論文使用權限 Thesis access permission:校內立即公開,校外一年後公開 off campus withheld
開放時間 Available:
校內 Campus: 已公開 available
校外 Off-campus: 已公開 available
論文名稱 Title |
高溫超導與超巨磁阻薄膜成長機制及其紅外線感測特性之研究
Growth Mechanism and Infrared Detection of High-temperature Superconducting and Colossal Magnetoresistance Films |
||
系所名稱 Department |
|||
畢業學年期 Year, semester |
語文別 Language |
||
學位類別 Degree |
頁數 Number of pages |
115 |
|
研究生 Author |
|||
指導教授 Advisor |
|||
召集委員 Convenor |
|||
口試委員 Advisory Committee |
|||
口試日期 Date of Exam |
2001-07-12 |
繳交日期 Date of Submission |
2001-07-17 |
關鍵字 Keywords |
紅外線感測、超巨磁阻、高溫超導、薄膜、熱導 CMR, Thermal Conduction, Infrared Detection, Thin Film, HTSC |
||
統計 Statistics |
本論文已被瀏覽 5745 次,被下載 2346 次 The thesis/dissertation has been browsed 5745 times, has been downloaded 2346 times. |
中文摘要 |
高溫超導與超巨磁阻薄膜成長機制及其紅外線感測特性之研究 國立中山大學電機工程學系 洪夢聰* 陳英忠**,周 雄** ------------- 摘 要----------- 本論文以射頻濺鍍方式成長高溫超導與超巨磁阻薄膜,研究其成長機制;並以光微影術製作微橋元件,研究其紅外線感測特性。高溫超導薄膜成長結果顯示,適當地調整加熱器與濺鍍槍的相對距離與角度,可以使電漿對薄膜具有拋光作用,進而獲得表面平整,沒有孔洞與析出物之高品質薄膜。對高溫超導紅外線感測特性研究方面,實驗結果顯示,薄膜微橋幾何形狀與元件熱耦合型態對元件響應有重要影響。元件熱響應信號大小取決於對入射光所產生熱能之散逸速度,此散逸速度亦和直流焦耳熱產生功率相關。藉由二維熱傳導模型與數值模擬,可成功地解釋其特性。以射頻濺鍍方式成長超巨磁阻薄膜,獲得高品質薄膜之成長條件較高溫超導薄膜為廣。紅外線感測方面具有線性、寬波段等特性,在223 K溫度操作,其檢測度(D*)可達2.76´109 cm×Hz 0.5×W -1。藉由組成成份之調整,超巨磁阻薄膜感測元件可在室溫(300 K)操作,深具實用價值。 *研究生 **指導教授 |
Abstract |
Growth Mechanism and Infrared Detection of High-temperature Superconducting and Colossal Magnetoresistance Films Department of Electrical Engineering, National Sun Yat-Sen University Meng-Tsong Hong* Ying-Chung Chen**, Hsiung Chou** -------------------------------------------------- Abstract---- The growth mechanism of YBa2Cu3O7-d (YBCO) films grown by RF sputtering has been investigated. When growing films by RF sputtering, the shape of the plasma and the degree of resputtering effect were varied by setting different relative positions of the heater to the gun. As the substrate was near the plasma, the negative oxygen ions resputtered part of the mobile atoms from the surface of film back into the plasma, which caused the composition distortion, delayed the merge of grains and left uncovered holes. Setting a longer relative distance, the resputtering effect was suppressed and the precipitates appeared on the surface of films resulting in a rough surface. At an optimum relative position between heater and gun, the function of resputtering produced a polishing effect on the surface of films. This polishing effect suppressed the growth of precipitates without slowing down the growth of grains, a smooth and precipitate-free YBCO film might obtain. We also found that the film with smooth and precipitate-free morphology exhibited suppressed superconductivity. The most direct way to enhance the photoresponse of a bolometer is by modifying the microbridge from a single straight bridge to a meander or change the thermal coupling configuration between bolometer