相位移條紋投影輪廓儀已經發展相當多年。並且有著非常好的量測效率跟精度，本論文乃利用條紋投影的技術，搭配顯微鏡組，以達到微小尺寸量測的目的。為了增加更大的景深，本研究以白光點光源作為照明的元件，在微小尺寸量測的應用上，可以達到很好的效果。另外，如何擷取高速振動的物體並且還原瞬間的形貌，論文中也提出利用短脈衝達到瞬間影像的擷取，進而還原連續運動物體的3D形貌。

A novel technique using projected fringe profilometry with pulsed illuminations for finding the absolute shape of a dynamic object, which is vibrating with high frequency, is proposed. The proposed method can accurately describe the observed 3D shape at a sequence of time. Even though the tested object vibrates up to 10K-Hz, the proposed method can accurately describe the observed 3D shape at any specific time. Depth accuracy better than one part in ten thousandths of the field of view can be achieved even with excessive image noises. Furthermore, the light source is temporally incoherent and spatially coherent, providing a speckle-free and a large depth-of-focus illumination. Thus, a highly accurate, non-scanning projected fringe profilometer with large depth measuring range for dynamic measurements can be realized.

致謝………………………..……………………………1
摘要……………………………..………………………2
英文摘要……………………..…………………………3
目錄………………………..……………………………4
圖目錄……………………..……………………………6
縮寫及符號對照表…………………………...……………………8

第一章 導論………………………………………….10
1-1 簡介………………………………………………10
1-2 文獻回顧…………………………………………12
1-3 研究動機…………………………………………14
第二章 條紋投影輪廓儀原理………….……………16
2-1 光學三角量測法…………………………………17
2-2 相位偵測技術……………………………………21
2-2-1 Phase-Shifting………………………………21
2-2-2 傅立葉轉換原理……………….…………...24
2-3 相位展開及其演算法…………………………...27
2-4 白光點光源景深的基本理論…………………...29
2-5 動態影像擷取系統…………………….…..…….34
第三章 實驗裝置與實驗步驟…………….…..……..36
3-1 實驗儀器…………………………………………36
3-2 實驗步驟…………………………………………38
　3-2-1 靜態之三維形貌量測系統…………………38
3-2-2 動態之三維形貌量測系統…………………40
第四章 實驗結果…………………………..….……..42
4-1 微小尺寸靜止物體之三維形貌…………...…….42
4-2 微小尺寸動態影像之三維形貌..………………..46
第五章 結論…………………………………...……..52
參考文獻………………………………………...……..54

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