論文使用權限 Thesis access permission:自定論文開放時間 user define
開放時間 Available:
校內 Campus: 已公開 available
校外 Off-campus: 已公開 available
論文名稱 Title |
利用蝕刻光子晶體光纖形成同軸光纖結構以製作Fabry-Pérot光纖干涉儀 Coaxial-Fiber-based Fabry-Pérot Interferometers Formed By Etching Photonics Crystal Fibers |
||
系所名稱 Department |
|||
畢業學年期 Year, semester |
語文別 Language |
||
學位類別 Degree |
頁數 Number of pages |
76 |
|
研究生 Author |
|||
指導教授 Advisor |
|||
召集委員 Convenor |
|||
口試委員 Advisory Committee |
|||
口試日期 Date of Exam |
2015-07-27 |
繳交日期 Date of Submission |
2015-08-22 |
關鍵字 Keywords |
光子晶體光纖、Fabry-Pérot光纖干涉儀、微光纖、光纖感測器 microfiber, fiber sensor, Photonics crystal fiber, Fabry-Pérot fiber interferometer |
||
統計 Statistics |
本論文已被瀏覽 5808 次,被下載 461 次 The thesis/dissertation has been browsed 5808 times, has been downloaded 461 times. |
中文摘要 |
光纖Fabry-Pérot干涉儀感測器具有體積小、抗電磁干擾以及能夠進行探針式感測等優點,因此在近年來被廣泛地研究與討論。光纖Fabry-Pérot干涉儀是在光纖中製造兩個反射面,當光通過這兩個反射面時,會產生兩道帶有相位差的反射光而形成反射干涉頻譜。過去文獻提出利用微光纖作為Fabry-Pérot光纖干涉儀的共振腔,其具有折射率敏感度高以及可操作於高溫環境下的優點,但製作過程複雜且製程設備非常昂貴。因此,本論文利用蝕刻光子晶體光纖的方式,在光纖末端製作出同軸光纖結構以形成兩道反射面,成功地製作出同軸Fabry-Pérot光纖干涉儀。藉由改變蝕刻參數,我們可以製作出不同元件長度與纖芯尺寸之同軸Fabry-Pérot光纖干涉儀,並且當元件長度為31.9μm且纖芯直徑為3.1μm時,可以得最大反射干涉頻譜對比度為6dB。 我們利用製作出的同軸Fabry-Pérot光纖干涉儀進行溫度、折射率及振動感測。當外環境溫度變化範圍在攝氏30oC至90oC時,其溫度敏感度約為9pm/oC;當外環境溫度變化範圍在攝氏100oC至900oC時,元件溫度敏感度約為14pm/oC,顯示了我們所製作的同軸Fabry-Pérot 光纖干涉儀可避免溫度的交叉干擾。此外,其對外在環境折射率的敏感度為121nm/RIU。而在振動感測中,我們展示了振動頻率由400Hz至5000Hz的振動頻譜,並在元件長度為31.9μm時,會有最大的訊雜比為50dB。由實驗結果可知,我們提出的同軸Fabry-Pérot 光纖干涉儀感測器可操作在高溫下進行感測,並且對外在環境折射率及振動都有明顯的響應。 |
Abstract |
Fiber Fabry-Pérot interferometers (FFPIs) have been widely explored in many fields in recent years due to their advantages such as ultra-compact size, immunity to electromagnetic interference, and probe-typed sensing. The concept of the FFPI structures is to fabricate two mirrors in a fiber to form two reflected light beams with different optical paths. We can then obtain the reflection interference spectrum. Recently, microfiber-based FPI sensors have been demonstrated in refractive index (RI) and high temperature sensing. However, their fabrication process is complicated and expensive. In this thesis, we propose a coaxial-fiber-based FPI by simply etching a photonic crystal fiber. The coaxial fiber on a SMF tip can form a cavity with two reflective mirrors as a FFPI. By varying the etching parameters, we can obtain coaxial-fiber-based FPIs with different device lengths and core diameters. As the device length is 31.9μm and core diameter is 3.1μm, we can have a reflection interference spectrum with a 6-dB extinction ratio. We have applied the coaxial-fiber-based FFPI to temperature, RI and vibration sensing. As we gradually raise the temperature from 30°C to 90°C, we can obtain the temperature