聚亞醯胺（Polyimide）薄膜為一高分子材料，具有低介電常數、高耐熱性、抗幅射性、抗化學腐蝕性、尺寸安定性、極佳階梯覆蓋性等優良特性，因此在微電子與微機電系統領域的應用非常廣泛。
本論文提出一種創新的微型電容式相對濕度感測器之設計、製作和完整的特性描述。在這項研究過程中我們採用雙層聚亞醯胺薄膜，分別當作電容感應層和上電極保護層，而為了提高濕度靈敏性和反應速度，此論文設計出一種交錯式不共平面電極並應用於微型相對濕度感測器中，結果顯示在30％~70％相對濕度量程中，這種設計將具有較佳的濕度感測靈敏度（1.25 pF /％RH）、極高的感測線性度（99.968％）、極低的遲滯效應（0.24 ％RH）、優良的穩定性（1.36 ％RH）、極佳的精確度（± 1.12 ％RH）和高反應速度（< 1s）。

Polyimide thin films have been widely used in microelectronic and Micro-Electro-Mechanical System applications due to their many excellent characteristics including low dielectric constant, easy processing, good step coverage ability, high heat resistance and chemical resistance.
This paper presents the design, fabrication and complete characterization of an innovative capacitive relative humidity (RH) microsensor. The double polyimide thin films adopted in this study function as a capacitance sensing layer and a protecting layer of top electrodes respectively. To improve the humidity sensitivity and responding speed, interlacing out-of-plane electrodes are designed in the RH microsensor. The higher sensitivity ( 1.25 pF/％RH ), optimized sensing linearity ( 99.968％ ) , very low hysteresis ( 0.24 ％RH ), excellent stability ( 1.36 ％RH ) , high accuracy ( ± 1.12 ％RH ) and fast response ( within 1 seconds ) characteristics of the RH microsensor have been demonstrated in this thesis.

第一章 緒論 ………………………………………………………… 1
1-1 前言……………………………………………………………… 1
1-2 研究動機………………………………………………………… 2
1-3 研究流程與論文架構…………………………………………… 4

第二章 濕度感測器理論基礎與文獻回顧 ………………………… 6
2-1 化學感測器簡介………………………………………………… 6
2-2 濕度與濕度表示法……………………………………………… 7
2-2-1濕度 …………………………………………………………… 7
2-2-2飽和濕度 ……………………………………………………… 8
2-2-3百分率濕度 …………………………………………………… 8
2-2-4相對濕度 ……………………………………………………… 8
2-3濕度感測器之種類與文獻回顧 ………………………………… 8
2-3-1 MOS型濕度感測器 …………………………………………… 9
2-3-2電解質濕度感測器 …………………………………………… 9
2-3-3陶瓷式濕度感測器 ……………………………………………11
2-3-4高分子式濕度感測器 …………………………………………12
2-3-4-1電容式高分子濕度感測器………………………………… 13
2-3-4-2電阻式高分子濕度感測器………………………………… 14
2-4高品質微型濕度感測器之特性規格…………………………… 17

第三章 感濕薄膜特性與選擇……………………………………… 23
3-1聚亞醯胺之特性………………………………………………… 23
3-2聚亞醯胺在微電子工業之運用………………………………… 26
3-3聚亞醯胺之應用於濕度感測器………………………………… 30

第四章 元件設計與製作流程……………………………………… 34
4-1濕度感測器元件設計理論……………………………………… 34
4-1-1平行板電容效應與數學模型………………………………… 34
4-1-2聚亞醯胺之介電常數與數學模型…………………………… 35
4-2濕度感測器元件結構與佈局設計……………………………… 37
4-2-1元件結構設計………………………………………………… 37
4-2-2元件電極位置設計…………………………………………… 39
4-2-3元件佈局設計………………………………………………… 40
4-3電容式濕度感測元件製作……………………………………… 43
4-4實驗與量測設備機台…………………………………………… 50

第五章 結果與討論………………………………………………… 57
5-1微型濕度感測元件製程整合結果……………………………… 57
5-2微型濕度感測元件量測系統建置……………………………… 58
5-3微型濕度感測元件特性量測與分析…………………………… 59
5-3-1第一階段之量測與分析……………………………………… 60
5-3-2第二階段之量測與分析……………………………………… 63

第六章 結論與未來展望…………………………………………… 70
6-1 結論 …………………………………………………………… 70
6-2 未來展望 ……………………………………………………… 71
參考文獻 …………………………………………………………… 72

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