本論文主要研究次波長金屬孔洞陣列之穿透光譜，並討論穿透光譜代表之光學與物理特性。我們使用focus ion beam( FIB)儀器蝕刻出穿透金屬薄膜且孔洞直徑小於可見光波長的圓柱孔洞陣列，以鈦鎢絲燈的長波段白光為光源照射於此孔洞陣列上，量測不同波長的光通過孔洞陣列之穿透光譜。一些異常的物理特性，例如：入射光可通過孔洞直徑小於入射波長之孔洞、穿透效率之增益…等性質，乃本論文探討的主題。
除討論孔洞孔徑的大小、孔洞陣列的排列、薄膜的材質、周圍環境對穿透光的影響，我們另外對於圓柱孔洞腔體之折射率變化作深入研穿，認為此因素亦為影響特殊穿透光譜之重要參數。本論文藉蒸鍍的方法，調制孔洞內空腔之介電係數，分析並建立此特殊穿透光譜的物理圖像。

We operated focus ion beam instrument (FIB) to etch array of cylindrical holes, with the diameter smaller than the wavelength of visible, on the sliver film. The sample was probed with the tungsten light source and the transmission spectrum of visible-NIR range was recorded with traix550 spectrometer with a cooling CCD. The optical extraordinary properties, such as the light can be transmitted through the holes array with the diameter of the hole smaller than the wavelength of the incident light and the enhancement of the efficiency, of the transmission of the subwavelength holes array were discussed.
In this study, the factors affected the transmission spectrum of the subwavelength hole array, e.g.: the arrangement of the holes array, the material of the thin film, the diameter of the hole…and so on, were researched. Besides, we modulated the effective dielectric property of the cavity of the subwavelength holes with the thermal evaporation method. It was pointed out that effective dielectric property of the cavity also influenced the optical properties of extraordinary transmission spectrum. We believe that our research was helpful to understand the physical properties of the subwavelength holes array.

一、緒論 1
二、文獻回顧 4
2.1 表面結構相關研究
2.2 表面電漿模型(surface plasma model)簡介
2.2.1 表面電漿(surface plasma)簡介
2.2.1.1 Drude Mode 8
2.2.1.2 表面電漿(surface plasma) 11
2.2.1.3 表面電漿模型(Surface plasma model) 13
2.3 SPs model無法解釋之現象 15
2.4 繞射消散波的合成模型(Composite Diffraction Evanescent Wave model) 17
2.4.1 H. J. Lezec等人之研究 23
三、實驗
3.1 實驗目的 27
3.2 樣品之製作 27
3.3 樣品之量測 31

四、實驗數據與討論 33
五、結論 41
附錄A 43
附錄B 51
附錄C 57
圖片索引
參考文獻

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