Fabry-Pérot光纖干涉儀具有體積微小、結構簡單和靈敏度高等優點，因此近年來被廣泛應用於各種不同領域。然而，過去研究在製作Fabry-Pérot光纖干涉儀的製程中，往往牽涉到化學蝕刻或利用高功率雷射進行加工，使得製作過程既繁瑣又昂貴。本論文選用製作過程相當簡單、重複性高且成本低廉的錯位熔接法來製作開放式共振腔的Fabry-Pérot光纖干涉儀。我們將空芯光纖熔接於兩單模光纖之間形成共振腔，並透過單熔接面的錯位處理產生孔洞，使其共振腔變為開放式結構，能夠讓外界待測物進入共振腔中進行感測。
我們利用此開放式共振腔Fabry-Pérot光纖干涉儀對環境折射率、溫度以及振動頻率進行感測。對於共振腔長度30μm的元件，在折射率1.333~1.3403之間，元件的折射率靈敏度達到1058.62nm/RIU，且對於折射率量測之最大誤差量僅 4.72x10-5RIU，顯示此元件在折射率感測應用上具有高靈敏度及高穩定性。而在溫度量測範圍30°C~50°C之間，元件的溫度靈敏度僅16.8pm/°C ，說明此元件在進行其他環境參數感測時，不容易受到環境溫度改變的影響。而在振動頻率範圍300Hz~4000Hz之間，此元件的訊雜比約在45~54dB，相較於其他光纖振動感測器具有更好的表現。綜合上述觀點，我們所製作的開放式共振腔Fabry-Pérot光纖干涉儀對於環境折射率及振動頻率的感測具有高度的應用潛能。

Fiber-optic Fabry-Pérot interferometers (FFPIs) have been widely explored in many fields due to their advantages such as small size, simple structure and high sensitivity. In previous studies, most FFPIs are fabricated by using etching process or femtosecond lasers, which are complicated and expensive. In this thesis, we fabricate an open-cavity FFPI by splicing fibers with lateral offset, which is very simple, repeatable and inexpensive. We can make a cavity by fusing a hollow-core fiber (HCF) between two single-mode fibers (SMFs). In order to create an open cavity, we apply misaligned splicing on single fusing point. The sensing materials can then successfully get into the cavity to realize the refractive index (RI) sensing.
We use the FFPI for sensing applications of RI, temperature and vibration. The RI sensitivity of the fabricated FFPI with the cavity length of 30μm is 1058.62nm/RIU as the RI is between 1.333 to 1.3403. The maximum deviation is only 4.72x10-5 RIU, which shows the high sensitivity and great stability of our FFPI. The temperature sensitivity of the FFPI is only between 30°C~50°C, which illustrates the FFPI can be used without temperature disturbance. In the vibration frequency range of 300Hz~4000Hz, our FFPI exhibits large SNR of 45~54dB. As a result, our fabricated open-cavity FFPI sensor has high potential for RI and vibration sensing.

誌謝 i
摘要 ii
Abstract iii
目錄 iv
圖目錄 vi
表目錄 ix
第一章 續論 1
1-1 光纖的發展簡介 1
1-2光纖干涉儀感測器 4
1-2.1法布立-培若光纖干涉儀(Fabry-Pérot fiber interferometer) 5
1-2.2馬赫-任德爾光纖干涉儀(Mach-Zehnder fiber interferometer) 8
1-2.3麥克森光纖干涉儀(Michelson fiber interferometer) 11
1-3 研究動機 13
第二章 Fabry-Pérot光纖干涉儀 14
2-1 Fabry-Pérot干涉儀的原理 14
2-2 Fabry-Pérot光纖干涉儀 22
第三章 開放式共振腔Fabry-Pérot光纖干涉儀的製作 25
3-1 文獻回顧 25
3-2 元件設計 27
3-3 元件製作 28
3-3.1光纖介紹 28
3-3.2元件製作 29
第四章 開放式共振腔Fabry-Pérot光纖干涉儀基本特性 35
4-1 實驗架設 35
4-2不同元件長度之干涉頻譜 38
4-3元件長度與FSR關係 41
4-4元件錯位量對開放式共振腔形成之影響 43
第五章 開放式共振腔Fabry-Pérot光纖干涉儀之感測應用 45
5-1 折射率感測 45
5-1.1量測架設 45
5-1.2折射率量測 46
5-1.3穩定度 51
5-2溫度感測 52
5-2.1量測架設 52
5-3 振動感測 57
5-3.1低頻量測架設 57
5-3.2低頻量測 58
5-3.3高頻量測 60
第六章 結論 64
參考文獻 65

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