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論文名稱 Title |
三環共振器之特性分析與感測應用 Analysis and Sensing Applications of Triple-Ring Resonators |
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系所名稱 Department |
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畢業學年期 Year, semester |
語文別 Language |
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學位類別 Degree |
頁數 Number of pages |
97 |
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研究生 Author |
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指導教授 Advisor |
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召集委員 Convenor |
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口試委員 Advisory Committee |
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口試日期 Date of Exam |
2011-06-29 |
繳交日期 Date of Submission |
2011-07-13 |
關鍵字 Keywords |
三環共振器、感測、絕緣層上覆矽、有限時域差分法、靈敏度 sensing, sensitivity, triple-ring resonator, FDTD, SOI |
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統計 Statistics |
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中文摘要 |
絕緣層上覆矽結構的微環型共振器在感測應用方面有體積小與高靈敏度的優點,為了獲得更深的頻譜共振波谷並擴大感測區域,同心雙環共振器因而被提出。為了更進一步提升感測區域,並提高感測之靈敏度,我們再增加一個同心內環於雙環結構內,形成三環共振器。在本論文中,我們推導出了多環結構的功率轉換方程式,並且利用三維有限時域差分法模擬三環共振器之共振特性。我們探討了環之半徑對傳輸頻譜的影響,並討論雙環與三環共振器之共振頻譜變化情形。我們也模擬了三環共振器在折射率感測上的特性,此元件對待測物折射率的靈敏度可以達到12.85 nm/RIU,證實三環共振器的確較雙環共振器可以得到更深的共振波谷與較高的感測靈敏度。而適當的擴大狹縫寬度也可以有效地增加感測區域,因而提高感測靈敏度。此外,我們也對輸入光之偏振方向與待測材料之吸光特性對共振頻譜之影響進行討論。 |
Abstract |
SOI-based micro-ring resonators can be ultra-compact and highly sensitive for sensing applications. In order to obtain deeper notches and enlarge the detection area, the concentric double-ring resonators have been proposed. To further increase the sensing area and promote the sensing sensitivity, we add one more inner ring into the double-ring structure to form the triple-ring resonator. In this thesis, we have derived the transfer functions of the multi-ring structures and calculated the resonance properties of the triple-ring resonators by using the 3-D FDTD method. We have investigated the effects of the ring radius on the transmission spectra and discussed the variations of spectral response between the double-ring and triple-ring resonators. We also demonstrate the applications of the triple-ring resonator as the refractive index sensors. The triple-ring resonator can obtain deeper dips and higher detection sensitivity of 12.85 nm/RIU. Enlarging the gap can increase the sensing area and is shown to be able to promote the sensing sensitivity. Besides, the influences of the light polarization and the optical absorption on the spectral responses have been discussed as well. |
目次 Table of Contents |
1 Introduction 1 1.1 Optical Waveguides ……………………………………………………1 1.2 Micro-Ring Resonators ………………………………………………2 1.3 Motivation …………………………………………………………………3 1.4 Chapter Outline …………………………………………………………4 2 Numerical Methods 12 2.1 Overview …………………………………………………………………12 2.2 Finite-Difference Time-Domain Method ………………………………12 3 Theory of Ring Resonators 19 3.1 Overview …………………………………………………………………19 3.2 Sensing Principles ………………………………………………………19 3.3 Theory of Light Coupling ………………………………………………21 3.3.1 Single-ring Resonator ………………………………………………21 3.3.2 Double-ring Resonator ………………………………………………25 4 Resonance Properties of Triple-Ring Resonators 37 4.1 Overview …………………………………………………………………37 4.2 Device Layout ……………………………………………………………37 4.3 Resonance Properties …………………………………………………38 4.4 Effects of Inner-Ring Radius ………………………………………39 5 Sensing Applications of Triple-Ring Resonators 51 5.1 Overview ……………………………………………………………51 5.2 Effects of Gap Index ………………………………………………………51 5.3 Enlargement of Sensing Area …………………………………………54 5.4 Polarizations of Light …………………………………………………54 5.5 Optical Absorption ………………………………………………………56 6 Conclusions 68 Bibliography 70 |
參考文獻 References |
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