本實驗主要探討Zr-Al-Si系三元合金800 ℃平衡相圖，其探討這系統的主要動機是現有的文獻資料中，有關這系統的平衡相圖相關資料文獻不多而有待開發，且文獻中多半使用Zr與Al-Si共晶合金或其重要關鍵點的三元擴散偶的研究，均質化熱處理的時效時間僅僅是2至24小時，相較於打點分析熱處理的時間360至720小時有著顯著的差異，其擴散偶合金相的平衡與元素擴散是否均勻，可從本實驗與文獻中的相圖對照比對，得知其結果，又因為文獻中只取Al-Si共晶合金做不同溫度的擴散偶，使其單一溫度三元平衡相圖中，大部分角落部份缺少相的平衡的結果。所以本實驗採用打點分析，先用文獻中的相圖為參考標準，先選出十一個點，等實驗結果出來後，再更進一步做其他點的相作確認。
因此本實驗以純Zr、Al、Si配製選定的合金成分，利用真空熔煉（Arc Melting）的方式均勻混合合金，然後將合金試片放置在高溫管狀爐800 ℃中進行維持兩週的均質化（Homogenization）熱處理，使合金試片達到相平衡。然後將熱處理後的金屬作金相前處理，包括鑲埋、研磨與拋光。再分別進行合金試片的SEM分析以及EPMA分析各相的成分與DTA熱分析後的結果，最後根據以上所有量測結果，進而完成建立起Zr-Al-Si系三元合金800 ℃相圖，希望藉由這些平衡相圖的輪廓和熱分析實驗結果，將來當做提供尋找Zr-Al-Si系三元合金成份或相關系四元或五元合金成份的參考資料。
在研究Zr-Al-Si系三元合金800 ℃平衡相圖中，研究發現在Zr-Si二元系合金系統中，有三的介金屬平衡相Zr3Si2、ZrSi以及ZrSi2的存在；研究發現在Al-Zr二元系合金系統中，有六個介金屬平衡相AlZr3、AlZr2、Al3Zr4、Al3Zr2、Al2Zr與Al3Zr的存在；且研究相圖中總共有十四個三相區和十五個兩相區的生成。研究更發現，除了文獻中所提到的三個三元化合物外，還在組成成分65 at％ Zr附近，發現了第四個三元化合物

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摘要····························································································································· i
總目錄······················································································································ iii
表目錄······················································································································ vi
圖目錄···················································································································· viii
壹、前言················································································································· 1
貳、研究動機與文獻回顧······················································································ 3
2.1 Zr-Al-Si 合金相圖的應用······································································ 3
2.1.1 應用於非晶質合金···································································· 3
2.1.2 應用於耐熱合金方面································································ 4
2.1.3 應用於奈米孔洞材料································································ 5
2.1.4 結論···························································································· 6
2.2 平衡相圖································································································· 6
2.3 二元系合金平衡相圖············································································· 7
2.3.1 Zr-Al 二元系合金平衡相圖······················································· 7
2.3.2 Zr-Si 二元系合金平衡相圖······················································· 8
2.3.3 Si-Al 二元系合金平衡相圖······················································· 9
2.4 Zr-Al-Si 三元系統平衡相圖·································································· 9
參、研究方法與步驟···························································································· 12
3.1 研究方法······························································································· 12
3.2 實驗步驟······························································································· 12
3.2.1 選點·························································································· 12
3.2.2 切割與秤重·············································································· 13
3.2.3 合金配置·················································································· 14
3.2.4 封管與均質化熱處理······························································ 15
3.2.5 金相前處理·············································································· 16
