表面雙穩態鐵電液晶器件具有快速應答時間、雙穩態特性，且驅動方式為In Plane Switching(IPS)而具備了廣視角的特性。但由於表面雙穩態鐵電液晶器件為一薄型器件，其液晶盒厚度均勻性控制困難，且表面穩定鐵電液晶在配向時容易產生zigzag缺陷。
在本研究中主要利用SU-8光阻劑以光蝕刻技術製作光刻型間隔物(Photospacer)，並將其厚度控制在1.08μm。藉由Photospacer的製作，我們可以得到厚度相當均勻的液晶盒樣品，並有效改善薄型器件液晶盒厚度不均的問題。
實驗中也探討不同液晶灌注方向下，配向膜表面特性與Photospacer對於表面穩定鐵電液晶配向的影響。我們發現在鐵電液晶灌注方向採用逆摩擦方向灌注時，表面穩定鐵電液晶配向較容易受Photospacer影響而產生缺陷。此外摩擦三次的配向膜表面在順、逆摩擦方向的浸潤特性相當，且鐵電液晶灌注方向採用順摩擦方向灌注，可使表面穩定鐵電液晶具有較佳的配向效果。

Surface stabilized ferroelectric liquid crystal device (SSFLCD) has fast response time and exhibits excellent bistability. The SSFLCD has wide view angle because it operates in the in plane switching (IPS) mode. However, SSFLCD is a thin device, the uniform of its cell gap is difficult to control. When surface stabilized ferroelectric liquid crystal align, it is easy to bring in zigzag defect.
In this study, the use of SU-8 photoresist to make photospacer by using photolithographic technique is studied. We control the thickness of photospacer at 1.08μm. By using photospacer, we can get the cell with uniform cell gap.
The influence of the property of the alignment layer and photospacer on surface stabilized ferroelectric liquid crystal alignment are discussed. We find that when the liquid crystal is injected anti-parallel to the rubbing direction, the alignment of Surface stabilized ferroelectric liquid crystal is easily influenced by photospacers. Wetting characteristics of the substrates is found to strongly affect the alignment of the ferroelectric liquid crystal.

中文摘要 Ⅰ
英文摘要 Ⅱ
致謝 Ⅲ
目錄 Ⅳ
圖目錄 Ⅶ
表目錄 Ⅹ
第一章 緒論 1
第二章 基本理論介紹 3
2-1 液晶簡介 3
2-2 表面穩定鐵電液晶器件 6
2-2-1 Chevron層狀結構 8
2-2-2 Zigzag缺陷 10
2-2-3 Monodomain鐵電液晶器件 11
2-3 間隔物(Spacer) 12
2-3-1 傳統間隔物(Spacer)特性 12
2-3-2 光刻型間隔物(Photospacer)特性 13
2-4 接觸角 16
2-4-1 接觸角延遲量 17
2-4-2 表面自由能 17
2-5 液晶盒厚度量測原理 20
2-6 預傾角量測原理 21
第三章 實驗方法與儀器 25
3-1 材料介紹 25
3-2 液晶樣品製作及量測流程 27
3-3 光蝕刻設備 36
3-4 接觸角量測系統 39
3-4-1 動態接觸角量測 40
3-4-2 靜態接觸角量測 42
3-5 液晶盒厚度量測系統 43
3-6 預傾角量測系統 45
第四章 配向膜表面特性分析 47
4-1 表面粗糙度 47
4-2 動態接觸角 50
4-3 靜態接觸角 54
4-4 預傾角 60
第五章 Photospacer 特性分析 61
5-1 Photospacer 均勻性及表面粗糙特性 61
5-2 Photospacer 密度對配向膜表面特性的影響 63
第六章 鐵電液晶配向分析 64
6-1 Photospacer 對鐵電液晶配向之影響 64
6-2 配向膜表面特性對鐵電液晶配向的影響 68
第七章 結論 71
參考文獻 73
附錄 76

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