半導體、光電面板業、石化化工業等產業，製程大量使用含硫有機溶劑，易生成還原性硫化物，嗅覺閾值低，易造成臭味問題。本研究探討主題為以上流式厭氧污泥床串聯接觸曝氣法去除水中DMS及COD。
廢水經UASB之水力停留時間(HRT)2.4小時，串連經CA之HRT 4.63小時之操作條件下，廢水中COD可由平均385 mg/L去除至36 mg/L，UASB對廢水COD之平均去除率為25%，UASB串連CA對廢水COD之平均去除率為91%。在上述條件下，廢水經UASB及CA，可將其中之DMS (二甲基硫)由平均58.5 mg/L去除至0.17 mg/L，UASB串連CA對廢水DMS之平均去除率為99.7%。
廢水經UASB之體積有機負荷約10 kg COD/m3.day時，COD去除率可達50%；經CA之體積有機負荷約2.5 kg COD/m3.day時，COD去除率可達87%。UASB及CA系統對氨氮無顯著去除效果，但在CA之HRT約7小時，CA處理水含硝酸根，喜氣系統有硝化效果；CA之HRT降至4.63小時以下，系統無硝化效果。廢水經CA之HRT約7小時，CA處理水硫酸根濃度較進流水高，喜氣系統可將DMS轉化為硫酸根，CA之HRT降至4.63小時以下，DMS可能僅被轉化DMSO2。

Semiconductor and photo-electronic industries use a great amount of sulfur-containing organic solvents such as dimethyl sulfone (DMSO). DMSO in wastewaters effluent from the industries may be converted into odorous dimethyl sulfide (DMS) and vented into the atmosphere during the aerobic biotreatment of the wastewaters. The present study focuses on the treatment of a stream of wastewater produced from a Semiconductor packing and testing plant by an anaerobic-aerobic process to avoid the associated DMS odor problems when using aerobic process only. A pilot-scale UASB (upflow anaerobic sludge blanket) followed by a CA (contact aeration) reactor was used for the experimental test.
Results indicate that with a HRT (hydraulics retention time) of 2.4 and 4.63 hours, respectively, for the test wastewater flowing the UASB and the CA, on and average, COD (chemical oxygen demand) of the wastewater could be removed from 385 to 36 mg/L. The UASB and the whole system (UASB-CA) responded for removing 25 and 91% of COD, respectively, from the influent wastewater. By the condition, DMS in the fed wastewater could be removed from 58.5 to 0.17 mg/L by the UASB reactor and this could avoid DMS emitting problem associated the aeration operation in the following CA process. The whole system converted 99.7% of the influent DMS.
Results also show that 50 and 87% COD removals were achieved by UASB and the CA, respectively, at COD loadings of 10 and 2.5 kg COD/m3.day. CA had no apparent ammonia removal effect and DMS converted only to DMSO2 with a HRT of 4.63 hours. However, nitrification of ammonia and conversion of DMS to sulfate were observed with a HRT of around 7 hours for the wastewater through the CA.
Key words: semiconductor-manufacturing wastewater, dimethyl sulfide, anaerobic wastewater treatment, aerobic wastewater treatment

第一章、前 言 .......................................................................................................................... 1
1.1 研究緣起 ..................................................................................................................... 1
第二章 文獻回顧 ...................................................................................................................... 3
2.1 二甲基硫(DMS) ......................................................................................................... 3
2.1.1 二甲基硫(DMS)的來源 ................................................................................... 3
2.1.2 二甲基硫(DMS)的特性 ................................................................................... 4
2.1.3 廢水中 DMSO 生成 DMS 的機制 ................................................................... 5
2.2 含 DMSO 與 DMS 廢水的生物處理相關案例 ......................................................... 8
2.2.1 厭氧生物處理法 .............................................................................................. 8
2.2.2 好氧生物處理法 .............................................................................................. 9
2.2.3 SBR 的厭氧及好氧反應[12] ............................................................................ 10
2.2.4 厭氧濾床法[12] ................................................................................................ 14
2.2.5 厭氧流體化床反應器(AFBR) [12] .................................................................. 16
2.2.6 上流式厭氧污泥床法(UASB) [12] ................................................................. 17
2.2.7 AOA 生物處理 TFT-LCD 程序 .................................................................... 18
2.3 厭氣生物分解模式 ................................................................................................... 19
2.4 非生物法處理 DMSO 及 DMS 廢水相關文獻回顧 ............................................... 19
2.4.1 UV/H2O2 處理法 ............................................................................................ 19
2.4.2 連續式電透析處理法 .................................................................................... 22
2.4.3 多孔性金屬離子交換沸石去除 DMS ........................................................... 22
2.5 高科技產業水質分析及調查 ................................................................................... 23
第三章、研究方法 .................................................................................................................. 25
3.1 研究流程及架構 ........................................................................................................ 25
3.1.1 實驗流程 ........................................................................................................ 25
3.2 實驗設備與藥品 ....................................................................................................... 27
3.2.1 UASB 串聯接觸曝氣模組 ............................................................................. 27
3.3 實驗方法 ................................................................................................................... 28
3.3.1 系統操作條件 ................................................................................................. 28
3.3.2 UASB 反應器污泥植種 ................................................................................ 29
3.3.3 系統操作說明 ................................................................................................ 29
3.3.4 營養鹽 ............................................................................................................. 32
3.3.5 硫平衡計算 ..................................................................................................... 34
3.4 分析方法及分析原理(表 3.8) ................................................................................... 34
3.4.1 水樣中 DMS 濃度測定 ................................................................................. 34
3.4.2 反應液中氨氮含量 ......................................................................................... 35
3.4.3 化學需氧量 ( COD ) ...................................................................................... 35
3.4.4 化學需氧量負荷量 ......................................................................................... 35
3.4.5 水中陰離子檢測 ............................................................................................. 35
3.4.6 總凱氏氮 ........................................................................................................ 36
第四章、結果與討論 .............................................................................................................. 36
4.1 影響 COD、DMS 去除率的因素 ............................................................................ 37
4.1.1 pH 的影響 ....................................................................................................... 37
4.1.2 水力停留時間 ................................................................................................ 47
4.1.3 有機負荷 ......................................................................................................... 49
4.2 UASB+CA 系統對廢水的詳細處理效能 ................................................................ 55
4.2.1 總水力停留時間為 44.2 小時的系統操作情形 ........................................... 55
4.2.2 總水力停留時間為 21.1 小時的系統操作情形 ............................................ 57
4.2.3 當總水力停留時間為 10.6 小時的系統操作情形 ........................................ 65
4.2.4 當總水力停留時間為 7.03 小時的系統操作情形 ........................................ 67
4.3 系統氮及硫酸根討論 ................................................................................................ 74
第五章、結論及建議 .............................................................................................................. 76
5.1 結論 ........................................................................................................................... 76
5.2 建議 ........................................................................................................................... 77
第六章、參考資料 .................................................................................................................. 75
附錄…………………………………………………………………………………………...81

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