單超導理論於1957年發表，三態超導的概念即於次年提出。由於三態超導為無損耗的自旋電子流，對於自旋電子學的發展極為重要。至目前為止，三態超導只在低溫超導/鐵磁異質結構系統中發現，而且自2010年後即沒有新的發現。為了要研究三態超導於高溫超導/鐵磁系統中的可能性，本論文主要研究La0.67Sr0.33MnO3 / YBa2Cu3O7-δ/SrTiO3多層薄膜之最佳條件及其物理特性。
本研究以雷射濺鍍法於STO(00l)基板上成長單層YBCO薄膜、雙層LSMO/YBCO薄膜及多層[LSMO/YBCO]n薄膜。單層YBCO薄膜成長條件以改變成長溫度、成長氣壓及不同雷射脈沖數，而維持雷射脈沖頻率為5Hz。雙層LSMO/YBCO薄膜則以改變氣壓為主。最後多層LSMO/YBCO薄膜則固定YBCO厚度但改變LSMO厚度。薄膜物性量測上則有電阻-溫度 (R-T)、電流-電壓 (I-V)曲線量測、X-光繞射 (XRD) 分析薄膜晶體結構、原子力顯微鏡 (AFM) 觀察薄膜表面型貌、最後以穿透式電子顯微鏡 (TEM) 觀察微結構及成份。
研究發現最佳單層YBCO薄膜成長條件為830°C成長、純氧氣壓為200 mTorr共濺鍍6000發雷射脈沖。雙層及多層LSMO/YBCO薄膜均在最佳成長氣壓200mTorr成長。多層膜的最佳的表面平均平整度(RMS)為0.80 ± 0.07 nm(不計入表面出現的顆粒)，而d005=2.3388 Å與理想結構誤差極小(0.017%)，具有超導轉換啟始溫度90K及零電阻溫度87K，而LSMO電阻轉換溫度則高達353K。電性上，初步的Ic-H量測顯示Ic隨外加磁場而減少。以上數據顯示吾人已成功於STO(00l)基板上成長出高品質異質多層LSMO/YBCO薄膜。至於是否有三態超導存在於本多層薄膜樣品，有待未來更進一步研究，詳細量測XMCD及臨界電流與外磁場的關係。

Triplet superconductivity was proposed in 1958, two years after the discovery of BCS theory and became significant in the modern years for it is possible for new applications such as the nondissipational spintronic. However, triplet superconductivity was realized only for low-Tc-superconductor/ferromagnet heterojunction, and no further development since 2010, when the last experiment was conducted. To explore the possibility of triplet superconducting state in high-Tc-superconductor/ferromagnet system, this research aims to develop and study the physical properties of La0.67Sr0.33MnO3 / YBa2Cu3O7-δ multi-layer film grown on SrTiO3 (001) substrate. Pulsed laser deposition (PLD) was the deposition method used to grow YBCO single layer film, LSMO/YBCO double-layer, and LSMO/YBCO multi-layer film on STO (001). YBCO single layer film was grown for varying growing temperature, varying growing pressure, and varying number of laser pulses for a laser frequency of 5 Hz. LSMO/YBCO double-layer film was grown for varying growing pressure. LSMO/YBCO multi-layer film was grown for varying number of pulses used to grow the LSMO film for a laser frequency of 5 Hz. In order to study the physical properties of the film, Resistance-Temperature (R-T) and Current-Voltage (I-V) measurements, X-Ray Diffraction (XRD), Atomic Force Microscopy (AFM), Transmission Electron Microscopy (TEM) were carried out. For the growth of the YBCO single layer film, the optimum growing conditions were found to be 830°C, 200 mTorr, and 6000 pulses. For the growth of LSMO/YBCO double-layer film, the optimum growing pressure was 200 mTorr. For the growth of LSMO/YBCO multi-layer film, the film obtained a root mean square (RMS) as low as 0.80 ± 0.07 nm, a d005 spacing of 2.3388 Å with the lowest percent error of 0.0170%, a critical temperature (Tc) of the YBCO as high as 87 K with an onset at 90 K, and a transition temperature (TP) of the LSMO as high as 353 K. Moreover, our preliminary Ic-H measurements show that Ic decreases with stronger applied magnetic field. Whether or not these results indicate the existence of triplet superconducting state, no conclusion at the present state and further studies are needed. At least, these obtained data shows that the LSMO/YBCO multi-layer film was grown successfully on the STO (001) substrate. Our future plan is to conduct X-Ray Magnetic Circular Dichroism (XMCD) measurements to determine the magnetic properties between the interfaces of the heterostructure, and test the triplet superconducting properties of the material.