3.2.6 金相量測分析·········································································· 17
3.2.7 熱分析（DTA） ······································································ 18
3.2.8 平衡相圖的量測分析······························································ 19
肆、實驗結果討論································································································ 20
4.1 Zr-Al-Si 三元系合金的EPMA 量測分析··········································· 20
4.1.1 Zr2Al5Si-Al2Zr-Al3Zr 三相區···················································· 21
4.1.2 Zr4AlSi3-Al2Zr- Zr2Al5Si 三相區·············································· 21
4.1.3 Al3Zr2-Al2Zr- Zr3Si2 三相區······················································· 22
4.1.4 τ4-AlZr3-(α-Z)三相區······························································· 23
4.1.5 Zr3Si2-Al2Zr-Zr4AlSi3 三相區··················································· 24
4.1.6 Zr2Al5Si-Zr3Al4Si5-ZrSi 三相區··············································· 25
4.1.7 Al3Zr4-τ4-Al3Zr2 三相區··························································· 26
4.1.8 Al3Zr4-τ4-AlZr2 三相區···························································· 26
4.1.9 Zr3Si2-τ4-(α-Zr)三相區····························································· 27
4.1.10 Zr3Si2-ZrSi-Zr4AlSi3 三相區··················································· 28
4.1.11 ZrSi2-ZrSi-Zr3Al4Si5 三相區··················································· 29
4.2 Zr-Al-Si 三元系合金的EPMA 量測分析結果··································· 29
伍、討論··············································································································· 31
5.1 Zr-Al-Si 三元系合金平衡相圖···························································· 31
5.1.1 1 號合金試片在三元相圖中的分布情況·································· 31
5.1.2 2 號合金試片在三元相圖中的分布情況·································· 32
5.1.3 3 號合金試片在三元相圖中的分布情況·································· 32
5.1.4 5、6 號合金試片在三元相圖中的分布情況···························· 33
5.1.5 7、8 號合金試片在三元相圖中的分布情況···························· 33
5.1.6 9、10、11 號合金試片在三元相圖中的分布情況·················· 34
5.1.7 12 號合金試片在三元相圖中的分布情況································ 34
5.1.8 13 號合金試片在三元相圖中的分布情況································ 35
5.1.9 14 號合金試片在三元相圖中的分布情況································ 35
5.1.10 15 號合金試片在三元相圖中的分布情況······························ 35
5.1.11 16 號合金試片在三元相圖中的分布情況······························ 36
5.2 本實驗800 ℃相圖與文獻中Jain 和Gupta 900 ℃相圖的比較······· 36
5.2.1 1 號試片位置800 ℃相圖與文獻900 ℃相圖比較················ 37
5.2.2 2 號試片位置800 ℃相圖與文獻900 ℃相圖比較················ 37
5.2.3 3 號試片位置800 ℃相圖與文獻900 ℃相圖比較················ 38
5.2.4 5、6 號試片位置800 ℃相圖與文獻900 ℃相圖比較·········· 38
5.2.5 7、8 號試片位置800 ℃相圖與文獻900 ℃相圖比較·········· 38
5.2.6 9、10、11 號試片位置800 ℃相圖與文獻900 ℃相圖比較· 39
5.2.7 12 號試片位置800 ℃相圖與文獻900 ℃相圖比較·············· 39
5.2.8 13 號試片位置800 ℃相圖與文獻900 ℃相圖比較·············· 40
5.2.9 13 號試片位置800 ℃相圖與文獻900 ℃相圖比較·············· 40
5.2.10 15 號試片位置800 ℃相圖與文獻900 ℃相圖比較············ 40
5.2.11 16 號試片位置800 ℃相圖與文獻900 ℃相圖比較············· 41
陸、結論··············································································································· 42
柒、參考文獻········································································································ 45
表2-1 非晶質合金的性質與應用························49
表4-1 Zr-Al-Si三元系合金1號試片Zr29Al68Si3的成分分析與平衡圖(一)························50