and heat sink. In the study of high-temperature superconducting (HTSC) bolometers, it is found that the geometry and thermal coupling configuration play very important roles on the behavior of heat conduction, which alter the thermal conversion efficiency, DT/WD. Actually, DT/WD is a matter of the absorption of the AC thermal irradiation and the dissipation of both the irradiation and the DC joule heat generated by the bias current. The competition between the capability of heat dissipation and the thermal generation determined the magnitude of DT/WD. The La0.67Ca0.33MnO3-y (LCMO) thin films with epitaxial structure and smooth surface morphology have been deposited. A LCMO thin-film microbridge was fabricated into a microbridge by conventional photolithography and dry etching for optical detection. The measured photoresponse, DV, of this LCMO thin-film microbridge reveals that it is bolometric in nature. The photoresponse is linearly proportional to the bias current Ib and the power density of irradiation WD, which strongly suggests the applicability of an LCMO thin-film microbridge to a linear optical detector. The ratio of the photoresponse to the irradiated power density, DV/WD, is independent of the incident-light wavelength l from 0.633 to 3.5 mm. The dependence of the photoresponse on modulated frequency f, follows the DV µ f -0.21 relation. Under Ib = 100 mA and f = 5 Hz at an operating temperature Top = 223 K, the responsivity S and noise voltage Vn are 685 V/W and 20 nV×Hz -0.5, respectively, for this LCMO thin-film microbridge. From the measured S and Vn, the noise equivalent power (NEP) and detectivity D* were be calculated to be 2.92´10-11 W×Hz -0.5 and 2.76´109 cm×Hz 0.5×W -1, respectively, for this LCMO thin-film microbridge. The experimental results from this LCMO thin-film microbridge show the practical applicability of this new detector system compared to other established detectors. *Student **Advisor |
目次 Table of Contents |
Contents Page Chapter 1 Introduction……………………………………………………………. 1 Chapter 2 Theory…………………………………………………………………. 7 2.1 Fundamentals of superconductors………………………………………… 7 2.2 Principle of colossal magnetoresistance………………………………….. 8 2.3 Photoresponse of the HTSC bolometer under modulated irradiation…… 10 2.4 The solution of heat diffusion equation on bolometer in spherical coordinate………………………………………………………………... 12 2.5 The solution of heat diffusion equation in cylindrical coordinate………. 15 2.6 Effect of thermal coupling configuration on frequency response of the bolometers……………………………………………………………….. 18 2.7 Figures of merit to describe the performance of detectors……………… 19 Chapter 3 Experiment and Simulation………………………………………….. 21 3.1 The RF magnetron sputtering system…………………………………… 21 3.2 The process of YBCO and LCMO thin film deposition………………… 21 3.3 Photolithography for fabrication of thin-film microbridges…………….. 