sensitivity about 9pm/oC. And as we increase the temperature from 100°C to 900°C, we can get the high-temperature sensitivity about 14pm/oC, which shows that our fabricated coaxial-fiber-based FPIs can avoid temperature disturbance. In addition, the RI sensitivity is about 121nm/RIU as the surrounding refractive index varied from 1.3359 to 1.3478. We have also demonstrated the vibration sensing application of our FFPI. We can obtain the highest 50-dB signal to noise ratio as the device length is 31.9μm. As the result, our proposed coaxial-fiber-based FPI can be used in many sensing fields and are sensitive to both RI and vibration. |
目次 Table of Contents |
目錄 致謝 i 中文摘要 ii Abstract iii 目錄 v 表錄 vii 圖錄 viii 第一章 緒論 1 1-1光纖干涉儀 1 1-2光纖干涉儀感測器種類與介紹 4 1-3研究動機與目的 10 第二章 Fabry-Pérot光纖干涉儀 12 2-1 Fabry-Pérot干涉儀 12 2-2光纖Fabry-Pérot干涉儀 18 第三章 同軸Fabry-Pérot光纖干涉儀的製作 21 3-1同軸微光纖干涉儀文獻回顧 21 3-2元件製作方法 25 3-2.1材料介紹 25 3-2.2 元件製作 26 3-3蝕刻製程特性 30 第四章 同軸Fabry-Pérot光纖干涉儀之干涉特性量測 33 4-1同軸Fabry-Pérot光纖干涉儀之元件原理簡介 33 4-2同軸Fabry-Pérot光纖干涉儀之干涉特性量測 35 4-2.1蝕刻前與蝕刻後元件干涉特性量測 35 4-2.2不同元件長度干涉特性量測 37 4-2.3不同纖芯直徑之干涉特性量測 39 4-3元件共振腔長度與FSR關係 41 第五章 同軸Fabry-Pérot光纖干涉儀之感測應用 43 5-1溫度感測 43 5-2折射率感測 48 5-3振動感測 51 第六章 結論 59 參考文獻 60 |
參考文獻 References |
[1] J. Hecht, “Short history of laser development,” Opt. Eng., vol. 49, pp. 091002-091002-23, 2010. [2] D. Jackson, R. Priest, A. Dandridge, and A. B. Tveten, “Elimination of drift in a single-mode optical fiber interferometer using a piezoelectrically stretched coiled fiber,” Appl. Opt., vol. 19, pp. 2926-2929, 1980. [3] S. Gao, W. Zhang, Z.-Y. Bai, H. Zhang, W. Lin, L. Wang, and J. Li, “Microfiber-enabled in-line Fabry-Pérot interferometer for high-Sensitive force and refractive index sensing,” J. Lightw. Technol., vol. 32, pp. 1682-1688, 2014. [4] K. T. Grattan and B. Meggitt, Optical fiber sensor technology: Fundamentals (Kluwer Academic Publisher, 2000), pp.167-190. [5] J. Ma, J. Ju, L. Jin, W. Jin, and D. Wang, “Fiber-tip micro-cavity for temperature and transverse load sensing,” Opt. Express, vol. 19, pp. 12418-12426, 2011. [6] Q. Sun, D. Liu, J. Wang, and H. Liu, “Distributed fiber-optic vibration sensor using a ring Mach-Zehnder interferometer,” Opt. Commun., vol. 281, pp. 1538-1544, 2008. [7] J. Chen, J. Zhou, and Z. Jia, “High-sensitivity displacement sensor based on a bent fiber Mach-Zehnder interferometer,” IEEE Photon. Technol. Lett., vol. 25, pp. 2354-2357, 2013. [8] Y. Liu, W. Peng, Y. Liang, X. Zhang, X. Zhou, and L. Pan, “Fiber-optic Mach-Zehnder interferometric sensor for high-sensitivity high temperature measurement,” Opt. Commun., vol. 300, pp. 194-198, 2013. [9] Z. Li, Y. Wang, C. Liao, S. Liu, J. Zhou, X. Zhong, Y. Liu, K. Yang, Q. Wang, and G. Yin, “Temperature-insensitive refractive index sensor based on in-fiber Michelson interferometer,” Sens. and Actuators B Chem., vol. 199, pp. 31-35, 2014. [10] B. Dong, D.