二維微光學開關已被廣泛的應用於現今的光通訊領域。然而由於微機電系統中面型微加工技術的製程技術限制，使得現今二維微光學開關僅能傳遞訊號於二維的平面上。
本研究藉由已發展的二維微光學開關架構及基本原理、光學轉換矩陣、致動器的應用等，加以平面及空間機構設計概念，設計出一種具有雙自由度的三維微光學開關機構。異於二維微光學開關傳遞方向的單一選擇性，其具有垂直及水平訊號的傳遞功能，能連結上下兩矽基底所舖設光纖的訊號傳遞。希望藉此三維微光學開關的功能，能增加輸入與輸出光纖間訊號傳遞的選擇可能性。

Presently, the two-dimensional optical switch is widely applied in the field of the optics communication. Due to the restrictions of the Surface Micro-Machining in MEMS (Micro Electric-Mechanical System), the traditional optical switch can only deliver the signal of fibers in a two-dimensional plane.
The common frameworks and principles of two-dimensional optical switch, array of optical switches and micro-actuators are developed. Take the advantage of developed technologies and the concept of the spatial mechanisms, a three-dimensional optical switch possessing two degree of freedoms is designed in this study. Different from the single selectivity of the signal transmission delivered by the two-dimensional optical switch, the three-dimensional optical switch designed in this study possesses two main functions of signal transmission in vertical and horizontal directions. By means of function of these two transmission directions, the signal of fibers of two different silicon substrates can be easily connected. It is believed that, the possibility and the selectivity of the signal transmission of fibers are increased.

摘要 I
Abstract II
目錄 III
圖目錄 V
表目錄 VIII
符號說明 IX
第一章 前言 1
1-1研究動機及目的 1
1-2文獻回顧 2
1-2-1微光學開關機構 2
1-2-2驅動源 10
第二章 面型微加工技術及製程簡介 14
2-1薄膜沉積技術 14
2-2微影技術 15
2-3蝕刻技術 17
2-3-1濕式蝕刻(Wet Etching) 18
2-3-2乾式蝕刻(Dry Etching) 19
2-4擴散、離子佈植與熱製程 20
2-4-1擴散(Difussion) 20
2-4-2離子佈植(Ion Implantation) 21
2-4-3熱製程(Thermal Process) 21
2-5犧牲層(Sacrificial Layer)技術 22
2-6面型微加工製程 24
2-7面型微加工技術之限制 25
第三章 三維微光學開關機構設計與理論分析 28
3-1三維微光學開關機構功能分析 28
3-1-1水平方向訊號傳遞功能 32
3-1-2垂直方向訊號傳遞功能 33
3-2線性致動器之應用與模擬 34
3-2-1線性致動器之應用理論分析及尺寸設計 34
3-2-2梳式致動器之模擬 38
3-3微鏡片旋轉基座機構設計與製程概念 46
3-3-1轉軸式與旋轉式微光學開關之設計原理與製程概念 46
3-3-2三維微光學開關旋轉基座之設計原理與製程概念 49
3-4接頭機構設計 52
3-4-1相對於旋轉基座，微鏡片有平行於X-Y平面的旋轉向量 53
3-4-2相對於矽基底，旋轉基座具垂直於X-Y平面的旋轉向量 54
3-4-3三維微光學開關接頭設計與製程概念設計 56
3-5支撐樑機構設計 59
3-6三維光學轉換矩陣系統功能分析 63
第四章 三維微光學開關之製程設計 66
第五章 結論及建議 88
參考文獻 90
附錄 梳式致動器相關理論 94

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