本研究以磁性流體力學模擬在兩個無窮遠之電極板間，為低壓且高密度之二維空間的氬氣(Argon)電漿，在瞬間給定一低溫底板定偏壓電位之電漿輸送現象。其中考慮黏滯力、離子與電子電離化、結合化、電場與磁場效應。模擬結果與時間尺度分析顯示出，電子、離子及中性粒子於工件表面的密度、速度、溫度、黏滯係數、熱傳導係數、磁場、電場，以及其邊界層之變化。

This study purposes a magnetohydrodynamics (MHD) model to simulate the unsteady two-dimensional transport phenomena, magnetic field and electric field in argon (Ar) plasma, under low pressure and high density between two infinite planes, while the lower plane has a negative voltage. This model accounts for viscous, ionization and recombination effects. The results and times scales analysis show density, velocity, temperature, magnetic field, electric field and the boundary layer thickness of the electrons, ion and neutral. The property of thermal conductivity is a function of temperature.

目錄
論文審定書 i
中文摘要 ii
Abstract iii
符　號　說　明 vi
第一章 緒論 1
1.1 研究背景及動機 1
1.2 文獻回顧 2
1.3 本論文研究內容簡介 3
1.4 論文架構 4
第二章 理論分析與方法 5
2.1系統模型與基本假設之條件 5
2.2 統御方程式 6
2.2.1質量守恆方程式 6
2.2.2動量方程式 9
2.2.3能量方程式 18
2.2.4馬克士威方程式 21
2.3研究與模擬之流程圖 24
第三章 研究結果與討論 25
3.1 電位傳遞及影響 25
3.2 密度變化 26
3.2.1 電子密度變化 26
3.2.2 離子密度變化 27
3.2.3 中性粒子密度變化 28
3.3 溫度變化 29
3.3.1 電子溫度變化 29
3.3.2 離子溫度變化 30
3.3.3 中性粒子溫度變化 31
3.4速度變化 32
3.4.1 電子速度變化 32
3.4.2 離子速度變化 35
3.4.3 中性粒子速度變化 37
3.5動量邊界層尺度分析 39
3.5.1 電子動量邊界層 39
3.5.2 離子動量邊界層 40
3.5.3 中性粒子動量邊界層 41
3.6熱邊界層尺度分析 42
3.6.1 電子熱邊界層 42
3.6.2 離子熱邊界層 43
3.6.3 中子熱邊界層 44
3.7 鞘層尺度分析 45
第四章 結論 46
參 考 文 獻 47

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