22 3.4 The electrical and optical measurement of thin film microbridge………. 23 3.5 The procedures of 2D simulation on heat diffusion in thin-film microbridge bolometers…………………………………………………. 24 Chapter 4 Results and Discussion……………………………………………….. 26 4.1 Growth mechanism of YBa2Cu3O7-d thin films by RF sputtering………. 26 4.2 The thermal conversion efficiency of YBa2Cu3O7-d microbridges for infrared detection………………………………………………………... 32 4.3 Thermal coupling effects on the DC characteristics and AC thermal signals of high-temperature superconducting bolometers………………. 38 4.4 The growth and infrared detection of colossal magnetoresistance La0.67Ca0.33MnO3 thin films……………………………………………... 42 Chapter 5 Conclusion……………………………………………………………. 49 References……………………………………………………………………….. 53 |
參考文獻 References |
References 1) H. K. Onnes: Leiden Comm., 120b, 122b, 124c (1911). 2) J. G. Bednorz and K. A. Muller: Z. Phys., B64 (1986) 198. 3) M. K. Wu, I. R. Ashurn, C. J. Torng, P. H. Hor, R. L. Meng, L. Gao, Z. J. Huang, Y. Q. Wang and C. W. Chu: Phys. Rev. Lett. 58 (1987) 908. 4) R. Gross, P. Chaudhari, M. Kawasaki and A. Gupta: IEEE Trans. Magn. 27 (1991) 3227. 5) M. Schmitt, S. Freisem, T. Becherer, A. Hadish and H. Adrian: J. Appl. Phys. 76 (1994) 3220. 6) D. Galt, J. C. Price, J. A. Beall and R. H. Ono: Appl. Phys. Lett. 63 (1993) 3087. 7) J. Chen, T. Ogawa, H. Nakamura, H. Myoren, K. Nakajima and T. Yamashita: J. Appl. Phys. 76 (1994) 1895. 8) Z. Schlesinger, R. T. Collins, B. L. Kaiser and F. Holtzerg: Phys. Rev. Lett. 59 (1987) 1958. 9) W. K. Kelly, S. W. Chan, K. Jenkin, D. E. Aspnes, P. Barboux and J. M. Tarascon: Appl. Phys. Lett. 53 (1988) 2333. 10) H. Chou, H. Z. Chen, Y. C. Chen, T. L. Lin, T. C. Chow and T. P. Wang: Appl. Phys. Lett. 69 (1996) 1306. 11) M. T. Hong’s thesis of MS, “The studies of YBa2Cu3O7-δ thin film on the optical detector”, (1995). 12) Z. Han, T. I. Selinder and U. Helmersson: J. Appl. Phys. 75 (1994) 2020. 13) T. I. Selinder, U. Helmersson, Z. Han, J. E. Sundgren and H. Sjstrm: Physica C 202 (1992) 69. 14) R. Krupke, Z. Barkay and G. Deutscher: Physica C 289 (1997) 146. 15) H. Z. Chen’s thesis of Ph. D., “The growth of Y1Ba2Cu3O7-δ superconducting films and its applications on optical detectors”, (1996). 16) S. C. Wu, W. C. Tsai, C. K. Huang, H. T. Hsu, C. J. Huang and T. Y. Tseng: J. Vac. Sci. & Technol. A 13 (1995) 2412. 17) F. Goerke and A. Thorus: Physica C 251 (1995) 247. 18) T. I. Selinder, G. Larsson, U. Helmersson and S. Rudner: J. Appl. Phys. 69 (1991) 390. 19) P. I. Lin’s thesis of MS, “The study of the resputtering effect on the growth of Y1Ba2Cu3O7-δ thin films by RF sputtering”, (1998). 20) P. L. Richards, S. Verghese, T. H. Geballe and S. R. Spielman: IEEE Trans. Magn. 25 (1989) 1335. 21) A. Frenkel, M. A. Saifi, T. Venkatesan, P. England, X. D. Wu and A. Inam: J. Appl. Phys. 67 (1990) 3054. 