壓電效應是在十九世紀時就被發現，但是壓電效應的應用是到了二十世紀後才開始發展。而於本論文中，即是使用基於壓電效應所製成之壓電致動器來設計製作一個三自由度的微操作平台，而在此微操作平台結構上則是使用並聯式機構來加以設計，且對其平台之運動狀態予以分析。而在控制系統上則整合了遠端控制功能。此外，並為此微操作平台應用於機械手臂上之可行性奠立基礎。

Piezoelectric effect was discovered in the 19th century, but the applications of piezoelectric effect were realized until the 20th century. In this paper, piezoelectric actuators, which are made based on piezoelectric effect, are employed to establish a three-degree-of-freedom micro-manipulator. The mechanism of this micro-manipulator is designed as a parallel-type mechanism. The kinematics of the micro-manipulator is also analyzed. In addition, a remote control framework is implemented with a control system and this achievement can be a demonstration for future feasibility of application of this micro-manipulator to robotic systems.

目錄……………………………………………………………………Ⅰ
圖索引…………………………………………………………………Ⅲ
表索引…………………………………………………………………Ⅴ
摘要……………………………………………………………………Ⅵ
Abstract………………………………………………………………Ⅶ
第一章 緒論…………………………………………………………1
1.1 研究動機……………………………………………………1
1.2 文獻回顧……………………………………………………1
1.3 論文架構……………………………………………………5
第二章 壓電致動器………………………………………………….6
2.1 壓電效應……………………………………………………6
2.2 壓電材料……………………………………………………7
2.3 壓電材料之應用……………………………………………9
第三章 三自由度微操作平台……………………………………….14
3.1 史都華平台…………………………………………………14
3.2 操作平台之設計……………………………………………15
3.3 平台運動分析………………………………………………21
第四章 平台之運動控制…………………………………………….27
4.1 控制方式……………………………………………………27
4.2 遠端控制……………………………………………………31
4.3 運動範圍……………………………………………………33
第五章 結論與未來展望…………………………………………….37
參考文獻………………………………………………………………39
附錄A 壓電致動器規格……………………………………………42
附錄B 電壓放大器規格……………………………………………43

[1] K. M. Lee and S. Arjunan, “A three degree of freedom micro-motion in-parallel actuated manipulator,” Proceedings of IEEE International Conference on Robotics and Automation, Vol. 3, pp. 1698-1703, May 1989.
[2] K. M. Lee and S. Arjunan, “A three-degrees-of-freedom micromotion in-parallel actuated manipulator,” IEEE Transactions on Robotics and Automation, Vol. 7, Issue 5, pp. 634-641, October 1991.
[3] G. H. Pfreundschuh, T. G. Sugar and V. Kumar, “Design and control of a three-degrees-of-freedom, in-parallel, actuated manipulator,” Journal of Robotic Systems, Vol. 11, No. 2, pp. 103-115, 1994.
[4] T. Tanikawa, T. Arai, P. Ojala and M. Saeki, “Two-finger micro hand,” Proceedings of IEEE International Conference on Robotics and Automation, Vol. 2, pp. 1674-1679, May 1995.
[5] T. Tanikawa, T. Arai and T. Masuda, “Development of micro manipulation system with two-finger micro hand,” Proceedings of the IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 96, Vol. 2, pp. 850-855, November 1996.
[6] T. Tanikawa and T. Arai, “Development of a micro-manipulation system having a two-fingered micro-hand,” IEEE Transactions on Robotics and Automation, Vol. 15, Issue 1, pp. 152-162, February 1999.
[7] P. Gao and S.M. Swei, “A six-degree-of-freedom micro-manipulator based on piezoelectric translators,” Nanotechnology 10, No. 4, pp. 447-452, 1999.
[8] J. Peirs, D. Reynaerts and H. Van Brussel, “Design of miniature parallel manipulators for integration in a self-propelling endoscope,” Sensors and Actuators A, Vol. 85, pp. 409-417, 2000.
[9] G. B. Chung, B. J. Yi, I. H. Suh, W. K. Kim and W. K. Chung, “Design and analysis of a spatial 3-DOF micromanipulator for tele-operation,” Proceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems, Vol. 1, pp. 337-342, 2001.
[10] S. Fujishima, “The history of ceramic filters,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 47, No. 1, pp. 1-7, January 2000.
[11] X. Ren, “Large electric-field-induced strain in ferroelectric crystals by point-defect-mediated reversible domain switching,” Nature Materials, Vol. 3, pp. 91-94, 2004.
[12] D. Stewart, “A platform with six degrees of freedom,” UK Institution of Mechanical Engineers Proceedings, Vol. 180, Part 1, No. 15, pp. 371-386, 1965.
[13] K. M. Lee and D. K. Shah, “Kinematic analysis of a three degrees of freedom in-parallel actuated manipulator,” Proceedings of IEEE International Conference on Robotics and Automation, Vol. 4, pp. 345-350, Mar 1987.
[14] K. M. Lee and D. K. Shah, “Kinematic analysis of a three-degrees-of-freedom in-parallel actuated manipulator,” IEEE Journal of Robotics and Automation, Vol. 4, No. 3, pp. 354-360, June 1988.
[15] Y. Ohya, T. Arai, Y. Mae, K. Inoue and T. Tanikawa, “Development of 3-DOF finger module for micro manipulation,” Proceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems, Vol. 2, pp. 894-899, October 1999.
[16] 內野研二著，許溢适編譯，“壓電�電歪致動器”，文笙書局，初版，中華民國八十五年六月。
[17] LabVIEW User Manual, National Instruments Corporation.
[18] http://www.piezo.com/history.html
[19] http://www.ceramicmaterials.rutgers.edu/firstyearintro/piezoelectric.pdf
[20] http://www.piezomechanik.com/pdfs/introduction.pdf
[21] http://www.mathworks.com/company/newsletters/digest/sept02/stewart.html