在此研究中，我們研究二氧化鈦及鈮摻雜二氧化鈦薄膜在ITO玻璃基板上不同之特性與應用。進行二氧化鈦及鈮摻雜二氧化鈦薄膜之物理、化學、光和電化學特性方面的量測與討論。物理特性方面，由場放射掃描電子顯微鏡來看薄膜的厚度並繪出生長曲線，利用X光繞射及原子力顯微鏡觀測膜的結構、粗糙度。化學特性部分，則由X射線光電子光譜學和傅立葉轉換中紅外光譜儀來看薄膜的化學組成比和化學鍵結。光特性部份，由反射式光譜儀來量測金屬氧化薄膜之穿透率，電化學特性部份，用循環伏安儀量測薄膜上色去色的耐久度測試。為了改善薄膜眾多特性，我們進行氧氣下回火處理的研究。
藉由鈮摻雜改善二氧化鈦薄膜中因缺陷而使得電致變色測試時所造成薄膜使用壽命下降的缺點；藉由上列所敘述之量測而探討主要造成電致變色退化的原因與機制。由循環伏安法測試出未摻雜之二氧化鈦薄膜電致變色耐久度為5000次，而鈮摻雜的二氧化鈦薄膜耐久度提升為10000次。上色去色穿透率差也因為摻雜鈮後的薄膜多孔特性增加從原先的61 %提升到70 %。

Titanium oxide (TiO2) films have been actively investigated as many applications because of the mechanical and chemical durability, high refractive index and high transparency. In catalytic and electrochemical applications, it has been utilized as a stable semiconductor electrode for the conversion of solar energy into chemical or electrical energy. Uniform TiO2 films were deposited on conductive glass substrate (ITO/glass) by liquid phase deposition (LPD) with the aqueous solutions of ammonium hexafluoro-titanate and boric acid.
Niobium oxide powder and Hydrofluoric acid which add deionized water were used to be Niobium doping solution. Undoped LPD-TiO2 has hydroxyl related defects and Li+ ions will be trapped to degrade the electrochromic durability. For niobium doping, the electrochromic characteristics were enhanced. Niobium doping in TiO2 can reduce hydroxyl related defects. The electrochromic durability was enhanced from 5×103 to 1×104 times. The transparency ratio was enhanced from 61 % to 70 % at the wavelength of 550 nm.
In our experiment, TiO2 films morphology and thickness was characterized by scanning electron microscopy (SEM), structure was characterized by X-ray diffraction (XRD) and surface roughness was measured by atomic force microscopy (AFM), chemical properties was characterized by X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy (FT-IR), optical properties was characterized by spectrophotometer (MP-100), and electrochromic characterized by cyclic voltammetry (CHI627C).

ACKNOWLEDGEMENT ii
摘 要 iii
ABSTRACT iv
CONTENTS vi
LIST OF FIGURES viii
LIST OF TABLE x
Chapter 1 1
Introduction 1
1-1 Developing Background of Electrochromism 1
1-2 Material of Electrochromic Films 2
1-3 Properties of Titanium Dioxide 3
1-4 Advantages of Liquid Phase Deposition 5
1-5 Motivation of Niobium doping in TiO2 6
Chapter 2 11
Experiments 11
2-1 LPD Deposition System 11
2-2 Preparation of ITO/glass Substrate 11
2-2.1 Cleaning Procedures of ITO/Glass 11
2-2.2 Polyimide Tape for Counter Electrode Cover 12
2-3 Preparation of Deposition Solution 12
2-3.1 Preparation of (NH4)2TiF6 Solution 12
2-3.2 Preparation of Boric Acid Solution 12
2-3.3 Preparation of Niobium Doping Solution 12
2-4 TiO2 Film Deposition 13
2-4.1 Undoped LPD-TiO2 Process 13
2-4.2 Nb-doped LPD-TiO2 Process 13
2-5 Mechanisms of LPD-TiO2 13
2-6 Characteristics 14
2-6.1 Physical Property 14
2-6.2 Chemical Property 15
2-6.3 Optical Property 15
2-6.4 Electrochromic Property 16
Chapter 3 22
Results and discussion 22
3-1 Electrochromic Reaction 22
3-2 Undped and Nb-doped LPD-TiO2 Films Deposited at 30 oC on ITO/glass Substrate 23
3-2.1 Deposition Rate and SEM Views of Undoped LPD-TiO2 Film 23
3-2.2 Deposition Rate and SEM Views of Nb-doped LPD-TiO2 Film 23
3-3 Atomic force microscopy (AFM) of Undoped and Nb-doped LPD-TiO2 Films 24
3-4 X-ray Diffraction Spectra of Undoped and Nb-doped LPD-TiO2 Films by Thermal Treatment 24
3-5 FTIR Spectra of Undoped and Nb-doped LPD-TiO2 Films 25
3-5.1 FTIR Spectra of Undoped LPD-TiO2 Film 25
3-5.2 FTIR Spectra of Nb-doped LPD-TiO2 Film 26
3-6 ESCA Analysis of Undoped and Nb-doped LPD-TiO2 Films 27
3-6.1 ESCA of LPD-TiO2 Film before Electrochromic Tests 27
3-6.2 ESCA of LPD-TiO2 Film after Electrochromic Tests 27
3-7 Optical Property of Undoped and Nb-doped LPD-TiO2 Films 28
3-7.1 Transparency Ratio of Undoped LPD-TiO2 Film 29
3-7.2 Transparency Ratio of Nb-doped LPD-TiO2 Film 29
3-8 Electrochemical Property of Undoped and Nb-doped LPD-TiO2 Films 30
3-8.1 Electrochemical Property of the Undoped LPD-TiO2 Film 30
3-8.2 Electrochemical Property of the Nb-doped LPD-TiO2 Film 31
3-9 Durability degradation of LPD-TiO2 Electrochromic Film 31
Chapter 4 60
Conclusions 60
References 61

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