本研究將金以蒸鍍及離子濺鍍法的方式沈積在NaCl（001）的單晶上。薄膜成長初期，研究呈現明顯的（001）織構現象和雙晶產生之條件， 利用電子顯微鏡的電子繞射圖，明視野與暗視野圖，瞭解金於成核初期，金奈米粒子之形貌與織構形成之關係，並利用工作條件之改變，如：膜厚，粒子大小，基板溫度等分析雙晶產生之過程及原因。並進一步計算twin晶粒形成之量及與twin energy之可能關係

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一.簡介........................................................................................1
1-1奈子粒子...........................................................................1
　1-2 金系統...........................................................................1
　 1-3 薄膜沉積機制..................................................................3
1-4熱蒸鍍（Evaporation process）...................................4
1-4-1熱蒸鍍的實驗設備................................................5
1-4-2蒸鍍參數對薄膜的影響................................. ......5
1-5離子束濺鍍(Ion beam sputtering)...............................8
二.文獻回顧
2-1金結構的資訊...............................................................10 2-2成核的動力理論...........................................................10 2-3基版溫度對初期成核的影響.......................................11
2-4 TEM觀察出的研究......................................................11
2-5研究動機.......................................................................13
三.實驗部分..............................................................................15
3-1蒸鍍實驗儀器及選用材料.......................................15
3-2實驗步驟.......................................................................15
3-3儀器分析.......................................................................16
四.實驗結果..............................................................................18
4-1 蒸鍍顆粒結果..............................................................18
4-2 濺鍍顆粒結果..............................................................18
4-3濺鍍薄膜結果...............................................................19
五.討論......................................................................................21
5-1 蒸鍍粒子的排列情形..................................................21
5-2 濺鍍顆粒晶向關係......................................................21
5-3金薄膜與NaCl(001)的晶向關係.................................22 5-4 twin spot產生的方式.................................................23 5-5 twin spot和{200}繞射點之間的關係..........................24 5-6 優選取向的毀滅..........................................................24
六.結論......................................................................................26
七.參考文獻..............................................................................27

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