本研究提出一種創新的觸覺感測陣列之製程方法，結合雷射加工、模轉印以及表面電漿處理技術，製備表面塗布導電高分子PEDOT:PSS之PDMS微凸塊結構，並且微凸塊陣列經導電高分子進行表面修飾後，將可應用於壓阻式觸覺感測。其製程方法，主要利用雷射燒蝕聚甲基丙烯酸甲酯(PMMA)基板，而基板表面在加工完成後，會因PMMA高分子結構的熱降解現象，產生許多離散分布的熱氣泡腔，若將其作為轉印模具，即可輕易複製出表面具有微結構分布的PDMS凸塊。並因為該凸塊微結構的設計，能夠有效地提升觸覺感測器在小壓力範圍0.2 ~ 0.7 N的響應能力。而材料試驗結果也表明，本研究所開發以PDMS為基底的觸覺感測陣列，彈性常數為8.3 N/mm。在正向作用力0 ~ 2.0 N範圍內，感測薄膜具有良好的彈性能力以及可再現性。除此之外，在觸覺感測的實際應用中，本研究將所製作的感測陣列，結合自組裝的陣列掃瞄系統，並於感測器表面施加靜態壓力以及動態的滑動軌跡，進行觸覺影像量測。由結果得知，該觸覺感測系統能夠分別辨識0.6、1.0 N的靜態壓力，以及其壓力分佈情形。另外，滑動軌跡的測試結果，可發現感測陣列隨著接觸物件的滑動軌跡而改變，僅有受到接觸物件影響的感測單元，會產生1 V以上的輸出電壓，其餘單元則沒有明顯的電壓輸出，故能夠辨識動態軌跡之觸覺影像。此研究提供了一種簡單而有效的製程方法，用以生產高效的可撓性觸覺感測器，並大大地具有電子皮膚之應用潛力。

This work presents a novel flexible tactile sensor array fabricated with PEDOT:PSS conductive polymer modified micro-structured polydimethylsiloxane (PDMS) bumps. PDMS bump arrays with micro-structures are coated with PEDOT:PSS conductive polymer for resistive tactile sensing. The micro-structures on PDMS bumps are produced by replicating the formed thermal bubble cavities during laser ablation of polymethyl methacrylate (PMMA) substrate. The micro-structures on the PDMS bumps greatly enhance the small force response such that the developed sensor exhibits a good response for detecting forces ranging from 0.2 ~ 0.7 N. Results also indicate that the developed PDMS-based tactile sensor has good elastic property with the spring constant of 8.3 N/mm with excellent reproducibility. Additionally, in the practical application of the tactile sensing, the sensor array will be combined with array scanning system, and applied the static pressure, dynamic sliding trajectory on the sensor array to measure the tactile image. Results show that the tactile sensing system is able to identify the static pressure of 0.6, 1.0 N, and the pressure distribution. Moreover, the sliding trajectory can be found in the sensing array with the changes of contact condition. Only the sensing unit affected by the contact object will produce an output voltage of 1 V or more, and the remaining unit will have no significant voltage output. The developed sensor will be able to recognize the tactile image of the dynamic contact behavior. In this study, the developed method provides a simple yet high performance way to produce flexible tactile sensor for electronic skin applications.

中文摘要 i
Abstract ii
目錄 iii
圖目錄 v
表目錄 viii
符號表 ix
簡寫表 xi
第一章 緒論 1
1.1 前言 1
1.1.1 觸覺感測簡介 2
1.2 觸覺感測器種類與原理 4
1.2.1 電容式感測器 4
1.2.2 壓電式感測器 9
1.2.3 壓阻式感測器 12
1.2.4 其他類型觸覺感測器 16
1.3 研究動機與目的 18
1.4 論文架構 19
第二章 感測材料及實驗原理 20
2.1 感測材料 20
2.1.1 導電高分子簡介 20
2.1.2 導電高分子PEDOT:PSS 22
2.2 感測原理 24
2.2.1 壓阻式感測基本原理 24
2.2.2 本研究所發展之觸覺感測機制 27
第三章 元件製作與實驗架構 30
3.1 製程設計與原理 30
3.2 觸覺感測器製作 31
3.2.1 高分子傳統加工方法 34
3.2.2 二氧化碳雷射加工方法 34
3.2.3 表面電漿改質方法 36
3.3 接觸角量測系統 37
3.4 正向力量測系統 38
3.4 陣列式掃描系統 39
第四章 實驗結果與討論 42
4.1 表面改質結果 42
4.1.1 圖案化電極之電阻值 43
4.2 感測器結構分析 44
4.2.1 SEM表面觀察 44
4.2.2 ANSYS®結構模擬 46
4.3 感測器基本特性量測 48
4.3.1 感測單元之材料特性量測 48
4.3.2 感測單元之力響應量測 49
4.3.3 感測單元之重複性量測 51
4.4 觸覺影像量測 53
4.5 滑動軌跡量測 56
第五章 結論與未來展望 59
5.1 結論 59
5.2 未來展望 61
參考文獻 63
自述 71

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