矽光子是以矽作為光電元件基材的新穎科學，可以藉由矽絕緣體晶片(Silicon on insulator)來實現，而從製程角度而言，和傳統積體電路製程(CMOS)具有高度相容性，因此能夠大幅降低製程成本，同時也希望能藉由成熟的CMOS 製程技術來整合且積體化所有具不同功能的元件。集成布拉格光柵結構在SOI上已有十足的發展，而提供靈活與精確的光譜響應一直是研究的目標之一。本實驗室提出一披覆層調變的波導設計與弱耦合光柵在SOI平台上來實現集成布拉格光柵並兼容CMOS製程，此方式不但可以達到窄反射帶寬(0.217 nm)，且光柵寬度改變對布拉格波長影響不大，而本論文利用實驗室已提出的披覆層調變光柵波導設計做延伸與應用，包括(1)藉由披覆層調變主波導寬度的變化，在同個波導上能同時擁有四個布拉格波長反射，作為低密度分波多工系統，間隔20 nm，(2)藉由披覆層調變波導設計能同時在主波導與側波導上同時設計不同的光柵週期，因此能同時擁有多個布拉格反射頻譜，(3)利用光柵錯位方式之設計，更精準且靈活地去控制光柵耦合強度，進而調整反射帶寬，(4)藉由加入取樣光柵在長直型的披覆層調變波導或環形共振腔上，能擁有週期性的分波多工反射頻譜，藉由改變取樣光柵週期能控制自由頻譜範圍(FSR)。
最後，利用披覆層調變布拉格光柵在SOI平台上實現矽光子溫度感測器，在光柵寬度為30 nm情況下，有著窄的反射帶寬(0.63nm)及高的消光比(21 dB)，同時有著大的溫度工作範圍，而當光柵寬度改變時，有著相對穩定的反射帶寬(Δλ/ΔWg = 0.013)、布拉格波長(λB/ΔWg = 0.002)、溫度靈敏度(δλ/δT = 83.4 pm/οC)
，FOM值來到0.132/oC，與條形波導及板狀波導相比之下都有較好的元件表現。

This thesis aims to achieve functional grating devices on silicon-on-insulator (SOI) platform using the cladding-modulated (CladMod) waveguide configuration. Such a CMOS-compatible CladMod grating is able to provide narrowband reflection and stable Bragg wavelength from a high-index-contrast SOI platform. The proposed CladMod grating serves as a building block in this work to realize various functional photonic devices on SOI, including (1) coarse wavelength-division-multiplexing 20-nm-spaced four-channel gratings by adjusting the core waveguide width for effective index engineering, (2) multi-channel grating reflectors by introducing width corrugations on the sidewalls of CladMod core and cladding waveguides, (3) bandwidth-tunable gratings by varying the misalignment between sidewall gratings to tune the grating coupling strength, and (4) multi-channel grating reflectors by applying sampled gratings on either a straight CladMod waveguide or a micro-ring resonator for different free-spectral-range needs. We also investigate the effects of asymmetric distance between core and cladding waveguides in CladMod gratings.
A silicon photonics temperature sensor based on CladMod gratings on SOI substrate is finally demonstrated. This sensor enables a narrowband reflection (0.63 nm for 30 nm grating width), a linear wavelength-to-temperature response over a wide temperature range with an extinction ratio of 21 dB, a stable reflection bandwidth (Δλ/ΔWg = 0.013), Bragg wavelength (λB/ΔWg = 0.002), and temperature sensitivity (δλ/δT/ΔWg = -1.3×10-5 K-1 with a δλ/δT = 83.4 pm/oC) against the grating width variation, and a FOM score of 0.132/oC. Such a superior temperature sensing properties in CladMod gratings outperform the strip- and slab-type grating counterparts.

目錄
第一章 緒論 1
1.1 矽光子技術 2
1.2 研究動機 4
1.3 論文大綱 9
第二章 基礎理論 10
2.1 矽光學布拉格光柵簡介 10
2-2 模擬分析介紹 13
2-2.1 薄膜模態匹配法(Film Mode Method) 13
2-2.2 特徵模態展開法(EME) 14
2-3 波導介紹 18
2-3.1 條型波導 18
2-3.2 板型波導 20
2-3.3 披覆層調變波導 22
第三章 披覆層調變波導之設計量測 26
3-1 量測系統 26
3-2 下線晶片 28
3-3 披覆層調變波導設計與量測結果 29
3-3.1 波導損耗 29
3-3.2 四波長披覆層調變波導 33
3-3.3 光柵錯位(offset)方式波導 38
3-3.4 雙週期與三週期披覆層調變波導 44
3-3.5 披覆層調變取樣光柵波導 49
3-3.6 披覆層調變環形取樣光柵 52
第四章 積體化矽光子溫度感測器 56
4-1 矽光子溫度感測器之介紹 56
4-2 溫度感測器之模擬比較 58
4-3 條型波導於溫度感測器之量測 59
4-4 板型波導於溫度感測器之量測 62
4-5 披覆層調變波導於溫度感測器之量測 65
4-6 微環形共振腔於溫度感測器之量測 68
第五章 結論與未來工作 73
5-1 結論 73
5-2 未來工作 74
參考文獻 83

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