本論文目的在探討磨粒和工件間的吸附效應對於拋光刀具磨耗之影響。為了解吸附效應在刀具磨耗和工件加工率上所造成的影響，將藉由規劃實驗與理論分析的方式探討此問題。在實驗中，將設計好幾組實驗進行測試。設計的方式是藉由改變磨粒種類和工件材料等加工條件，觀察介面間吸附強度的差異造成不同程度上刀具的磨耗。實驗結果顯示，刀具磨耗的行為是跟磨粒與工件間的吸附強度有關，任何吸附強度的改變都會明顯的影響刀具磨耗。藉由理論分析得知，磨粒與刀具和磨粒與工件間的吸附強度在刀具磨耗和工件加工率上扮演著重要的角色。從電腦模擬得知，隨著磨粒和工件間吸附強度的增加，刀具的磨耗也會隨之提高，但是工件加工率卻可能呈現增加或減少的趨勢。最後，藉由實驗的結果驗證理論的合理性，並且討論兩者間的異同。從研究中發現，如果適當的改變磨粒和工件間的吸附強度，將會降低刀具的磨耗。

The adhesive effects between abrasive particle and work on tool wear of the polishing process were considered in the study. Adhesive strength of the interfaces may affect wear rates of tool on the different adhesive way. Several sets of experiments were designed to reveal some phenomena about the wear rates of tool and work. There are variations in the adhesive of the interface causing different degree of tool wear for distinct kind of abrasive particle、work and tool’s material. The experimental study demonstrated that the wear rate of tool was related to the adhesive strength between abrasive particle and work. Any change of the adhesive strength may significantly alter the wear rate of tool. An analytical study was done to examine the role played by the adhesive strength at the interfaces of abrasive particle on the wear rates of tool and work. It was derived from the law of force equilibrium and the principle of minimum potential energy. Tool wear was affected for polishing process by altering adhesive strength. The computer simulations indicated that an enhancement of adhesion between abrasive particle and work would always increase the wear rate at tool while the wear rate of work could be increased or decreased. To prove analytical study was reasonable by experimental study. Finally,the possible causes of observed phenomena and the limitations of the study were discussed.

目錄

謝誌………………………………………………………………….....i
目錄…………………………………………………………………....ii
圖索引………………………………………………………………....v
表索引………………………………………………………………...ix
中文摘要……………………………………………………………....x
英文摘要……………………………………………………………...xi

第一章 緒論………………………………………………………..1
1.1 前言………………………………………………………..1
1.2 液動壓拋光法簡介………………………………………..2
1.3 拋光刀具摩耗的現象……………………………………..3
1.4 一般加工磨耗機制……………………………………....4
1.5 拋光刀具摩耗機制………………………………………..5
1.6 研究動機與目的…………………………………………..7
1.7 文獻回顧…………………………………………………..8
1.8 內容介紹…………………………………………………..9

第二章 拋光加工法之文獻回顧……………………………………10
2.1 拋光法的簡介………………………………………………10
2.1.1 傳統拋光加工法……………………………………........10
2.1.2 超精密拋光加工法的特性…………………………........11
2.1.3 拋光過程影響因素…………………………………........11
2.1.4 機械影響因素………………………………………........12
2.1.5 化學影響因素………………………………………........12
2.1.6 拋光加工法的分類…………………………………........13
2.2 化學拋光法……………………………………………....14
2.2.1 化學拋光法之原理…………………………………........14
2.2.2 化學拋光法之應用…………………………………........14
2.3 機械化學拋光法……………………………………………15
2.3.1 機械化學拋光法之原理……………………………....15
2.3.2 機械化學拋光法之特色……………………………....16
2.3.3 機械化學拋光法之文獻回顧………………………....16
2.4 化學機械拋光法………………………………………....17
2.4.1 化學機械拋光法之原理……………………………....17
2.4.2 化學機械拋光法之特色……………………………....18
2.4.3 化學機械拋光法之文獻回顧………………………....18
2.5 電化學拋光法………………………………………………19
2.5.1 電化學拋光法之原理………………………………....20
2.5.2 電化學拋光法之特色……………………..………....21
2.5.3 電化學拋光法之文獻回顧…………………………....22
2.6 結論…………………………………………………………22

第三章 液動壓拋光法加工特性之回顧……………………………24
3.1 非接觸潤滑條件加工率特性………………………………24
3.2 半接觸潤滑條件加工率特性………………………………27
3.3 不同潤滑條件刀具摩耗特性………………………………30
3.4 結論…………………………………………………………31

第四章 液動壓拋光法刀具摩耗之實驗分析與結果………………32
4.1 實驗規劃……………………………………………………32
4.2 實驗系統儀器簡介…………………………………………35
4.2.1 實驗系統簡介………………………………………....35
4.2.2 實驗設備及量測儀器………………………………....36
4.3 實驗結果……………………………………………………38
4.4 結論…………………………………………………………41

第五章 拋光法移除率與吸附效應模式之建立與特性分析………43
5.1 單一磨粒磨耗率理論分析…………………………………43
5.2 磨粒尺寸對於表面材料移除機制之探討..………………51
5.3 單一磨粒磨耗率特性分析…………………………………53
5.3.1 改變磨粒與工件間吸附能對材料移除行為的影響........55
5.3.2 改變磨粒與刀具間吸附能對材料移除行為的影響57
5.3.3 磨粒尺寸效應對於能量傳遞比值的影響…………........59
5.4 結論…………………………………………………………60

第六章 吸附效應對於拋光刀具摩耗模式之特性分析……………62
6.1 理論分析與實驗結果之討論………………………………62
6.1.1 實驗趨勢與理論呈現一致性之探討……………..62
6.1.2 理論探討不足之處…………………………………65
6.2 結論…………………………………………………………68

第七章 結論…………………………………………………………70
參考文獻……………………………………………………………….72

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