本論文目的在探討拋光法中磨粒的尺寸、刀具表面粗度對於刀具與工件磨耗的影響。主旨是在追求一套有效降低刀具磨耗，增加工件磨耗的方法。本文分成理論、實驗兩部分來探討此議題。理論的部分將先前所建立的圓球磨粒之磨耗理論，利用電腦模擬的方式將尺寸效應、刀具表面粗度效應對刀具、工件磨耗的影響作個模擬分析；此外，再建立一套磨粒為橢球狀的磨耗理論，來進一步瞭解當磨粒的形狀變為橢球對刀具、工件的磨耗效應。實驗的部分將透過改變刀具的表面粗度、磨粒的尺寸這兩方面來驗證理論的合理性與一致性。實驗中採用了氧化鋁、碳化矽兩種磨粒，尺寸分為大、小兩種，刀具的部分選擇了A、B、C三種粗度來做比較，而工件的部分選擇了脆性材料(矽晶圓、載玻片玻璃)、延性材料(銅金屬)來分別討論。電腦模擬的結果得知，隨著磨粒尺寸的增加或刀具表面粗度的增加，刀具的磨
耗會減少而工件的磨耗會增加。

實驗的結果也顯示，當刀具表面粗度變大或磨粒尺寸變大時，刀具的磨耗會減少，而工件的磨耗會增加。無論理論與實驗的結果均有呈現一致性的現象，這代表將來拋光時若要減少刀具磨耗、增加工件磨耗時，可以透過改變磨粒的尺寸、增加刀具表面的粗度即可
達到所需的目的。

The effects of abrasive particle size and tool surface roughness on tool and work wears of a polishing process were investigated. It was aimed to obtain a polishing condition that could result in a high work wear while the tool wear was low. An analytical study was first done to examine how the various operating conditions affected the wear rates of tool and work. It was done from a wear model developed by Su and Horng [1]. This model was further extended in the study to allow the wear rate analysis for an abrasive particle with ellipsoid shape. It was shown that an enhancement of abrasive particle size or tool surface roughness would increase the work wear while decrease the tool wear. Several sets of experiments were conducted to confirm the predictions of analytical study. It was shown that the experimental trends were the same as the analytical ones. Finally, the possible causes of observed phenomena and the limitations of the study were discussed.

目錄
謝誌……………………………………………………………………Ⅰ
目錄……………………………………………………………………Ⅱ
圖索引…………………………………………………………………Ⅳ
表索引…………………………………………………………………Ⅷ
中文摘要………………………………………………………………Ⅸ
英文摘要………………………………………………………………Ⅹ

第一章 緒論…………………………………………………………1
1.1 研究動機與研究方法………………………………………1
1.2 拋光法之磨耗回顧…………………………………………3
1.3 內容介紹……………………………………………………6

第二章 單一磨粒所造成的拋光磨耗理論回顧……………………7
2.1 單一磨粒之拋光磨耗理論回顧……………………………7
2.2 單一顆圓球磨粒在磨耗理論上的分析……………………16
2.3 單一顆圓球磨粒磨耗理論之電腦模擬……………………21

第三章 單一顆橢球磨粒在拋光磨耗理論上的分析………………29
3.1 單一顆橢球磨粒磨耗理論建立……………………………29
3.2 單一顆橢球磨粒拋光磨耗理論之電腦模擬………………35

第四章 實驗規劃與結果……………………………………………40
4.1 實驗目的與規劃……………………………………………40
4.2 實驗設備及量測儀器………………………………………43
4.3 實驗結果與分析……………………………………………47

第五章 拋光磨耗理論之討論………………………………………50
第六章 結論…………………………………………………………52
參考文獻………………………………………………………………54

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