22) F. Zhou, J. Hao, H. Sun, X. Zhao, Z. Mai and X. Yi: Solid State Commun. 89 (1994) 535. 23) J. C. Brasunas and B. Lakew: Appl. Phys. Lett. 64 (1994) 777. 24) Hsiung Chou, H. Z. Chen, M. T. Hong, Y. C. Chen and T. C. Chow: Appl. Phys. Lett. 68 (1996) 2741. 25) P. L. Richards, J. Clarke, R. Leoni, Ph. Lerch, S. Verghese, M. R. Beasley, T. H. Geballe, R. H. Hammond, P. Rosenthal and S. R. Spielman: Appl. Phys. Lett. 54 (1989) 283. 26) M. Nahum, Q. Hu and P. L. Richards: IEEE Trans. Magn. 27 (1991) 3081. 27) S. J. Berkowitz, A. S. Hirahara, K. Char and E. N. Grossman: Appl. Phys. Lett. 69 (1996) 2125. 28) B. S. Karasik, M. C. Gaidis, W. R. McGrath, B. Bumble and H. G. LeDue: Appl. Phys. Lett. 71 (1997) 1567. 29) M. G. Forrester, M. Gottlieb, J. R. Gavaler and A. I. Braginski: IEEE Trans. Magn. 25 (1989) 1327. 30) P. C. Shan, Z. C. Butler, D. P. Butler, A. Jahanzeb, C. M. Travers, W. Kula and R. Sobolewski: J. Appl. Phys. 80 (1996) 7118. 31) L. Mechin, J. C. Villegier and D. Bloyet: J. Appl. Phys. 81 (1997) 7039. 32) A. Jahanzeb, C. M. Travers, C. B. Zeynep, D. P. Butler and S. G. Tan: IEEE Trans. Electron Devices 44 (1997) 1795. 33) M. G. Forrester, M. Gottlieb, J. R. Gavaler and A. I. Braginski: Appl. Phys. Lett. 53 (1988) 1332. 34) H. Z. Chen, T. C. Chow, M. T. Hong, T. L. Lin, K. S. Lin, Y. F. Cheng, Y. C. Chen and H. Chou: Physica C 274 (1997) 24. 35) Y. P. Gousev, A. D. Semenov, R. S. Nebosis, E. V. Pechen, A. V. Varlashkin and K. F. Renk: Supercond. Sci. Technol. 9 (1996) 779. 36) M. J. M. E. de Nivelle, M. P. Bruijn, R. de Vries, J. J. Wijnbergen, P. A. J. de Korte, S. Sanchez, M. Elwenspoek, T. Heidenblut, B. Schwierzi, W. Michalke and E. Steinbeiss: J. Appl. Phys. 82 (1997) 4719. 37) Y. P. Gousev, A. D. Semenov, E. V. Pechen, A. V. Varlashkin, R. S. Nebosis and K. F. Renk: Appl. Phys. Lett. 69 (1996) 691. 38) S. Jin, T. H. Trefel, M. McCormak, R. A. Fastnacht, R. Ramesh and L. H. Chen: Science 264 (1994) 413. 39) R. V. Helmlot, J. Weckerg, B. Holzapfel, L. Schultz and K. Samwer: Phys. Rev. Lett. 71 (1993) 2331. 40) G. C. Xiong, Q. Li, H. L. Ju, R. L. Green and T. Venkatesan: Appl. Phys. Lett. 66 (1995) 1689. 41) R. M. Kusters, J. Singleton, D. A. Keen, R. McGreevy and W. Hayes: Physica B 155 (1989) 362. 42) R. Mahendiran, R. Mahesh, N. Rangavittal, S. K. Tiwary, A. K. Raychaudhuri, T. V. Ramakrishnan and C. N. R. Rao: Phys. Rev. B 53 (1996) 3348. 43) M. Rajeswari, C. H. Chen, A. Goyal, C. Kwon, M. C. Robson, R. Ramesh, T. Venkatesan and S. Lakeou: Appl. Phys. Lett. 68 (1996) 3555. 44) A. Goyal, M. Rajeswari, R. Shreekala, S. E. Lofland, S. M. Bhagat, T. Boettcher, C. Kwon, R. Ramesh and T. Venkatesan: Appl. Phys. Lett. 71 (1997) 2535. 45) A. Lisauskas, S. I. Khartsev and A. Grishin: Appl. Phys. Lett. 77 (2000) 756. 46) W. Meissner and R. Ochsenfeld: Naturwiss 21 (1933) 787. 