本論文的目的是在玻璃基板上以超臨界二氧化碳製程形成多孔銻摻雜二氧化錫(ATO)電極及其在銀沉積技術上的應用。
製程是自旋塗佈一層陰極ATO奈米粒子溶液於銦錫氧化物(ITO)玻璃上，厚度為1.4μm，在溫度條件為60 oC下使用超臨界形成的陰極多孔隙結構。在兩電極之間封入一層0.08M濃度的電解液(由碘化銀、碘化納及二甲基亞砜所組成)而形成的一種類似“三明治”的結構。元件製程後，在背面噴上白色的漆。當在施加電壓的時候，電化學反應使溶解在電解質中的銀離子還原為銀而析出在透明電極上，看起來是黑色的；反之，如果把析出的銀溶解到電解液中，由於直接看到的是透明的電解液，所以會看到背面所噴上的白漆。
由於陰極多孔銻摻雜二氧化錫(ATO)薄膜很薄，因此在氧化過程中是透明的。在1V的驅動電壓下，電流飽和密度為3.1 mA/cm2。 0.5cm乘0.5cm大小的元件量測結果，對比度為1:4.4；反應時間則為3.7秒。

Porous antimony-doped tin oxide (ATO) cathodes formed by supercritical CO2 (SCCO2) treatment for silver electro-deposition devices were proposed.
The porous ATO cathode with a thickness of 1.4μm was formed by coating the nano-particle ATO solution on ITO glass. The porous structure of the cathodes was obtained by applying SCCO2 treatment at 60oC on the spin-coated ATO thin films. A layer of electrolyte(formed by AgI, NaI and DMSO)was enclosed by two electrodes to to form a so-called“sandwich” structure. After the fabrication process, white paint was spray on the back side of the glass substrate. Due to the thickness of the ATO cathode, the cathode is observed to be transparent during the oxidation process. The Black state of the device was observed during the reduction of silver molecules which were anchored onto the surface of the 1.4μm thick ATO cathode.
The average transmission contrast ratio of 4.4 was obtained in visible spectrum at a driving voltage of 1V and a saturation current density of 3.1 mA/cm2. In addition to that, 0.5 cm by 0.5 cm device with 65μm cell gap and 0.08 M electrolyte concentration, an electrochromic switching time of 3.7 seconds was achieved .

第一章 導論 1
1.1引言 1
1.2電子紙的主要特性 1
1.3電子墨水顯示原理 4
1.4研究動機 5
第二章 電子紙顯示技術發展 7
2.1微膠囊(Microcapsules)電泳 7
2.2旋轉球(Gyricon) 8
2.3微杯型(Microcup) 9
2.3.1高效率的卷式(roll-to-roll)製程 10
2.4快速響應液態粉體顯示器 (Quick-Response Liquid Powder Display，QR-LPD) 11
2.5電潤濕顯示(Electrowetting) 12
2.6膽固醇(Cholesteric)液晶 13
2.7電致變色反應顯示 14
第三章 製程 17
3.1銻摻雜二氧化錫(ATO)特性與應用 17
3.2超臨界 18
3.2.1超臨界流體技術 18
3.2.2超臨界流體特性 19
3.2.3超臨界二氧化碳應用 21
3.2.4超臨界應用優點 23
3.3半導體參數分析儀(Semiconductor parameter analyzer) 24
3.4多功能電源電錶(Source meter) 24
3.5函數信號發生器(Function generator) 25
3.6積分球(Sphere) 26
3.7電壓從1V到-0.2V的迴路 27
3.8實驗步驟 27
3.8.1 ITO玻璃基板清洗 27
3.8.2銀沉積顯示器製程 29
第四章 結果與討論 32
4.1銀沉積電流密度量測 32
4.2銀沉積對比度量測 32
4.3銀沉積反應時間量測 33
第五章 結論 35
Reference 36

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