本實驗為在水溶液環境下，利用奈秒(nanosecond)脈衝雷射以不同能量密度單一脈衝剝蝕純鈦靶材，研究經剝蝕產生的孔洞與熱影響區(heat affected zone, HAZ)的大小及其微結構，並與在大氣以及真空環境下之雷射剝蝕做比較，由結果發現環境對穿孔能力之影響趨勢為水＞大氣＞真空，而環境對熱影響區的趨勢為真空＞大氣＞水，且隨能量密度昇高，熱影響區就越大。在微結構方面，藉由電子繞射所得之晶格常數代入Birch-Murnaghan方程式可以得到孔洞與熱影響區之殘留應力，發現在熱影響區的殘留應力最大，且在熱影響區下方3μm處的殘留應力比表面的的殘留應力還要大，此外，在孔洞與熱影響區界面發現有Ti6O以及Ti3O的晶粒存在，應是在水中雷射剝蝕靶材時，在表面有限深度下造成不完全氧化的結果。

另外，在水中利用微秒(microsecond)脈衝雷射以不同能量密度下剝蝕鈦靶約20分鐘，研究在水中所生成的TiO與TiO2奈米顆粒，由實驗結果可知在水中所合成的奈米凝聚物之尺寸範圍落在5∼50nm，而平均粒徑為17∼24nm，且隨雷射剝蝕能量增加而增加，由於液體限制(liquid-confinement)的效應，使得在液體環境下所合成的奈米凝聚物之粒徑尺寸較為一致，大部分粒徑較小的凝聚物為非晶，且其形狀有球形也有不規則形，而少部分粒徑較大之凝聚物大多為晶體，且其形狀為球形。此外，在液體中所誘發之電漿，其奈米凝聚顆粒於急熱/急冷、奈米效應、高密度結晶平面及殘留應力之綜合效應，導致我們合成出大量且顆粒較小之非晶TiO2與結晶TiO凝聚物，和少量顆粒較大結晶且具高密度之TiO2凝聚物，由凝聚物之晶格影像，發現α-PbO2態與金紅石態(rutile)之TiO2共存，而且依循的晶向關係為(0-21)α//(0-11)r；[212]α//[111]r。

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圖目錄 III
表目錄 VII
一、 前言 1
二、 文獻回顧 3
2.1 雷射加工原理 3
2.2 PLA之剝蝕微觀機制 4
2.3 TiO2之結構與應用 6
2.4 PLAL之歷史 8
2.5 PLAL之成核、生長機制 10
2.6 PLAL之熱力學與動力學 11
三、 實驗步驟與方法 16
3.1 第一部份：靶材孔洞 16
3.1.1 準備靶材 16
3.1.2 雷射剝蝕 16
3.1.3 偏光顯微鏡觀察 16
3.1.4 掃瞄式電子顯微鏡(SEM)觀察 17
3.1.5 穿透式電子顯微鏡(TEM)觀察 17
3.2 第二部份：凝聚物 17
3.2.1 準備靶材 17
3.2.2 雷射剝蝕 17
3.2.3 偏光顯微鏡觀察 18
3.2.4 掃瞄式電子顯微鏡觀察 18
3.2.5 穿透式電子顯微鏡觀察 18
四、 實驗結果 20
4.1 第一部份：靶材孔洞 20
4.1.1 偏光顯微鏡觀察 20
4.1.2 掃瞄式電子顯微鏡觀察 20
4.1.3 穿透式電子顯微鏡觀察 21
4.2 第二部份：凝聚物 21
4.2.1 偏光顯微鏡觀察 21
4.2.2 掃瞄式電子顯微鏡觀察 22
4.2.3 穿透式電子顯微鏡觀察 22
五、 討論 24
5.1 環境與能量條件對雷射剝蝕所形成孔洞與熱影響區之影響 24
5.2 孔洞殘留應力之探討 25
5.3 雷射參數對 PLAL所合成奈米凝聚物之尺寸及形狀之影響 25
5.4 非晶與結晶之TiO及TiO2奈米凝聚物形成機制 27
5.5 α-PbO2態與金紅石態TiO2之晶向關係和相變化 28
六、 結論 30
七、 參考文獻 31

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