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博碩士論文 etd-0717100-150906 詳細資訊
Title page for etd-0717100-150906
論文名稱
Title
應用電場或磁場耦合方程式來設計多層大角度抗反射膜
Application of coupled E/H field formulation to the design of multiple layer AR coating for large incident angles
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
61
研究生
Author
指導教授
Advisor
召集委員
Convenor

口試委員
Advisory Committee
口試日期
Date of Exam
2000-06-19
繳交日期
Date of Submission
2000-07-17
關鍵字
Keywords
大角度鍍膜設計、阻抗匹配、積分方程式、多層介質
AR coating design with large angles, multilayer media, impedance matching
統計
Statistics
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中文摘要
本篇論文的架構可以分成二大部分,我們提出一種計算多層介質的方法我們稱之為電場或磁場耦合方程式,可以用來解反射,穿透及模態的理論架構,然後我們藉由傳統的方法驗證我們的方法。
然後藉由多層介質的理論計算的耦合方程式的結果,應用阻抗匹配的方法,設計多層大角度抗反射膜。我們的方法可以針對任何角度入射之平面波,進行最佳化的設計,可以達到單一頻率,單一平面波全部穿透。然後以前者設計出來的鍍膜,作為半導體雷射抗反射膜,經由聯立的積分方程式的解,來進行不連續介面的光場分析,並且藉此找出最好的穿透設計。我們發現多層的設計可以再降低單層抗反射膜的反射率。我們以此多層鍍膜與半導體雷射結合的設計,其反射率可由單層設計的0.085%降到5層設計的0.056%,降低了約33%的反射率。




Abstract
Thin-film theorems are well developed and so are the fabrication processes. Yet under some special conditions, traditional methods (such as the ABCD matrix and the transmission matrix methods) will lead to a serious numerical error. In this thesis, we propose a new method called Couple E/H field formulation, which will overcome this numerical problem in simulating characteristics of complex multi-layered structures. We have verified both the algorithm and its results with the traditional techniques.
By extending the impedance matching principle, we came out with a multi-layer anti-reflection coating design optimized for a time-harmonic plane wave incidence with any incident angle. Such a design allows for more plane waves with adjacent angles to pass through the coating layers with minimal reflection.
Furthermore, we apply this AR coating design to facets of semiconductor lasers. Our calculation shows that multi-layer coating does a better job than a single layer coating. The reflectivity of a laser diode from single layer coating 0.085% to 5 layer coating 0.056%, which is a 33% improvement.
目次 Table of Contents
摘要 II
內容目錄 IV
圖表目錄                        VI
第一章 導論 1
1. 1 內容簡介 1
1. 2 論文架構 3
第二章 電場耦合與磁場耦合方程式的理論分析 4
2. 1 橫向電場模態 6
2. 2 橫向磁場模態 12
第三章 鍍膜的設計方法與改進方法 17
3. 1 橫向電場模態的鍍膜設計方法與改進方法 17
3. 2 橫向磁場模態的鍍膜設計方法與改進方法 22
第四章 平行層波導與多層鍍膜耦合的理論架構與數值的
結果 27
4. 1 平行層波導與多層鍍膜耦合理論架構的推導 27
4. 2 數值結果與探討 34
第五章 結論 56
參考資料 58
中英對照表      60 

參考文獻 References
[1] Z. Knittl , Optics of Thin Films, John Wiley , 1976.

[2] A. Ishimaru, Electromagnetic Wave Propagation, Radiation, and Scattering, Prentice-Hall, 1991.

[3] P. Yeh, Optical Waves in Layered Media, John Wiley & Sons, 1991.

[4] T. Saitoh, T. Mukai, and O. Mikami, “Theoretical analysis and fabrication of anti-reflection coating on laser-diode facets”, Journal of Lightwave Technology. Vol. LT-3, NO. 2, pp. 288-293, April 1985.

[5] C. Vassallo, “Theory and practical calculation of antireflection coatings on semiconductor laser diode optical amplifiers”, Optical Amplifiers for communication, IEE Proceedings, pp. 193-202, 1990.

[6] K. Shigihara, T.Aoyagi, S.Kakimota, M.Aiga, M.Osyubo, K.Ikeda, “Anti-reflection coating for laser diodes”, Electronics Letters, pp. 1574-1576, 1995.

[7] G. Eisentein, “Theoretical design of single layer anti-reflection coatings on laser facets”, AT&T Bell Lab. Technical Journal, pp. 357-364, 1984.

[8] Li Li and J.A. Dobrowolski, “Computation speeds of different optical thin-film synthesis methods”, Applied optics, Vol. 31, No. 19, pp. 3791-3799, 1992.

[9] S. Martin, J. Rivory, and M. Schoenauer, ”Simulated Darwinian evolution of homogeneous multiplayer systems : a new method for optical coating design”, Optics Communications, pp.503-506, March 1994.

[10] G. M. Angulo, “Diffraction of surface waves by semi-infinite dielectric slab,” IRE Trans. Antennas and propagation, vol. AP-5, pp.100-109, Jan 1957.


[11] Prakasam, R.; Fox, S.; Gopalan, B.P.; Kareenahalli, S.; Heim, P.J.S.; Dagenais, M. “Practical approach to design and fabrication of antireflection coatings for semiconductuctor optical amplifiers” IEEE Photonics Technology Letters Volume: 84, pp. 509-511, April 1996.

[12] P. C. Kendall, D. A. Roberts, P. N. Robson, M. J. Adams, M. J. Robertson ”Semiconductor laser facet reflectivities using free-space radiation modes” IEE Proceedings-j, Vol. 140, No.1 February 1993.

[13] T-L Wu, M-H Sheng and H-W Chang, “The Design of AR-Coatings for Dielectric Layered Waveguides Using 2D Numerical Model” 1998 International Photonics Conference, pp. 349-351, 1998.

[14] M. C. Farries, J. Boos, M. Kearley, “Design and fabrication of two layer anti-reflection coatings for optical amplifiers”, Electronics Letters, pp. 1626-1627, 1990.

[15] R. H. Clarke, “Theorerical Performance of an Anti-reflection coating for a Diode Laser Amplifier”, Int. J. Electronics, pp. 495-499, 1982.

[16] 莊進祥,平行層介電質波導在不連續介面的光場分析, 中山大學光電所碩士論文, 1998.
[17] 游能忠,張弘文,“多層大角度抗反射膜之數值設計與分析” 1999台灣光電科技研討會暨國科會光電學門研究成果發表會論文集, pp. 1302-1304.
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