由於鈦基金屬玻璃擁有傑出的抗腐蝕能力以及良好的機械性質，因此近年來被廣泛的研究及應用。本實驗的主題為不同鈦含量的鈦鋯矽金屬玻璃薄膜於模擬人體體液下的電化學反應行為之分析和研究。研究材料包括 純鈦、Ti47Zr41Si12、Ti58Zr33Si9、Ti66Zr25Si9、與 Ti75Zr19Si6。根據電化學分析的實驗結果發現，TZS 金屬玻璃於模擬人體體液下，擁有比起其他成分較高的抗腐蝕能力。另一方面，隨著鈦鋯矽金屬玻璃薄膜中鈦金屬成分含量的增加，則其抗腐蝕能力亦會隨之增強。正表示著，當鈦含量增加，則愈容易在其表面形成緻密的氧化層結構以保護內部金屬。在機械性質分析方面，鈦鋯矽金屬玻璃薄膜比結晶材料，如: 鈦和鋯，更具良好的機械性質，擁有更高的硬度。綜合上述的實驗結果，發現鈦鋯矽金屬玻璃比起一般結晶材料擁有更好的機械性質以及傑出的抗腐蝕能力表現。因此，鈦鋯矽金屬玻璃是一個具有高度發展潛力的生醫材料。

Due to the excellent mechanical properties and better corrosion resistance, Ti-based amorphous alloys have been developed and investigated rapidly. In this study, the bio-electrochemical response in simulated body fluid of the Ti-Zr-Si thin film metallic glasses (TFMGs) with different contents of titanium is measured via potentiostat. The examined materials include pure Ti, Ti57.5Zr30.8Si11.7, Ti47Zr41Si12, Ti58Zr33Si9, Ti66Zr25Si9, and Ti75Zr19Si6 (all in atomic percent). According to the results of bio-corrosion potential and current, as well as the polarization resistance, it is concluded that the Ti66Zr25Si9 TFMGs possesses the highest bio-electrochemical resistance. With an increasing content of titanium, the corrosion resistance becomes progressively better. The passive current reveals that amorphous alloys can form a more protective and denser passive film on the metallic glass surface than crystalline materials. In addition, the mechanical behavior of the Ti-Zr-Si TFMGs is better than crystalline materials. Overall, the Ti-based TFMGs possess excellent bio-corrosion, biocompatibility, and mechanical properties. As a result, Ti-based TFMGs are considered to be potential materials for bio-material applications.

論文審定書...................................................................i
致謝...................................................................ii
中文摘要 ................................................................... v
Abstract ................................................................... vi
Table of content ...................................................................vii
List of Tables ...................................................................x
List of Figures ...................................................................xi

Chapter 1 Introduction ...................................................................1
1-1 Amorphous alloys ...................................................................1
1-2 Change and development of thin film metallic glasses ...................................................................1
1-3 Development of Ti/Zr-based metallic glasses ...................................................................3
1-4 Motivation ...................................................................5
Chapter 2 Background and Literature Review ...................................................................7
2-1 The behavior of amorphous alloys ...................................................................7
2-1-1 Mechanical properties ...................................................................7
2-1-2 Corrosion properties ...................................................................8
2-2 Empirical rules for synthesis of amorphous alloys ...................................................................8
2-3 Thin film metallic glasses (TFMGs) ...................................................................9
2-4 Principle of physical vapor deposition (PVD) ...................................................................10
2-4-1 Introduction of sputtering process ...................................................................10
2-4-2 DC/RF magnetic sputtering process ...................................................................13
2-4-3 Growth of sputter-deposited thin film ...................................................................15
2-5 Corrosion ...................................................................16
2-5-1 Corrosion behaviors ...................................................................16
2-5-2 Electrochemical tests ...................................................................18
2-5-3 Electrochemical Impedance Spectroscopy (EIS) ...................................................................21
2-6 Biocompatibility ...................................................................22
2-7 Nanoindentation technique ...................................................................24
Chapter 3 Experimental Procedures ...................................................................28
3-1 Materials ...................................................................28
3-2 Sample preparation ...................................................................28
3-2-1 Film preparation ...................................................................29
3-3 Property measurements and analyses ...................................................................30
3-3-1 X-ray diffraction (XRD) ...................................................................30
3-3-2 Atomic forced microscope (AFM) ...................................................................30
3-3-3 Scanning electron microscopy (SEM) observations and energy dispersive spectrometry (EDS) ...................................................................30
3-3-4 Electrochemical analysis ...................................................................31
3-3-5 X-ray photoemission spectroscopy (XPS) analysis ...................................................................31
3-3-6 Electrochemical impedance spectroscopy ...................................................................32
3-3-7 Nanoindentation test ...................................................................32
Chapter 4 Results and Discussions ...................................................................33
4-1 Preparation of thin film metallic glasses ...................................................................33
4-2 XRD analysis ...................................................................34
4-3 AFM analysis ...................................................................34
4-4 SEM/EDS observations ...................................................................35
4-5 XPS analysis ...................................................................36
4-6 Potentiodynamic polarization measurement ...................................................................37
4-7 EIS analysis ...................................................................38
4-8 Mechanical property analyses ...................................................................40
4-9 Summary ...................................................................41
Chapter 5 Conclutions ...................................................................43
References ...................................................................45
Tables ...................................................................51
Figures ...................................................................56

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