Fabry–Pérot光纖干涉儀具備結構緊湊、高解析度以及可進行探針式感測等優點，因此被廣泛地應用在許多領域上，而開放式共振腔的類型更具備了極高的折射率靈敏度，適合應用於感測折射率的微小變化。過去有研究團隊利用飛秒雷射微製程或使用特殊光纖配合化學蝕刻方法來製作開放式共振腔，然而飛秒雷射價格昂貴，而特殊光纖取得困難，因而導致製作成本過高。本論文改用成本相對低廉的空芯光纖來製作元件，透過簡單的切割與熔接方法使空芯光纖串接在兩段單模光纖之間，形成封閉式Fabry–Pérot光纖干涉儀，再利過化學蝕刻方法製作開孔，達到共振腔與外界相通的目的。
我們利用製作完成的元件進行折射率、溫度、氣壓等環境參數感測，在折射率範圍1.3330~1.3418，其折射率靈敏度約為1209.92nm/RIU。而在溫度範圍30℃~80℃，測得溫度靈敏度為15.46pm/℃，並可得到環境溫度對於量測折射率所造成的誤差值約為1.25×10-5RIU/℃。另外，在氣壓量測範圍0psi~100psi，其氣壓靈敏度為29.45pm/psi，相較於其他純光纖製作的氣壓感測器，我們所製作的開放式共振腔Fabry–Pérot光纖感測器具有極高的氣壓靈敏度。

Fiber-optic Fabry–Pérot interferometers (FPIs) have several advantages such as compact size, high resolution, and the ability of probe sensing, making them widely applied in many fields. In addition, due to their highly sensitivities, FPIs with open cavities have high potential in applications of refractive index (RI) sensing. In previous studies, an open cavity along a single-mode fiber (SMF) can be made by using femtosecond lasers or etching a particular fiber to form an open cavity for sensing. However, the femtosecond lasers are expensive, and particular fibers are difficult to be obtained, which often results in high cost. In this thesis, we employed chemical etching to create an open-cavity FPI sensor in a hollow-core fiber sandwiched between two SMFs, which is more inexpensive than the above mentioned sensors.
We apply the fabricated FPI sensor to perform the RI, thermal, and pressure sensing.
The RI sensitivity of the FPI is 1209.92 nm/RIU as the RI ranged from 1.3330 to 1.3418. The temperature sensitivity of the FPI is only 15.46 pm/℃ between 30 ℃~80 ℃, and the measurement error of RI is calculated to be 1.25×10-5 RIU/℃ by temperature influences. In addition, we have also measured the pressure response of the FPI sensor, and the sensitivity is 29.45 pm/psi as the pressure is from 0 psi to 100 psi. Compared with other all-fiber pressure sensors, our fabricated open-cavity FPI sensor has an ultra-high pressure sensitivity.

誌 謝 i
摘 要 ii
Abstract iii
目 錄 iv
圖目錄 vi
表目錄 ix
第一章 緒論 1
1-1 光纖感測器 1
1-2 光纖干涉儀感測器 3
1-2.1 法布立-培若光纖干涉儀(Fabry–Pérot fiber interferometer) 5
1-2.2 邁克森光纖干涉儀(Michelson fiber interferometer) 8
1-2.3 馬赫-任德光纖干涉儀(Mach–Zehnder fiber interferometer) 9
1-2.4 薩格奈克光纖干涉儀(Sagnac fiber interferometer) 12
1-3 研究動機 14
第二章 Fabry–Pérot光纖干涉儀 15
2-1 Fabry–Pérot干涉儀的原理 15
2-2 Fabry–Pérot光纖干涉儀的原理 24
第三章 開放式共振腔Fabry–Pérot光纖干涉儀之元件製作方法 28
3-1 元件設計 28
3-2 元件製作方法 31
3-3 元件蝕刻特性 36
第四章 開放式共振腔Fabry–Pérot光纖干涉儀的干涉特性 38
4-1 元件量測架設 38
4-2 不同元件尺寸之干涉特性量測 41
4-3 元件蝕刻之量測結果與討論 44
第五章 開放式共振腔Fabry–Pérot光纖干涉儀的感測應用 48
5-1 折射率感測 48
5-2 溫度感測 52
5-3 氣壓感測 56
第六章 結論 62
參考文獻 63

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