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博碩士論文 etd-0714100-143738 詳細資訊
Title page for etd-0714100-143738
論文名稱
Title
半導體製程之濕洗檯氣流場與污染物擴散 之改善評估
Evaluation and Modification of Airflow Pattern and Contaminant Diffusion in Semiconductor Wet Bench
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
91
研究生
Author
指導教授
Advisor
召集委員
Convenor

口試委員
Advisory Committee
口試日期
Date of Exam
2000-06-30
繳交日期
Date of Submission
2000-07-14
關鍵字
Keywords
濕洗檯、空氣簾、導流板、衝孔網板
Guide-vane, Air curtain, Wet bench, Perforate plate
統計
Statistics
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中文摘要
中文摘要
製程與設備是半導製造技術的一體兩面,有製程而沒
有設備技術,將會阻礙未來技術的提升,針對近幾年興起
的半導體工業,潔淨室已是其不可或缺的重要設施,隨著
半導體集積度的增加,潔淨室在半導體的製程中須要高標
準的控制,如潔淨度、溫度、濕度等。晶圓表面清洗是半
導製程中重覆次數最多的步驟,因此濕洗檯在半導體製程
中扮演著非常重要的角色,由於半導體的細小型化,晶圓
表面清洗技術的提昇也相形重要,一般晶圓表面是以有毒
的危險性溶液來清洗,例如氨水、硫酸等,而這些溶劑所
蒸發的氣體是絕對不允許進入潔淨室;然而濕洗檯大量的
排氣會引入潔淨室的氣流對晶圓造成污染,這兩個目的是
互相衝突,目前的解決方法是藉由降低濕洗檯與潔淨室間
的壓力差來避免引入潔淨室的氣流。在本篇論文中提出一
新的概念,利用空氣簾產生一空氣簾於製程區與潔淨室
間,藉由空氣簾隔離化學污染物與潔淨室氣流的擴散。本
研究主要利用數值模擬分析並透過實驗的印證找出最佳的
運轉操作條件與幾何設計。
本研究之內容主要可分為三部份,第一部份是將導板
加置於生化安全櫃上,並建立實驗數據用來驗証數值模擬
的準確性。第二部份是在絕熱的條件下,最佳運轉參數與
導板尺寸的研究,運轉參數包含抽氣壓力,導板角度及長
度,入口風速大小等…。本研究探討傳統單槽式濕洗檯的
氣流特性,根據數值模擬的結果分析導板所形成的空氣簾
阻隔污染物的可行性,並研究各種不同運轉參數條件下的
化學污染物濃度。由研究的結果顯示空氣簾有能力將濕洗
檯製程區與潔淨室隔離。第三部份研究溫度效應對氨蒸汽
擴散的影響與下吹氣流對熱煙氣的影響。本研究所提出利
用導板與衝孔網板所形成之空氣簾確實可發揮隔離不同污
染物之效用,因此本研究所提之創新設計實際應用之可行
性非常的高,可提供給設備製造商與使用者一個新的參考
方向。
Abstract
英文摘要
In the wet wafer cleaning process, the wafer
surfaces are washed with toxic solutions such as
ammonia and sulfuric acid which was not to allow
to enter the surroundings i.e. clean room.
Therefore, common practice is to reduce the
pressure differential between the wet bench and
the surroundings to a very low pressure
difference level while maintaining a high exhaust
flow rate for toxic fumes. In such a case, the
isolation of process area from the surrounding
area may be compromised i.e. there is a danger
that the surrounding air was suctioned to the
process area. Conceptually, this dilemma can be
solved by creating an air buffer between the
wafer process area and the surrounding area. This
study aims to determine/prove-in the optimal
operational conditions and geometries of such
design by both CFD analysis and experimental
verification.
This thesis includes three parts. First, the
detailed experimental data to a bio-clean bench
installed with the guide-vane design are
conducted. The data are then used to verify the
feasibility/accuracy of the CFD model.
Second, the optimal operational conditions
and geometries of a full-scale isothermal wet
bench with the guide-vane design are determined
by CFD simulation that takes most influential
factors into account. These influential factors
include exhaust pressures, length of the guide-
vane, guide-vane angle and downward face velocity
of the filter etc. The results show that the air
curtain created by the guide-vane is able to
isolate the process area from surrounding area,
and vise-versa.
Third, the thermal effect of ammonia solution
on the distribution of ammonia vapor are
examined. The shape of the thermal plume that
encounters the downward air stream of the filter
is discussed intensively.
In general, this thesis provides significant
information in improving the isolation effect of
wet benches by the air-curtain design.
目次 Table of Contents
目錄
中文摘要....................................I
英文摘要....................................II
目錄........................................III
表目錄......................................V
圖目錄......................................VI
符號說明....................................IX
第一章 緒論.................................1
1.1 研究背景與動機..........................1
1.2文獻回顧.................................3
1.3 研究內容................................5
第二章 理論模式.............................6
2.1 物理模型................................6
2.2 基本假設................................9
2.3 統御方程式..............................9
2.4 紊流模式................................12
2.5 牆函數概述..............................13
2.6 邊界條件................................14
第三章 數值模擬方法.........................15
3.1 數值模擬軟體簡介........................15
3.2 SIMPLE演算法則..........................16
3.3 上風差分法..............................18
3.4 鬆弛因子與(DISCRETIZATION)............20
3.5 收斂條件................................21
3.6 數值方法之驗證..........................21
第四章 實驗與數值模擬結果比較分析...........23
4.1實驗儀器簡介.............................23
4.1.1實驗儀器...............................23
4.1.2實驗不確定性分析.......................26
4.2氣流速度比較分析.........................28
4.3 誤差來源................................32
第五章 數值模擬結果與分析...................33
5.1 傳統單槽式濕洗檯之特性與模擬分析........33
5.1.1 研究主題..............................33
5.1.2 邊界條件設定..........................33
5.1.3 結果與討論............................35
5.2 單槽式創新設計之模擬分析................51
5.2.1研究主題...............................51
5.2.2研究方法...............................52
5.2.3 邊界條件設定..........................53
5.2.4 結果與討論............................55
5.2.5結論...................................60
5.3 溫度與下吹氣流對氨蒸汽之影響............79
5.3.1 溫度對氨蒸汽之影響....................79
5.3.2 抽氣壓力與入口風速對熱煙氣之影響......80
5.4 運轉參數之選擇..........................85
第六章 結論與建議...........................87
6.1結論.....................................87
6.2建議.....................................88
參考文獻....................................89

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