47) T. P. Orlando and K. A. Delin: Fundations of applied superconductivity, (Addison-Wesley, New York, 1991). 48) H. L. Ju, J. Gopalakrishnan, J. L. Peng, Q. Li, G. C. Xiong, T. Venkatesan and R. L. Greene: Phys. Rev. B 51 (1995) 6143. 49) C. W. Searle and S. T. Wang: Can. J. Phys. 47 (1969) 2023. 50) Y. Tokura and Y. Tomioka: J. Magn. & Magn. Matt. 200 (1999) 1. 51) C. Zener: Phys. Rev. 82 (1951) 403. 52) P. W. Anderson and H. Hasegawa: Phys. Rev. 100 (1955) 675. 53) T. L. Hwang, S. E. Schwarz and D. B. Rutledge: Appl. Phys. Lett. 34 (1979) 773. 54) C. W. Jen’s thesis of MS, “The effects of heat conduction on photoresponse in the HTSC bolometer”, (1999). 55) B. Dwir and D. Pavuna: J. Appl. Phys. 72 (1992) 3855. 56) R. D. Hudson: Infrared System Engineering (John Wiley & Sons, New York, 1969). 57) M. Nahum, Q. Hu and P. L. Richard: IEEE Trans. Magn. 27 (1991) 3081. 58) C. Gerber, D. Anselmetti, J. G. Bednorz, J. Mannhart and D. G. Schlom: Nature 350, (1991) 279. 59) M. Hawky, I. D. Raistrick, J. G. Beery, and R. J. Houlton, Science 251, (1991) 1587. 60) G. S. Shekhawart, R. P. Gupta, A. Agarwal, K. G. Garg and P. D. Vyas: Supercond. Sci. & Technol. 8, (1995) 291. 61) G. A. Alvarz, M. Matsuda and M. Koyanagi: Cryogenics 35, (1995) 361. 62) Xing Zhu, G. C. Xiong, R. Liu, Y. J. Li, G. J. Liam, J. Li and Z. Z. Gam: Physica C 216, (1993) 153. 63) X. Y. Zheng, D. H. Locondes, Shen Zhu, J. D. Budai, and R. J. Warmack, Phys. Rev. B 45, (1992) 7584. 64) K. Kamigaki, H. Terauchi, T. Terashima, Y. Bando, K. Iijima, K. Yamamoto, K. Hirata, K. Kayashi, I. Nakagawa and Y. Tomii: J. Appl. Phys. 69, (1991) 3653. 65) P. Schiffer, A. P. Ramirez, W. Bao and S. W. Cheong: Phys. Rev. Lett. 75 (1995) 3336. 66) S. G. Kaplan, M. Quijada, H. D. Drew, D. B. Tanner, G. C. Xiong, R. Ramesh, C. Kwon and T. Venkateesan: Phys. Rev. Lett. 77 (1996) 2081. 67) Y. G. Zhao, J. J. Li, R. Shreekala, H. D. Drew, C. L. Chen, W. L. Cao, C. H. Lee, M. Rajeswari, S. B. Ogale, R. Ramesh, G. Baskaran and T. Venkatesan: Phys. Rev. Lett. 81 (1998) 1310. 68) M. T. Hong, C. W. Jen, H. H. Chu, T. C. Chow, Y. C. Chen and H. Chou: Jpn. J. Appl. Phys. 39 (2000) 2599. 69) M. T. Hong, Y. C. Chen, M. N. Ou, M. F. Wu, T. C. Chow and H. Chou: Jpn. J. Appl. Phys. 40 (2001) 572. 70) R. A. Smith, F. E. Jones and R. P. Chasmar: The Detection and Measurement of Infra-Red Radiation (Oxford University Press, Oxford, 1968). 71) M. Rajeswari, A. Goyal, A. K. Raychaudhuri, M. C. Robson, G. C. Xiong, C. Kwon, R. Ramesh, R. L. Green and T. Venkatesan: Appl. Phys. Lett. 69 (1996) 851. |
電子全文 Fulltext |
本電子全文僅授權使用者為學術研究之目的,進行個人非營利性質之檢索、閱讀、列印。請遵守中華民國著作權法之相關規定,切勿任意重製、散佈、改作、轉貼、播送,以免觸法。 論文使用權限 Thesis access permission:校內立即公開,校外一年後公開 off campus withheld 開放時間 Available: 校內 Campus: 已公開 available 校外 Off-campus: 已公開 available |
紙本論文 Printed copies |
紙本論文的公開資訊在102學年度以後相對較為完整。如果需要查詢101學年度以前的紙本論文公開資訊,請聯繫圖資處紙本論文服務櫃台。如有不便之處敬請見諒。 開放時間 available 已公開 available |
QR Code |