-P. Zhou, L. Wei, W.-K. Liu, and J. W. Lit, “Temperature and phase-independent lateral force sensor based on a core-offset multi-mode fiber interferometer,” Opt. Express, vol. 16, pp. 19291-19296, 2008. [11] J. Mathew, Y. Semenova, and G. Farrell, “Relative humidity sensor based on an agarose-infiltrated photonic crystal fiber interferometer,” IEEE Qu. Electro. J., vol. 18, pp. 1553-1559, 2012. [12] Y. L. Lo and J. Sirkis, “Active homodyne demodulation of Mach-Zehnder interferometer optical fiber sensors,” Exp. Tech., vol. 18, pp. 33-36, 1994. [13] Z. Tian, S. S. Yam, and H.-P. Loock, “Single-mode fiber refractive index sensor based on core-offset attenuators,” IEEE Photon. Technol. Lett., vol. 20, pp. 1387-1389, 2008. [14] Y. Xu, P. Lu, Z. Qin, J. Harris, F. Baset, P. Lu, V. R. Bhardwaj, and X. Bao, “Vibration sensing using a tapered bend-insensitive fiber based Mach-Zehnder interferometer,” Opt. Express, vol. 21, pp. 3031-3042, 2013. [15] D. Lee, M. Yang, C. Qi, J. Dai, X. Wen, and W. Xie, “An in-line optical fiber refractometer with porous thin film coating,” Sens. and Actuators B Chem., vol. 209, pp. 602-605, 2015. [16] F. Wang, Z. Shao, J. Xie, Z. Hu, H. Luo, and Y. Hu, “Extrinsic Fabry-Pérot underwater acoustic sensor based on micromachined center-embossed diaphragm,” J. Lightw. Technol., vol. 32, pp. 4026-4034, 2014. [17] T. Wei, Y. Han, H.-L. Tsai, and H. Xiao, “Miniaturized fiber inline Fabry-Pérot interferometer fabricated with a femtosecond laser,” Opt. Lett., vol. 33, pp. 536-538, 2008. [18] J. Zhang, Q. Sun, R. Liang, W. Jia, X. Li, J. Wo, D. Liu, and P. P. Shum, “Microfiber Fabry-Pérot interferometer for dual-parameter sensing,” J. Lightw. Technol., vol. 31, pp. 1608-1615, 2013. [19] M. Szustakowski, M. Chojnacki, M. Zyczkowski, and N. Palka, “Fibre optic distributed sensor of vibration in unbalanced Michelson's interferometer configuration,” Optoelectro. Rev., vol. 9, pp. 413-418, 2001. [20] N. Zhao, H. Fu, M. Shao, X. Yan, H. Li, Q. Liu, H. Gao, Y. Liu, and X. Qiao, “High temperature probe sensor with high sensitivity based on Michelson interferometer,” Opt. Commun., vol. 343, pp. 131-134, 2015. [21] H. Ma, Z. Chen, and Z. Jin, “Single-polarization coupler based on air-core photonic bandgap fibers and implications for resonant fiber optic gyro,” J. Lightw. Technol., vol. 32, pp. 46-54, 2014. [22] C. Wu, M.-L. V. Tse, Z. Liu, B.-O. Guan, C. Lu, and H.-Y. Tam, “In-line microfluidic refractometer based on C-shaped fiber assisted photonic crystal fiber Sagnac interferometer,” Opt. Lett., vol. 38, pp. 3283-3286, 2013. [23] Y.