Thesis Evaluation i
Acknowledgements ii
Abstract (Chinese) iii
Abstract (English) iv
Table of Contents vi
Figures ix
Tables xv
Chapter 1: Introduction 1
1-1: Introduction to Superconductivity 1
1-2: Objectives of the Study 3
Chapter 2: Review of Related Literature 4
2-1: Magnetism 4
2-1-1: Diamagnetism 5
2-1-2: Paramagnetism 5
2-1-3: Ferromagnetism 7
2-1-4: Anti-ferromagnetism 7
2-1-5: Ferrimagnetism 9
2-2: Meissner Effect 9
2-3: Type I and Type II Superconductors 10
2-4: Triplet Superconductivity 11
2-4-1: BCS Theory 11
2-4-2: Spin-singlet and Spin-triplet States 13
2-4-3: Proximity Effect 14
2-5: YBa2Cu3O7-δ as a High-Tc Superconductor 17
2-6: La1-xSrxMnO3 as a Ferromagnetic Material 19
Chapter 3: Methodology 21
3-1: Cleaning of Substrate (SrTiO3) 21
3-2: Pulsed Laser Deposition 23
3-2-1: Laser System 23
3-2-2: Preparing the Substrate 25
3-2-3: Growing YBCO Single Layer on STO (001) 26
3-2-4: Growing LSMO/YBCO Double-layer on STO (001) 26
3-2-5: Growing LSMO/YBCO Multi-layer on STO (001) 27
3-3: Characterization of the Film 27
3-3-1: R-T and I-V Measurements 28
3-3-2: X-Ray Diffraction (XRD) 29
3-3-3: Atomic Force Microscopy (AFM) 31
3-3-4: Transmission Electron Microscopy (TEM) 32
Chapter 4: Results and Discussion 34
4-1: YBCO Single Layer 34
4-1-1: YBCO Single Layer (AFM Surface Morphology) 34
4-1-2: YBCO Single Layer (R-T Measurements) 35
4-1-3: YBCO Single Layer (XRD Measurements) 36
4-2: LSMO/YBCO Double-layer 38
4-2-1: LSMO/YBCO Double-layer (TEM Analysis) 38
4-2-2: LSMO/YBCO Double-layer (XRD Measurements) 42
4-2-3: LSMO/YBCO Double-layer (R-T Measurements) 43
4-3: LSMO/YBCO Multi-layer 44
4-3-1: LSMO/YBCO Multi-layer (AFM Morphologies) 45
4-3-2: LSMO/YBCO Multi-layer (XRD Measurements) 46
4-3-3: LSMO/YBCO Multi-layer (R-T Measurements) 48
4-3-4: LSMO/YBCO Multi-layer (I-V Measurements) 50
Chapter 5: Summary and Conclusion 54
References 56
Appendix 71
A. YBCO Singe Layer 71
B. LSMO/YBCO Double-layer 77
C. LSMO/YBCO Multi-layer 79
D. Scanning Electron Microscopy 80
E. JCPDS Database for X-Ray Diffraction 82

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[81] Department of Materials and Optoelectronic Science, National Sun Yat-Sen University
Field Emission Transmission Electron Microscope Laboratory
[Online] Available: http://e15.nsysu.edu.tw/files/11-1092-15015.php?Lang=zh-tw
[82] International Research Building, National Sun Yat-sen University
Field emission scanning electron microscope
[Online] Available: http://www.nano.nsysu.edu.tw/khvic/JL/JSM-6700F.htm