMT biosensor for a variety of biological sensing experiments.

論文審定書 i
誌謝 ii
中文摘要 iii
英文摘要 iv
目錄 vi
圖 目錄 ix
表 目錄 xii
第一章 序論 1
1.1背景與動機 1
1.2生物感測器發展與介紹 1
1.3二維電子氣的形成與介紹 3
1.4 AlGaN/GaN高電子遷移率電晶體 7
1.5介紹化學表面修飾技術 8
1.6霍爾效應 10
第二章 儀器介紹 13
2.1電漿輔助分子束磊晶系統 (Plasma assisted molecular beam epitaxy, PAMBE) 13
2.2 掃描式電子顯微鏡 (Scanning electron microscope, SEM) 14
2.3 X光繞射分析 (X-ray diffraction analysis) 16
2.4 光學微影系統 (Mask aligner and exposure system) 19
2.5 電子束蒸鍍系統 (Dual e-beam evaporator, E-beam) 20
2.6 快速熱退火系統 (Rapid thermal annealing, RTA) 20
2.7微流體實驗量測系統 21
第三章 生物感測器製作 23
3.1製作生物感測器 23
3.2微流體通道製作 26
3.3藥品的成分與配置方法 29
第四章 實驗方法 32
4.1 偵測原理介紹 32
4.2 基本電性量測 33
4.3 化學表面修飾 34
第五章 實驗數據與分析 36
5.1實驗樣品結構 36
5.2 X-ray 繞射分析 37
5.3霍爾量測分析 40
5.4即時偵測胰臟癌抗原分子結果 41
第六章 結果與討論 55
第七章 參考文獻 56

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