振動式微發電機主要構件有振動結構、磁性薄膜及感應線圈等部分。本論文係利用體型微細加工及雷射加工，製作振動式微發電機之振動結構，此為振動式微發電機研發之開端。體型微細加工是目前微機電技術中被廣為採用的微製造技術，其優點是未來可和IC製程整合，體型微細加工技術中發現晶片平坦度是蝕刻製程成敗之重要關鍵。此外本研究也採用了355nm UV Nd:YAG雷射加工製作振動結構，雷射加工則可縮短製作原型結構之時程。在雷射加工系統中，文中證實了利用兩片可調整相對相位之棱鏡，可改變雷射光路。當進行雷射切割加工時，雷射光將以類似銑刀切削方式進行加工，藉由調整兩片棱鏡之初始相對相位，可改變雷射切割之線寛。文中亦對加工後的結果做了多項討論，此技術成功地在矽基材上加工出深寛比為10，特徵尺寸為50µm之微結構。亦成功地製作圓形式螺旋彈簧為振動式微發電機之振動結構。此外本研究還利用有限元素分析軟體ANSYS作結構振動分析，並將加工完成之成品實際做振動特性量測，結果發現此振動結構之共振頻率值和模擬結果相近，此振動結構將可做為振動式微發電機之振動結構。

The main components of the vibration-based microgenerator incorporate vibratile structure, magnetic thin film, and coils. In this thesis work, bulk-micromachining technology and laser-micromachining technology were used to fabricate the vibratile structure of the microgenerator. And this is the beginning of the development of the microgenerator. Bulk-micromachining technology was widely used in micro-electromechanical system (MEMS). The most advantage of the technology is that it can be integrated with IC process in the future. And the roughness of the wafer is the key point of the etching process. In addition, 355nm UV Nd:YAG laser was also used to fabricate the vibratile structure. The period of fabricating prototype can be shortened by laser-micromachining. In laser-micromachining system, the dual-prism was used to change the direction of the laser beam by adjusting the initial phase of one of the prisms. When the laser beam moves relatively to workstation, the cutting process can be proceeded. By this system, the cutting linewidth is controllable. This technology has be used to fabricate the microstructure successfully, and the aspect ratio is up to 10, and the feature size is 50µm. Circular spiral spring structure was fabricated successfully, and it is to be the vibratile structure of the microgenerator. Finite element software ANSYS was used to simulate the dynamic characterization of the vibratile structure and the vibration testing experiment was carried out. The result shows that the experimental resonant frequency is very close to the simulative resonant frequency. So this vibratile structure can be used in microgenerator.

目錄...................................................... I
圖目錄...................................................III
表目錄....................................................VI
中文摘要.................................................VII
英文摘要................................................VIII
第一章 緒論................................................1
1-1研究背景與目的..........................................1
1-2文獻回顧................................................2
1-3本文架構................................................6
第二章 微發電機振動結構之設計與分析........................7
2-0前言....................................................7
2-1力學分析................................................9
2-2 ANSYS振動模擬分析.....................................11
2-2-1 ANSYS簡介...........................................11
2-2-2結構振動分析.........................................13
第三章 微發電機振動結構之製作.............................20
3-1體型微細加工製程.......................................20
3-1-1製程技術簡介.........................................20
3-1-2製程規劃.............................................26
3-2雷射加工製程...........................................36
3-2-1雷射簡介.............................................36
3-2-2雷射加工.............................................42
第四章 結果與討論.........................................47
4-1體型微細加工製程結果討論...............................47
4-2雷射加工製程結果討論...................................51
4-3振動量測結果討論.......................................58
第五章 結論與建議.........................................65
參考文獻..................................................66

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