-J. Rao, M. Deng, D.-W. Duan, and T. Zhu, “In-line fiber Fabry-Pérot refractive-index tip sensor based on endlessly photonic crystal fiber,” Sens Actuators A Phys, vol. 148, pp. 33-38, 2008 [24] M. S. Ferreira, J. Bierlich, S. Unger, K. Schuster, J. L. Santos, and O. Frazao, “Post-processing of Fabry-Pérot microcavity tip sensor,” IEEE Photon. Technol. Lett., vol. 25, pp. 1593-1596, 2013. [25] S. O. Kasap, Optoelectronics & Photonics: Principles & Practices: Pearson Higher Ed, 2012. [26] E. Hecht, “Optics,” 4th Edition, Addison Wesley, New york, 2001. [27] Z. L. Ran, Y. J. Rao, W. J. Liu, X. Liao, and K. S. Chiang, “Laser-micromachined Fabry-Pérot optical fiber tip sensor for high-resolution temperature-independent measurement of refractive index,” Opt. Express, vol. 16, pp. 2252-2263, 2008. [28] S. Pevec and D. Donlagic, “Miniature micro-wire based optical fiber-field access device,” Opt. Express, vol. 20, pp. 27874-27887, 2012. [29] H. Proksche, G. Nagorsen, and D. Ross, “The influence of NH4F on the etch rates of undoped SiO2 in buffered oxide etch,” J. Electro. Soci., vol. 139, pp. 521-524, 1992. [30] G. Spierings, “Wet chemical etching of silicate glasses in hydrofluoric acid based solutions,” J. Mater. Sci., vol. 28, pp. 6261-6273, 1993. [31] Y. Wang, M. Yang, D. Wang, S. Liu, and P. Lu, “Fiber in-line Mach-Zehnder interferometer fabricated by femtosecond laser micromachining for refractive index measurement with high sensitivity,” JOSA B, vol. 27, pp. 370-374, 2010. [32] J. H. Wu, M. Kuo, and C. W. Chen, “Physical properties and crystallization behavior of poly (lactide)/poly (methyl methacrylate)/silica composites,” J. Appl. Polym. Sci., vol. 132, pp. 42378, 2015. [33] W. Yunus and A. B. A. Rahman, “Refractive index of solutions at high concentrations,” Appl. Opt., vol. 27, pp. 3341-3343, 1988. [34] C. Du and X. Yang, “Highly sensitive refractive index measurement based an a thinned fiber taper,” Micro. Opt. Technol. Lett., vol. 56, pp. 1054-1057, 2014. [35] G. Liu, Y. Wu, K. Li, P. Hao, P. Zhang, and M. Xuan, “Mie scattering-enhanced fiber-optic refractometer,” IEEE Photon. Technol. Lett., vol. 24, pp. 658-660, 2012. [36] Y. Ran, L. Xia, Y. Han, W. Li, J. Rohollahnejad, Y. Wen, and D. Liu, “Vibration fiber sensors based on sm-nc-sm fiber structure,” IEEE Photon. J., vol. 7, pp. 1-7, 2015. |
電子全文 Fulltext |
本電子全文僅授權使用者為學術研究之目的,進行個人非營利性質之檢索、閱讀、列印。請遵守中華民國著作權法之相關規定,切勿任意重製、散佈、改作、轉貼、播送,以免觸法。 論文使用權限 Thesis access permission:自定論文開放時間 user define 開放時間 Available: 校內 Campus: 已公開 available 校外 Off-campus: 已公開 available |
紙本論文 Printed copies |
紙本論文的公開資訊在102學年度以後相對較為完整。如果需要查詢101學年度以前的紙本論文公開資訊,請聯繫圖資處紙本論文服務櫃台。如有不便之處敬請見諒。 開放時間 available 已公開 available |
QR Code |