表4-1 Zr-Al-Si三元系合金2號試片Zr34Al53Si13的成分分析與平衡圖(二)························51
表4-1 Zr-Al-Si三元系合金3號試片Zr44Al47Si9的成分分析與平衡圖(三)························52
表4-1 Zr-Al-Si三元系合金4號試片Zr51Al40.5Si8.5的成分分析與平衡圖(四)························53
表4-1 Zr-Al-Si三元系合金5號試片Zr70Al20Si10的成分分析與平衡圖(五)························54
表4-1 Zr-Al-Si三元系合金6號試片Zr70Al10Si20的成分分析與平衡圖(六)························55
表4-1 Zr-Al-Si三元系合金7號試片Zr57.5Al6Si36.5的成分分析與平衡圖(七)························56
表4-1 Zr-Al-Si三元系合金8號試片Zr53.5Al13Si33.5的成分分析與平衡圖(八)························57
表4-1 Zr-Al-Si三元系合金9號試片Zr43.5Al16.5Si40的成分分析與平衡圖(九)························58
表4-1 Zr-Al-Si三元系合金10號試片Zr37.5Al22.5Si40的成分分析與平衡圖(十)························59
表4-1 Zr-Al-Si三元系合金11號試片Zr31.8Al22.2Si46的成分分析與平衡圖(十一)························60
表4-1 Zr-Al-Si三元系合金12號試片Zr58Al22Si20的成份分析與平衡相(十二)························61
表4-1 Zr-Al-Si三元系合金13號試片Zr60Al30Si10的成份分析與平衡相(十三)························62
表4-1 Zr-Al-Si三元系合金14號試片Zr67Al3Si30的成份分析與平衡相(十四)························63
表4-1 Zr-Al-Si三元系合金15號試片Zr53Al5Si42的成份分析與平衡相(十五)························64
表4-1 Zr-Al-Si三元系合金16號試片Zr38Al7Si55的成份分析與平衡相(十六)························65
表4-2 Zr-Al-Si三元系合金的三相區(一)························66
表4-2 Zr-Al-Si三元系合金的三相區(二)························67
表5-1 Zr-Al-Si三元系合金8號試片900 ℃Zr53.5Al13Si33.5的成份分析與平衡相(一) ························68
表5-1 Zr-Al-Si三元系合金10號試片900 ℃Zr37.5Al22.5Si40的成份分析與平衡相(二) ························69
圖2-2 Zr-Al二元系平衡相圖························70
圖2-3 Zr-Si二元系平衡相圖························71
圖2-4 Al-Si二元系平衡相圖························72
圖2-5 Zr-Al-Si900 ℃平衡相圖研究························73
圖2-6 Zr-Al-Si1000 ℃平衡相圖研究························73
圖3-1 三元系合金平衡相圖的架構圖························74
圖3-2 實驗流程圖························74
圖3-3 合金選點圖························75
圖3-4 真空電弧熔煉爐的結構圖························75
圖4-1 合金試片1號的顯微組織照片························76
圖4-2 合金試片2號的顯微組織照片························76
圖4-3 合金試片3號的顯微組織照片························77
圖4-4 合金試片4號的顯微組織照片························77
圖4-5 合金試片5號的顯微組織照片························78
圖4-6 合金試片6號的顯微組織照片························78
圖4-7 合金試片7號的顯微組織照片························79
圖4-8 合金試片8號的顯微組織照片························79
圖4-9 合金試片9號的顯微組織照片························80
圖4-10 合金試片10號的顯微組織照片························80
圖4-11 合金試片11號的顯微組織照片························81
圖4-12 合金試片12號的BEI顯微組織照片························81
圖4-13 合金試片13號的BEI顯微組織照片························82
圖4-14 合金試片14號的BEI顯微組織照片························82
圖4-15 合金試片15號的BEI顯微組織照片························83
圖4-16 合金試片16號的BEI顯微組織照片························83
圖5-1 1號合金試片在三元相圖at％中的分布情況························84
圖5-2 2號合金試片在三元相圖at％中的分布情況························84
圖5-3 3號合金試片在三元相圖at％中的分布情況························85
圖5-4 5、6號合金試片在三元相圖at％中的分布情況························85
圖5-5 7、8號合金試片在三元相圖at％中的分布情況························86
圖5-6 9、10、11號合金試片在三元相圖at％中的分布情況························86
圖5-7 12號合金試片在三元相圖at％中的分布情況························87
圖5-8 13號合金試片在三元相圖at％中的分布情況························87
圖5-9 14號合金試片在三元相圖at％中的分布情況························88
圖5-10 15號合金試片在三元相圖at％中的分布情況························88
圖5-11 16號合金試片在三元相圖at％中的分布情況························89
圖5-12 Zr-Al-Si三元系合金800 ℃平衡相圖························89
圖5-13 合金試片8號900 ℃的BEI顯微組織照片························90
圖5-14 合金試片10號900 ℃的BEI顯微組織照片························90

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