蔬果農藥殘留為近年來不斷發生的食安問題之一，過量的殘留農藥經食用而累積於人體內，容易造成神經系統疾病而危害人體健康。在消費者食用蔬果前，若能快速檢測蔬果上之農藥殘留量是否符合國家法規所訂定的最大殘留量，將可大幅減少食安問題。然而目前農藥殘留檢測技術是以氣相層析法與液相層析儀法為主，雖具有高精準度，但此類檢測儀器由於體積龐大、價格昂貴以及檢測時間冗長等缺點，不利於民眾於食用蔬果前及時檢測。因此本論文致力於開發可快速檢測有機磷及胺基甲酸鹽之微型農藥感測器，以改善上述缺點。
本論文以微機電系統技術製作延伸式閘極場效電晶體，並使用交聯法將乙醯膽鹼酯酶固定於延伸閘極上，利用有機磷對乙醯膽鹼酯酶活性抑制之原理進行有機磷之農藥檢測；而胺基甲酸鹽之農藥檢測則選用銠金雙金屬奈米粒子作為其感測薄膜，因銠金雙金屬奈米粒子對胺基甲酸鹽具有高度專一性。本論文主要製程步驟包括四道黃光微影及四次薄膜沉積製程以製作出延伸式閘極場效電晶體，另外利用兩道黃光微影及兩次沉積薄膜完成封裝晶片之製作。最後，本論文將探討有機磷與胺基甲酸鹽感測薄膜之感測特性。
本論文所開發出微型農藥感測器尺寸為12 mm × 10 mm × 0.5 mm，延伸閘極感測面積為0.8 mm" × 0.8 mm。" 根據量測結果顯示，於0.001 ppm ~ 10 ppm濃度量測範圍下，有機磷(甲基巴拉松)感測靈敏度為37.5 mV/dec、線性度為0.985及反應時間為300秒；胺基甲酸鹽(加保利)感測靈敏度為68.0 mV/dec、線性度為0.982及反應時間為120秒。由上述量測結果顯示，本論文所開發之有機磷與胺基甲酸鹽微型農藥感測器具有體積小、感測靈敏度高、線性度高及反應時間快之優點，未來可應用於蔬果農藥殘留快速檢測。

In recent years, the food safety issues have been continuously to occur in the world, such as pesticide residues. The accumulation of pesticide residue in human body via fruits and vegetable’s consumption is likely to cause nervous system disorders, and affect human health. However, if it is possible to develop rapid methods for checking the pesticide residues on fruits and vegetables to be within the maximum residue’s levels of national regulations, prior to consumers eat fruits and vegetables, that can significantly reduce the problem of food security. Presently, the most common pesticide detection techniques are gas chromatograph and liquid chromatograph. Their disadvantages of huge size, high fabrication cost, long detection time and without real-time monitoring function are not conducive to rapid detection. To improve these disadvantages, this thesis aim to develop a rapid EGFET-based pesticides microsensor for organophosphorus and carbamate Detection.
In this thesis, an extended-gate field-transistor (EGFET) is developed utilizing micro-electromechanical system (MEMS) technology. Acetylcholinesterase enzyme (AChE) is immobilized by cross-linking method on the extended gate electrode of the EGFET for organophosphorus detection. AuRh bimetallic nanocrystals are selected as the ion selective membrane for carbamate detection because of their ultra-specific responses toward carbamate pesticides. The main processing steps of the EGFET device in this study involve four photolithographic and four thin-film deposition processes, as well as two photolithographic and two thin-film deposition processes to fabricate the packaging chip.
The size of the proposed EGFET-based pesticides microsensor is 12 mm × 10 mm × 0.5 mm and the sensing area is 0.8 mm × 0.8 mm. Based on the measurement results of the pesticides microsensors, the sensitivity, sensing linearity and response time of the organophosphorus microsensor are 37.5 mV/dec, 0.985 and 300 sec, respectively, as the sensing pesticides concentration varies from 0.001 ppm to 10 ppm. At the same situations, the carbamate (68.0 mV/dec, 0.982 and 120 sec) were also presented in this paper.

論文授權書 i
誌謝 ii
摘 要 iii
Abstract iv
目錄 vi
圖目錄 ix
表目錄 xi

第一章 緒論 1
1.1 研究動機 1
1.2 文獻回顧 3
1.2.1 光學式農藥感測器 4
1.2.2 壓電式農藥感測 4
1.2.3 離子選擇電極 5
1.2.4 離子感測場效電晶體 5
1.2.5 延伸式閘極感測場效電晶體 7
1.3 實驗方法與論文架構 8

第二章 微型農藥感測器之原理與介紹 10
2.1 延伸式閘極場效電晶體原理介紹 10
2.1.1 能斯特方程式 10
2.1.2 吸附鍵結模型 11
2.1.3 延伸式閘極場效電晶體工作原理 12
2.2 有機磷感測機制 14
2.2.1 乙醯膽鹼與乙醯膽鹼酯酶簡介 14
2.2.2 有機磷介紹 15
2.2.3 有機磷感測機制 15
2.3 胺基甲酸鹽感測機制 17
2.3.1 胺基甲酸鹽介紹 17
2.3.2 胺基甲酸鹽感測機制 17

第三章 微型農藥感測器之設計與製作 19
3.1 延伸式閘極感測場效電晶體元件 19
3.1.1 延伸式閘極感測場效電晶體結構與光罩布局設計 19
3.1.2 微型感測器封裝晶片光罩布局設計 22
3.2 微型農藥感測器之設計與製程整合 22
3.2.1 延伸式閘極場效電晶體之製作 23
3.2.2 封裝晶片之製作 29
3.2.3 延伸式閘極場效電晶體與封裝晶片上蓋之封裝整合 33
3.3 有機磷感測薄膜製配 34
3.3.1 實驗藥品及材料 34
3.3.2 感測薄膜調配 35
3.4 胺基甲酸鹽感測薄膜製配 35
3.4.1 實驗藥品及材料 35
3.4.2 感測薄膜調配 36

第四章 實驗結果與討論 38
4.1 延伸式閘極場效電晶體特性量測與分析 39
4.2 微型農藥感測器之特性量測與分析 41
4.2.1 有機磷感測靈敏度及線性度分析 42
4.2.2 胺基甲酸鹽感測靈敏度及線性度分析 44
4.3 傳統與微型農藥感測器之比較 47

第五章 結論與未來展望 48
5.1 結論 48
5.2 未來展望 49

參考文獻 51

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